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81. 发明授权

US5475228A Unipolar blocking method and apparatus for monitoring electrically charged particles 失效
标题翻译：用于监测带电粒子的单极性阻断方法和装置
公开(公告)号：US5475228A
公开(公告)日：1995-12-12
申请号：US345079
申请日：1994-11-28
申请人： Jose C. Palathingal
发明人： Jose C. Palathingal
IPC分类号： H05H1/00 , H01J47/18
CPC分类号： H01J37/3045 , H01J37/244 , H05H1/0081 , H01J2237/24507
摘要： An apparatus for monitoring an electrically charged particle pulse includes at least one coil defining an opening therethrough. The coil generates a bipolar signal responsive to the electrically charged particle pulse passing through the opening, and the bipolar signal comprises a first portion having a first polarity and a second portion having a second polarity. Unipolar blocking diode connected to the coil passes the first portion of the bipolar signal having a first polarity and blocks the second portion of the bipolar signal having the second polarity. Monitoring Device connected to the unipolar blocking diode generates an output signal representative of a predetermined characteristic of the particle based upon the first portion of the bipolar signal which is passed by the unipolar blocking diode. In a preferred embodiment, the coil has a toroidal shape and comprises a plurality of windings electrically connected in parallel, and each of these windings comprises a plurality of conductive loops. The apparatus may also comprise a series of coils arranged so as to define a predetermined path for passage of the electrically charged particle through each respective opening of each respective coil.
摘要翻译：用于监测带电粒子脉冲的装置包括限定穿过其中的开口的至少一个线圈。线圈产生响应通过开口的带电粒子脉冲的双极信号，双极性信号包括具有第一极性的第一部分和具有第二极性的第二部分。连接到线圈的单极阻塞二极管通过具有第一极性的双极性信号的第一部分并且阻挡具有第二极性的双极性信号的第二部分。连接到单极阻塞二极管的监控装置基于由单极阻塞二极管通过的双极性信号的第一部分产生表示粒子的预定特性的输出信号。在优选实施例中，线圈具有环形形状并且包括并联电连接的多个绕组，并且这些绕组中的每一个包括多个导电环路。该装置还可以包括一系列线圈，其布置成限定用于使带电粒子通过每个相应线圈的每个相应开口的预定路径。

82. 发明授权

US5142234A Particle beam accelerator electromagnetic arc detection system 失效
标题翻译：粒子束加速器电磁弧检测系统
公开(公告)号：US5142234A
公开(公告)日：1992-08-25
申请号：US783607
申请日：1991-10-28
申请人： Robert A. Snead
发明人： Robert A. Snead
IPC分类号： G01R31/12 , H02H1/00 , H05H1/00
CPC分类号： G01R31/12 , H02H1/0015 , H05H1/0081
摘要： Low frequency broadband energy is separated from an accelerator structure ndamental radio frequency (rf) energy in the broadband electromagnetic energy within specific frequency bands. The particle beam accelerator electromagnetic arc detection system comprises employing signal lines extended from existing particle beam accelerator diagnostic sensors to electrical filter circuits. Depending on the application requirements, filters are grouped by types such as low-pass, high pass, or bandpass types. The bandpass filters are employed in banks in a preferred embodiment to reject all electrical signals except those within the band of interest. The increase in broadband electromagnetic energy radiated through the accelerator structure as an arc begins to form is readily detectable in the rf spectrum at frequencies below 10 MHz. The electrical signals received by the filters are subsequently passed to detectors which produce a direct current (DC) level proportional to the strength of the signal. The outputs from the rf detectors are then fed to processing logic. When the selected set of rf detectors becomes active, the processor declares an arc condition and produces appropriate signals to inform the main system processor which initiates protective action (e.g., crowbar the high voltage by power supply protection circuitry).
摘要翻译：低频宽带能量与特定频带宽带电磁能中的加速器结构基波射频（rf）能量分离。粒子束加速器电磁波检测系统包括从现有的粒子束加速器诊断传感器延伸到电气滤波器电路的信号线。根据应用要求，滤波器按照低通，高通或带通类型的类型进行分组。在优选实施例中，带通滤波器用于存储体，以排除除感兴趣频带内的所有电信号。随着电弧开始形成的加速器结构辐射的宽带电磁能的增加在频率低于10MHz的频谱范围内是容易检测到的。由滤波器接收的电信号随后传递到产生与信号强度成比例的直流（DC）电平的检测器。然后将rf检测器的输出馈送到处理逻辑。当所选择的一组rf检测器变为有效时，处理器声明一个电弧条件并产生适当的信号，以通知主系统处理器启动保护动作（例如，通过电源保护电路撬动高电压）。

