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1. 发明申请

US20210210305A1 APPARATUS FOR WAVELENGTH RESOLVED ANGULAR RESOLVED CATHODOLUMINESCENCE 有权
公开(公告)号：US20210210305A1
公开(公告)日：2021-07-08
申请号：US17193154
申请日：2021-03-05
申请人： Gatan, Inc.
发明人： Michael Bertilson , John Andrew Hunt , David J. Stowe
IPC分类号： H01J37/22 , H01J37/244 , H01J37/28
摘要： Apparatuses for collection of wavelength resolved and angular resolved cathodoluminescence (WRARCL) emitted from a sample exposed to an electron beam (e-beam) or other excitation beams are described. Cathodoluminescence light (CL) may be emitted from a sample at specific angles relative to the excitation beam and analyzed with respect to light-emitting and other optical phenomena. The described embodiments allow collection of WRARCL data more efficiently and with significantly fewer aberrations than existing systems.

2. 发明授权

US11004656B2 Methods and apparatus for determining, using, and indicating ion beam working properties 有权
公开(公告)号：US11004656B2
公开(公告)日：2021-05-11
申请号：US14882297
申请日：2015-10-13
申请人： Gatan, Inc.
发明人： John Andrew Hunt , Steven Thomas Coyle , Michael Patrick Hassel-Shearer , Thijs C Hosman
IPC分类号： H01J37/304 , H01J37/30 , H01J37/08 , H01J37/24 , H01J37/305 , G01N1/44 , H01J37/317
摘要： Disclosed are embodiments of an ion beam sample preparation and coating apparatus and methods. A sample may be prepared in one or more ion beams and then a coating may be sputtered onto the prepared sample within the same apparatus. A vacuum transfer device may be used with the apparatus in order to transfer a sample into and out of the apparatus while in a controlled environment. Various methods to improve preparation and coating uniformity are disclosed including: rotating the sample retention stage; modulating the sample retention stage; variable tilt ion beam irradiating means, more than one ion beam irradiating means, coating thickness monitoring, selective shielding of the sample, and modulating the coating donor holder.

3. 发明申请

US20210125807A1 SYSTEM AND METHOD FOR ALIGNMENT OF CATHODOLUMINESCENCE OPTICS 有权
公开(公告)号：US20210125807A1
公开(公告)日：2021-04-29
申请号：US17077217
申请日：2020-10-22
申请人： Gatan, Inc.
发明人： John Andrew Hunt , Michael Bertilson
IPC分类号： H01J37/22 , H01J37/244 , H01J37/20 , H01J37/29
摘要： Systems and methods for automated alignment of cathodoluminescence (CL) optics in an electron microscope relative to a sample under inspection are described. Accurate placement of the sample and the electron beam landing position on the sample with respect to the focal point of a collection mirror that reflects CL light emitted by the sample is critical to optimizing the amount of light collected and to preserving information about the angle at which light is emitted from the sample. Systems and methods are described for alignment of the CL mirror in the XY plane, which is orthogonal to the axis of the electron beam, and for alignment of the sample with respect to the focal point of the CL mirror along the Z axis, which is coincident with the electron beam.

4. 发明授权

US10832887B2 Cryotransfer holder and workstation 有权
公开(公告)号：US10832887B2
公开(公告)日：2020-11-10
申请号：US16173307
申请日：2018-10-29
申请人： Gatan, Inc.
发明人： Alexander Jozef Gubbens , John Andrew Hunt , Masoud Azimi , Radosav Pantelic , Ron Zolkowski , Chris Booth
IPC分类号： H01J37/20 , G01N23/20025 , G01N1/42 , H01J37/26
摘要： A cryotransfer holder for mounting a specimen held at cryogenic temperature in an electron microscope is described. The holder includes a cylindrical dewar configured to maintain a constant center of mass about the holder axis regardless of orientation of the dewar. The holder further includes a sample shutter control mechanism that can be decoupled from the shutter to reduce vibration during imaging. There is also described a workstation for mounting specimens into the cryotransfer holder at cryogenic temperature. The workstation allows rotation about the cryotransfer holder axis to improve access to the sample placement area on the holder and to facilitate easy removal and retrieval of the sample after imaging.

