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    • 3. 发明授权
    • Suscepter device for the preparation of a diamond film-coated body
    • 用于制备金刚石薄膜涂层体的可疑装置
    • US5304249A
    • 1994-04-19
    • US899023
    • 1992-06-15
    • Munehiro Chosa
    • Munehiro Chosa
    • C23C16/27C23C16/458C23C16/00
    • C23C16/274C23C16/277C23C16/458
    • In forming a diamond film on a surface of substrate by means of plasma method, there is employed in a plasma reacting chamber a supporting member having a top surface for placing the substrate so disposed as to be smaller than a bottom surface of the substrate and having engagement means for engaging with the substrate. When the substrate (particularly substrate for a cutting tool) placed on the top surface of the supporting member is brought into contact with plasma obtainable by exciting raw material gases, a diamond film is coated on the face, land and flank of the substrate for the cutting tool with a uniform film thickness.
    • 在通过等离子体法在基板表面上形成金刚石膜时,在等离子体反应室中使用支撑构件,该支撑构件具有顶表面,用于将衬底放置成小于衬底的底面,并且具有 用于与衬底接合的接合装置。 当放置在支撑构件的顶表面上的基板(特别是用于切割工具的基板)与通过激发原料气体可获得的等离子体接触时,金刚石膜被涂覆在基板的表面,平台和侧面上,用于 切割工具具有均匀的膜厚度。