83. 发明授权

US5031125A Apparatus for measuring electron temperature 失效
标题翻译：用于测量电子温度的装置
公开(公告)号：US5031125A
公开(公告)日：1991-07-09
申请号：US334200
申请日：1989-04-06
申请人： Kazuo Shimizu , Hiroshi Amemiya , Yuichi Sakamoto
发明人： Kazuo Shimizu , Hiroshi Amemiya , Yuichi Sakamoto
IPC分类号： H01J37/32 , H05H1/00
CPC分类号： H01J37/32935 , H01J37/32954 , H05H1/0081
摘要： Apparatus for measuring the electron temperature of plasma includes a first probe which is inserted in the plasma to detect the floating potential. Two sequentially generated pulses of distinct voltages are added to the detected floating potential and these summed voltages are then sequentially applied to the plasma via a second probe. The current in the second probe is detected and the electron temperature is then calculated from the values of the voltage pulses and the currents detected by the second probe.
摘要翻译：用于测量等离子体的电子温度的装置包括插入等离子体中以检测浮动电位的第一探针。将两个顺序产生的不同电压的脉冲加到检测到的浮动电位上，然后这些相加的电压经由第二探针被顺序施加到等离子体。检测第二探针中的电流，然后根据由第二探针检测的电压脉冲和电流的值计算电子温度。

84. 发明授权

US4388588A Flush mountable plasma density profile probe device 失效
标题翻译：可安装等离子体密度剖面探头装置
公开(公告)号：US4388588A
公开(公告)日：1983-06-14
申请号：US242086
申请日：1981-03-09
申请人： Leonard S. Taylor
发明人： Leonard S. Taylor
IPC分类号： G01R19/08 , G01R29/00 , H05H1/00 , G01R31/02
CPC分类号： G01R29/00 , G01R19/08 , H05H1/0081
摘要： Information about the plasma density profile in an aerodynamic flow field of plasma adjacent a supersonic space vehicle or test model is provided by a flush mountable plasma density profile probe device having at least three striplines embedded in and separated by a dielectric support member from a conducting ground plane therebelow. In operation, the device is affixed flush and conformally to the surface of the space vehicle or test model. The plasma density profile is determined from a plot of data points derived from sequential measurements, in the plasma flow field environment, of the conduction between a driven stripline and parallel flush embedded additional striplines in the order of the nearest stripline to the furtherest stripline from the driven stripline. Standard formulas can be applied to determine the data points.
摘要翻译：关于在超音速空间载体或测试模型附近的等离子体空气动力学流场中的等离子体密度分布的信息由具有至少三条带状线的平面安装式等离子体密度分布探针装置提供，所述至少三条带状线嵌入电介质支撑构件并从导电地层分离飞机在下面。在操作中，设备与空间车辆或测试模型的表面齐平并保持贴合。等离子体密度分布是根据从等离子体流场环境中的顺序测量得到的数据点，从驱动带状线和平行冲洗嵌入的附加带状线之间的导通，以最接近的带状线到从第二条带状线带状线。可以应用标准公式来确定数据点。