5. 发明授权

US09966220B2 Electron energy loss spectrometer using direct detection sensor 有权
公开(公告)号：US09966220B2
公开(公告)日：2018-05-08
申请号：US15411194
申请日：2017-01-20
申请人： Gatan, Inc.
发明人： Colin Trevor , Matthew Lent , Alexander Jozef Gubbens , Edward James , Ray Dudley Twesten , Roice Joseph , SanJay Parekh , Thomas Sha
IPC分类号： H01J37/05 , H01J37/244 , H01J37/26 , H01J47/00 , G21K7/00 , G01N23/00 , H01J37/22 , H01J37/256 , H01J37/28
CPC分类号： H01J37/05 , H01J37/222 , H01J37/244 , H01J37/256 , H01J37/26 , H01J37/28 , H01J2237/0432 , H01J2237/05 , H01J2237/057 , H01J2237/2446 , H01J2237/24485 , H01J2237/24495 , H01J2237/24585 , H01J2237/2802
摘要： An electron energy loss spectrometer is described having a direct detection sensor, a high speed shutter and a sensor processor wherein the sensor processor combines images from individual sensor read-outs and converts a two dimensional image from said sensor into a one dimensional spectrum and wherein the one dimensional spectrum is output to a computer and operation of the high speed shutter is integrated with timing of imaging the sensor. The shutter is controlled to allow reduction in exposure of images corresponding to the individual sensor readouts. A plurality of images are exposed by imaging less than the full possible exposure and wherein the plurality of images are combined to form a composite image. The plurality of images can be comprised of images created by exposing the sensor for different exposure times.

6. 发明授权

US08653489B2 Ion beam sample preparation apparatus and methods 有权
标题翻译：离子束样品制备装置及方法
公开(公告)号：US08653489B2
公开(公告)日：2014-02-18
申请号：US13082361
申请日：2011-04-07
申请人： Steven Thomas Coyle , John Andrew Hunt
发明人： Steven Thomas Coyle , John Andrew Hunt
IPC分类号： G21K5/10
CPC分类号： G01N1/32 , H01J37/31 , H01J2237/026 , H01J2237/2007 , H01J2237/3118
摘要： Disclosed are embodiments of an ion beam sample preparation apparatus and methods for using the embodiments. The apparatus comprises an ion beam irradiating means in a vacuum chamber that may direct ions toward a sample, a shield blocking a portion of the ions directed toward the sample, and a shield retention stage with shield retention means that replaceably and removably holds the shield in a position. The shield has datum features which abut complementary datum features on the shield retention stage when the shield is held in the shield retention stage. The shield has features which enable the durable adhering of the sample to the shield for processing the sample with the ion beam. The complementary datum features on both shield and shield retention stage enable accurate and repeatable positioning of the sample in the apparatus for sample processing and reprocessing. Additionally, apparatus kits are disclosed that enable the use of the same shields in the observation of prepared samples.
摘要翻译：公开了用于使用实施例的离子束样品制备装置和方法的实施方案。该装置包括在真空室中的离子束照射装置，其可以将离子定向到样品，阻挡部分朝向样品的离子的屏蔽件，以及具有屏蔽保持装置的屏蔽保持台，该屏蔽保持装置可替换地和可移除地将屏蔽保持在一个位置。当屏蔽保持在屏蔽保持阶段时，屏蔽具有与屏蔽保持平台上的辅助基准特征相交的基准特征。屏蔽件具有能够将样品耐久地粘附到屏蔽件的特征，以用离子束处理样品。屏蔽和屏蔽保持阶段的补充基准特征使得样品能够准确和可重复地定位在用于样品处理和再处理的设备中。此外，公开了能够在观察制备的样品时使用相同屏蔽的装置套件。

7. 发明申请

US20140027632A1 SYSTEM AND METHOD FOR MEASURING ANGULAR LUMINESCENCE IN A CHARGED PARTICLE MICROSCOPE 审中-公开
标题翻译：用于测量充电粒子微观结构中的角度辐射的系统和方法
公开(公告)号：US20140027632A1
公开(公告)日：2014-01-30
申请号：US13558948
申请日：2012-07-26
申请人： David Stowe , Simon Andrew Galloway , James Parsons
发明人： David Stowe , Simon Andrew Galloway , James Parsons
IPC分类号： G01N23/22
CPC分类号： G01N23/2254 , G01N2223/418 , H01J37/226 , H01J2237/2445 , H01J2237/2446 , H01J2237/24571 , H01J2237/24578 , H01J2237/2808
摘要： Cathodoluminescence performed in the scanning electron microscope brings the advantage of localized excitation of individual microscopic structures. When luminescent structures are characterized, the intensity, wavelength, polarization and angular emission of the luminescence are all of interest. The invention provides an apparatus for determining the angular distribution of the radiated light, and in particular provides the user with rotational symmetry which is essential for the principle of measurement. This is compatible with additional polarization and spectral bandpass filtering methods used to characterize the luminescence and understand the specimen.
摘要翻译：在扫描电子显微镜中进行的阴极发光具有各个微观结构的局部激发的优点。当发光结构被表征时，发光的强度，波长，极化和角发射都是令人感兴趣的。本发明提供一种用于确定辐射光的角度分布的装置，并且特别地为用户提供对于测量原理至关重要的旋转对称性。这与用于表征发光和了解样品的附加极化和光谱带通滤波方法兼容。

