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    • 1. 发明授权
    • MEMS variable inductor and capacitor
    • MEMS可变电感器和电容器
    • US06856499B2
    • 2005-02-15
    • US10402032
    • 2003-03-28
    • Robert B. Stokes
    • Robert B. Stokes
    • H05K1/16H01F17/00H01F21/04H01G5/04H01G5/14H03H7/01H01G7/00
    • H01G5/14H01F17/0006H01F21/04H01F2007/068H01G5/18H03H7/0115H03H2007/008
    • A variable passive component is provided for fabrication on a microelectromechanical system (MEMS) device. A conductive portion is provided on a low-profile sliding dielectric sheet that cooperates with a conductive portion disposed on a substrate to provide a variable passive component. The passive component can be a variable inductor provided by moving a shorted spiral inductor formed on the dielectric sheet over a spiral inductor on the substrate with varying degrees of overlap causing varying inductance values. The passive component can be a variable capacitor that consists of a large conductive pad on a dielectric plate which slides over two adjacent pads on the substrate with varying overlap causing varying capacitance values.
    • 提供可变无源部件用于在微机电系统(MEMS)装置上制造。 导电部分设置在与设置在基板上的导电部分配合以提供可变无源部件的薄型滑动电介质片上。 无源部件可以是可变电感器,其通过将形成在电介质片上的短路螺旋电感器移动到衬底上的螺旋电感器上,并以不同程度的重叠使电感值变化而提供。 无源部件可以是可变电容器,其由电介质板上的大导电焊盘构成,其在基板上的两个相邻焊盘上滑动,具有变化的重叠,导致变化的电容值。