85. 发明申请

US20190174616A1 Method and system for carrying out plasma chemical reaction in gas flow 审中-公开
公开(公告)号：US20190174616A1
公开(公告)日：2019-06-06
申请号：US15829360
申请日：2017-12-01
申请人： DM ECO Plasma, Inc.
发明人： Dmitry Medvedev
IPC分类号： H05H1/34 , B01J12/00 , B01J19/08 , H05H1/00
CPC分类号： H05H1/3405 , B01J12/002 , B01J19/088 , B01J2219/0809 , B01J2219/0824 , B01J2219/083 , B01J2219/0869 , B01J2219/0875 , H05H1/0081 , H05H1/48 , H05H2001/3442
摘要： A plasma chemical reactor including an anode having a generally cylindrical shape and an axis of rotational symmetry; a cathode inside the anode and co-axial with the anode; a hot plasma channel between the between the anode and the cathode; a gas input module providing gas flow into the anode; a gas output module at a distal end of the anode; and a high voltage power supply providing with a current in a range of 0.1-1.0 A. The high voltage power supply provides a voltage to the cathode in a range of 0-5 kV, a power of at least 1 kW, and a voltage/current ratio of at least 1000 V/A.

86. 发明授权

US09756713B2 Method and control unit for operating a plasma generation apparatus 有权
公开(公告)号：US09756713B2
公开(公告)日：2017-09-05
申请号：US14648426
申请日：2013-11-27
申请人： OERLIKON METCO AG, WOHLEN
发明人： Florian Liechti , Albert Friedery , Hartmut Koschnitzke , Rene Groeber
IPC分类号： H05H1/30 , H05H1/00 , H05H1/36
CPC分类号： H05H1/30 , H05H1/0081 , H05H1/36
摘要： The invention relates to a method and to a control unit for operating the plasma generation apparatus.The invention is based on a method and a control unit in which a voltage is applied as an ignition voltage between an anode and a cathode for ignition of a plasma.In order to enable a gentle operation of the plasma generation apparatus it is provided in accordance with the invention that a check is continuously carried out during the ignition process whether the ignition of the plasma has been effected. Additionally, the ignition voltage (UZ) is increased starting from an initial ignition voltage (UZA) and after recognizing an effected ignition (at the point in time tZ) of the plasma, the voltage is reduced between the anode and the cathode to a maintenance voltage (UA).

87. 发明授权

US09658191B2 Atomic flux measurement device 有权
公开(公告)号：US09658191B2
公开(公告)日：2017-05-23
申请号：US13733594
申请日：2013-01-03
申请人： THE DOSHISHA , ARIOS INC.
发明人： Tadashi Ohachi , Motoi Wada , Osamu Ariyada , Nobuhiko Yamabe
IPC分类号： G01N27/70 , C23C14/54 , C30B23/00 , H05H1/00 , G06F17/00
CPC分类号： G01N27/70 , C23C14/543 , C30B23/005 , G06F17/00 , H05H1/0081
摘要： An atomic flux measurement device for measuring the amount of dissociated atomic flux produced by discharge and emitted from a plasma generation cell into a vacuum camber. The atomic flux measurement device includes a counter electrode body including a pair of first and second sheet-like electrodes that are arranged substantially parallel to each other with a predetermined spacing between them, a direct-current power supply configured to maintain the first sheet-like electrode at a negative potential so that atoms attached to the inner surface of the sheet-like electrode undergo self-ionization and to apply a direct-current voltage between the first and second sheet-like electrodes so that a current flows between the first and second sheet-like electrodes, and a direct-current ammeter configured to measure a current flowing due to electrons emitted by the self-ionization of the dissociated atoms attached to the inner surface of the first sheet-like electrode.

88. 发明申请

US20160198558A1 AN APPARATUS AND METHOD FOR DIAGNOSTICS OF NETURAL RADICALS IN PLASMA 审中-公开
标题翻译：等离子体中的电离辐射诊断装置和方法
公开(公告)号：US20160198558A1
公开(公告)日：2016-07-07
申请号：US14912035
申请日：2014-07-30
申请人： NANYANG TECHNOLOGICAL UNIVERSITY
发明人： Chia Sern CHAN , Shuyan XU , Pavlo RUTKEVYCH , Luxiang XU
IPC分类号： H05H1/00 , H01J37/32
CPC分类号： H05H1/0037 , G01N27/62 , H01J37/32954 , H01J37/32972 , H05H1/0081
摘要： An apparatus for diagnostics of neutral radicals in plasma, the apparatus comprising: a portable probe configured to be attached to and extend into a plasma chamber to obtain information from plasma contained in the plasma chamber, the probe comprising a metallic rod configured to be biased with an alternating current voltage applied to the probe to obtain current measurements; a transparent dielectric sleeve having a large bandgap configured to allow light transmission to obtain optical emission spectra from the plasma; and an insulated thermocouple junction provided in the metallic rod, the thermocouple junction configured to measure equilibrium temperature of the probe.
摘要翻译：一种用于诊断等离子体中的中性自由基的装置，所述装置包括：便携式探针，其被配置为附接到等离子体室并且延伸到等离子体室中以从所述等离子体室中包含的等离子体获得信息，所述探针包括金属杆，所述金属杆被配置为与施加到探针的交流电压以获得电流测量值; 透明电介质套管，其具有被配置为允许光透射从所述等离子体获得光发射光谱的大带隙; 以及设置在金属杆中的绝缘热电偶接头，热电偶接头被配置成测量探头的平衡温度。

