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    • 2. 发明申请
    • DEPOSITING LITHIUM METAL OXIDE ON A BATTERY SUBSTRATE
    • 在电池基底上沉积锂金属氧化物
    • US20140166471A1
    • 2014-06-19
    • US14089019
    • 2013-11-25
    • FRONT EDGE TECHNOLOGY, INC.
    • Weng-Chung WANGKai Wei NIEH
    • H01M4/04
    • H01M4/0426C23C14/08C23C14/352H01M4/139H01M4/1391H01M10/0585
    • A method of depositing lithium metal oxide on a battery substrate in a sputtering chamber comprising a substrate support, first and second sputtering targets each comprising lithium metal oxide, and first and second electrodes about the backside surfaces of the first and second sputtering targets respectively. In the method, a substrate is placed on the substrate support, sputtering gas maintained at a pressure and energized by applying an alternating voltage of AC power to the first and second electrodes so that each electrode is alternately either an anode or a cathode. The alternating voltage can be applied within a frequency range while also applying a time varying magnetic field about each of the surfaces of the first and second targets.
    • 一种在溅射室中的电池基板上沉积锂金属氧化物的方法,包括分别包括基板支撑体,分别包含锂金属氧化物的第一和第二溅射靶以及围绕第一和第二溅射靶的背面的第一和第二电极。 在该方法中,将基板放置在基板支撑体上,通过向第一和第二电极施加交流电力的交流电压,使保持在压力下并通电的溅射气体交替地使阳极或阴极交替。 可以在频率范围内施加交流电压,同时还对第一和第二靶的每个表面施加时变磁场。