8. 发明授权

US08542300B2 Method for real-time removal of vertical scan streaks in a CCD 有权
标题翻译：在CCD中实时去除垂直扫描条纹的方法
公开(公告)号：US08542300B2
公开(公告)日：2013-09-24
申请号：US12533288
申请日：2009-07-31
申请人： Paul Mooney , Chengye Mao
发明人： Paul Mooney , Chengye Mao
IPC分类号： H04N9/64
CPC分类号： H04N5/335 , H04N5/3595
摘要： Methods are disclosed for correcting vertical line streaks in an interline or full-frame CCD. The method includes the step of subtracting an overscan row from each row of a previous image or from each row of a next image, such that each row of the final image contains the same readout smear effect and such that readout overscan rows contain the same smear information as each row of the final image. The method is also described for use with frame transfer CCDs.
摘要翻译：公开了用于校正行间或全帧CCD垂直线条纹的方法。该方法包括从先前图像的每行或下一图像的每一行减去过扫描行的步骤，使得最终图像的每行包含相同的读出拖影效果，并且使得读出的超扫描行包含相同的涂片信息作为最终图像的每一行。该方法也被描述为与帧传送CCD一起使用。

9. 发明申请

US20100327161A1 METHOD FOR DISCRIMINATION OF BACKSCATTERED FROM INCOMING ELECTRONS IN IMAGING ELECTRON DETECTORS WITH A THIN ELECTRON-SENSITIVE LAYER 有权
标题翻译：用于将具有电子感应层的电子探测器放入电子装置中进行分离的方法
公开(公告)号：US20100327161A1
公开(公告)日：2010-12-30
申请号：US12823375
申请日：2010-06-25
申请人： Paul Mooney
发明人： Paul Mooney
IPC分类号： G01N23/00
CPC分类号： H01J37/05 , H01J37/244 , H01J37/26 , H01J2237/05 , H01J2237/2441 , H01J2237/24455 , H01J2237/24485 , H01J2237/26 , H01J2237/2802
摘要： Methods are disclosed for operating a device having a high energy particle detector wherein the particles create first incoming traversal events, outgoing backscatter events, higher-order in and out events and incoming events caused by particles which backscatter out of the device, hit nearby mechanical structures and are scattered back into the device. Exemplary method steps include discriminating incoming traversal events from outgoing backscatter events, higher-order in and out events and incoming events by limiting dose rate to a level at ensures that separate events do not overlap and discriminating events from background and from other events based on total energy in each event; discriminating backscatter events from incoming traversal events based on electron path shape; or determining that a first event and a second event are coincident with each other and separating incoming form backscatter events based on electron path shape and energy level.
摘要翻译：公开了用于操作具有高能量粒子检测器的装置的方法，其中颗粒产生第一进入的穿越事件，出射的后向散射事件，高阶进入和离开事件以及由反向散射出装置的颗粒引起的进入事件，撞击附近的机械结构并分散回设备。示例性方法步骤包括通过将剂量率限制到一个水平来区分进入的遍历事件与输出的后向散射事件，高阶进入和离开事件以及进入的事件，以确保单独的事件不与基于总计的背景和来自其他事件的事件重叠和区分事件每个事件的能量; 基于电子路径形状鉴别反向散射事件与进入的穿越事件; 或者确定第一事件和第二事件彼此重合，并基于电子路径形状和能级分离入射形式的反向散射事件。

10. 发明申请

US20100123077A1 PASSIVE PIXEL DIRECT DETECTION SENSOR 审中-公开
标题翻译：被动像素直接检测传感器
公开(公告)号：US20100123077A1
公开(公告)日：2010-05-20
申请号：US12620979
申请日：2009-11-18
申请人： Paul Mooney , Alexander Jozef Gubbens
发明人： Paul Mooney , Alexander Jozef Gubbens
IPC分类号： G01N23/04 , H01J37/26
CPC分类号： H01J37/26 , H01J37/244 , H01L27/146
摘要： A simplification of the charge-collection pixel of an imaging detector for high-energy electrons is disclosed, incorporating removal of the buffer amplifier. While sacrificing speed and noise performance of the readout somewhat and therefore appearing counter-intuitive, this configuration has the potential to significantly reduce the susceptibility of the pixel to radiation damage.
摘要翻译：公开了用于高能电子的成像检测器的电荷收集像素的简化，包括去除缓冲放大器。尽管有些读取器的速度和噪声性能受损，因此出现反直觉，但是这种配置具有显着降低像素对辐射损伤的敏感性的潜力。

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