89. 发明授权

US09170295B2 Method and apparatus for detecting arc in plasma chamber 有权
标题翻译：在等离子体室中检测电弧的方法和装置
公开(公告)号：US09170295B2
公开(公告)日：2015-10-27
申请号：US13779181
申请日：2013-02-27
申请人： NEW POWER PLASMA CO., LTD.
发明人： Sang-Don Choi
IPC分类号： H01J7/24 , G01R31/24 , H05H1/46 , G01R19/00 , H05H1/00 , H01J37/32 , G01R27/08
CPC分类号： G01R31/245 , G01R19/0061 , G01R27/08 , H01J37/32082 , H01J37/32944 , H05H1/0081 , H05H1/46
摘要： An apparatus for detecting an arc in a plasma chamber is designed to detect the respective voltage and current values of RF power supplied to the plasma chamber and calculate the ratio of the voltage and current values to accomplish a required control of the supplying of the power. When it is determined that the arc is generated, the apparatus rapidly controls the supplying of the power to prevent damages on the plasma chamber and contaminations on the materials to be processed due to the generation of the arc.
摘要翻译：用于检测等离子体室中的电弧的装置被设计成检测提供给等离子体室的RF功率的各自的电压和电流值，并计算电压和电流值的比率，以实现对电力供应的所需控制。当确定产生电弧时，设备快速地控制供电，以防止等离子体室的损坏和由于电弧的产生而被处理材料的污染。

90. 发明授权

US09074285B2 Systems for detecting unconfined-plasma events 有权
标题翻译：无侧限等离子体事件检测系统
公开(公告)号：US09074285B2
公开(公告)日：2015-07-07
申请号：US12101804
申请日：2008-04-11
申请人： John Pease , Seyed Jafar Jafarian-Tehrani
发明人： John Pease , Seyed Jafar Jafarian-Tehrani
IPC分类号： C23C16/00 , C23F4/00 , H01J37/32 , H05H1/00
CPC分类号： C23F4/00 , H01J37/32935 , H05H1/0081
摘要： A system for detecting unconfined-plasma events in a plasma processing chamber is disclosed. The system may include a sensor disposed in the plasma processing chamber for providing a current when unconfined plasma is present in the plasma processing chamber. The system may also include a converter for converting the current into a voltage and a filter for removing noise from the voltage to provide a first signal. The system may also include a detector for determining presence of the unconfined plasma using an amplified level of the first signal and/or the first signal. The system may also include a conductor for coupling the sensor and the converter to conduct the current from the sensor to the converter. The system may also include a shield for enclosing at least a portion of the conductor to at least reduce electromagnetic noise received by the conductor.
摘要翻译：公开了一种用于检测等离子体处理室中的无约束等离子体事件的系统。该系统可以包括设置在等离子体处理室中的传感器，用于当等离子体处理室中存在无约束等离子体时提供电流。该系统还可以包括用于将电流转换成电压的转换器和用于从电压去除噪声以提供第一信号的滤波器。该系统还可以包括用于使用第一信号和/或第一信号的放大电平来确定无约束等离子体的存在的检测器。该系统还可以包括用于耦合传感器和转换器以将电流从传感器传导到转换器的导体。该系统还可以包括用于封闭导体的至少一部分以至少降低由导体接收的电磁噪声的屏蔽。

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