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81. 发明授权

US4503708A Reflection acoustic microscope for precision differential phase imaging 失效
标题翻译：反射声学显微镜用于精密差分相位成像
公开(公告)号：US4503708A
公开(公告)日：1985-03-12
申请号：US464394
申请日：1983-02-07
申请人： Gordon S. Kino , Butrus T. Khuri-Yakub , Simon D. Bennett , Kenneth K. Liang
发明人： Gordon S. Kino , Butrus T. Khuri-Yakub , Simon D. Bennett , Kenneth K. Liang
IPC分类号： G01N29/06 , G01S15/89 , G01N29/00
CPC分类号： G01N29/0681 , G01S15/8906
摘要： An acoustic microscope comprising a transducer for transmitting acoustic signals towards the surface to be studied, and means for receiving at least one reflected signal from the surface; in many embodiments of the invention, signals are received from two separate points. The signals received are passed to a synchronous phase detection system for analysis. The signals may be received at the same phase detector input and separated according to their expected time of receipt relative to their time of transmission, or they may be received at separated points on the transducer related to their separated points of transmission. The separated return signals are compared on the basis of phase (and in certain embodiments, magnitude) differential either to each other or to an internally generated reference signal to analyze the surface characteristics of the material.
摘要翻译：一种声学显微镜，包括用于向待研究的表面传送声学信号的换能器，以及用于从所述表面接收至少一个反射信号的装置; 在本发明的许多实施例中，从两个分开的点接收信号。接收到的信号被传递到同步相位检测系统进行分析。信号可以在相同的相位检测器输入处接收，并根据其相对于其传输时间的预期接收时间分离，或者它们可以在与其分离的传输点相关的传感器上的分离点处被接收。基于相位（和在某些实施例中的幅度）差分彼此或与内部产生的参考信号对分离的返回信号进行比较，以分析材料的表面特性。

82. 发明授权

US4255971A Thermoacoustic microscopy 失效
标题翻译：热声显微镜
公开(公告)号：US4255971A
公开(公告)日：1981-03-17
申请号：US956668
申请日：1978-11-01
申请人： Allan Rosencwaig
发明人： Allan Rosencwaig
IPC分类号： G01N29/00 , G01N21/17 , G01N29/06 , G01N29/24 , G01N29/04
CPC分类号： G01N29/2425 , G01N21/1702 , G01N29/0681 , G01N2291/02881 , G01N2291/0423
摘要： Method and apparatus for thermoacoustic or thermal wave microscopy to detect surface and subsurface information from a material on a microscopic scale. A thermal wave is generated in a material by causing periodic, localized heating at a microscopic spot by focusing intensity modulated light, or electromagnetic radiation or particle beam, on the spot. The thermoacoustic signal produced provides information about material composition, structure, and the presence of energy deexcitation processes such as fluorescence, photochemistry and photovoltaic processes. The sample is scanned as a two-dimensional array of microscopic spots. Full depth-profiling of the material is provided by varying the modulation frequency of the energy source.
摘要翻译：用于热声或热波显微镜的方法和装置，用于从微观尺度的材料中检测表面和地下信息。通过在现场聚焦强度调制光或电磁辐射或粒子束，在微观点发生周期性局部加热，在材料中产生热波。所产生的热声信号提供关于材料组成，结构以及能量去激发过程如荧光，光化学和光伏过程的存在的信息。将样品作为二维数组的微观斑点进行扫描。通过改变能源的调制频率来提供材料的全深度分布。

83. 发明授权

US11927564B2 Cantilever, ultrasound acoustic microscopy device comprising the cantilever, method of using the same and lithographic system including the same 有权
公开(公告)号：US11927564B2
公开(公告)日：2024-03-12
申请号：US17426588
申请日：2020-02-03
申请人： Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
发明人： Maarten Hubertus Van Es , Abbas Mohtashami , Benoit Andre Jacques Quesson , Paul Louis Maria Joseph Van Neer
IPC分类号： G01N29/06 , G01N29/036 , G01Q60/32 , G01Q70/06 , G01Q70/10 , G01Q80/00
CPC分类号： G01N29/0681 , G01N29/036 , G01Q60/32 , G01Q70/06 , G01Q70/10 , G01Q80/00 , G01N2291/014 , G01N2291/0427
摘要： A cantilever (30) for an ultrasound acoustic microscopy device is provided comprising a transmission tip (31) to contact a sample (11) to therewith transmit an ultrasound acoustic signal as an ultrasound acoustic wave into the sample. The cantilever further comprises a reception tip (32) separate from the transmission tip (31) to contact the sample to receive an acoustic signal resulting from reflections of the ultrasound wave from within the sample.

84. 发明申请

US20190227097A1 METHOD OF AND SYSTEM FOR PERFORMING DEFECT DETECTION ON OR CHARACTERIZATION OF A LAYER OF A SEMICONDUCTOR ELEMENT OR SEMI-MANUFACTURED SEMICONDUCTOR ELEMENT 审中-公开
公开(公告)号：US20190227097A1
公开(公告)日：2019-07-25
申请号：US16329094
申请日：2017-08-31
申请人： Nederlandse Organisatie voor toegepast-natuurwetenschappelijk onderzoek TNO
发明人： Hamed Sadeghian Marnani , Maarten Hubertus van Es , Rutger Meijer Timmerman Thijssen
IPC分类号： G01Q20/00 , G01N29/06 , G01N29/04 , H01L21/66
CPC分类号： G01Q20/00 , G01N29/00 , G01N29/041 , G01N29/0681 , G01N2291/0427 , G01N2291/2697 , G01Q60/32 , H01L22/12
摘要： The present document relates to a method of performing defect detection on a self-assembled monolayer of a semiconductor element or semi-manufactured semiconductor element, using an atomic force microscopy system. The system comprises a probe with a probe tip, and is configured for positioning the probe tip relative to the element for enabling contact between the probe tip and a surface of the element. The system comprises a sensor providing an output signal indicative of a position of the probe tip. The method comprises: scanning the surface with the probe tip; applying an acoustic vibration signal to the element; obtaining the output signal indicative of the position of the probe tip; monitoring probe tip motion during said scanning for mapping the surface of the semiconductor element, and using a fraction of the output signal for mapping contact stiffness indicative of a binding strength.

85. 发明授权

US09991176B2 Non-destructive acoustic metrology for void detection 有权
公开(公告)号：US09991176B2
公开(公告)日：2018-06-05
申请号：US15515126
申请日：2015-09-29
申请人： Manjusha Mehendale , Michael Kotelyanskii , Todd W. Murray , Robin Mair , Priya Mukundhan , Jacob D. Dove , Xueping Ru , Jonathan Cohen , Timothy Kryman
发明人： Manjusha Mehendale , Michael Kotelyanskii , Todd W. Murray , Robin Mair , Priya Mukundhan , Jacob D. Dove , Xueping Ru , Jonathan Cohen , Timothy Kryman
IPC分类号： H01L21/66 , G01N29/06 , G01N29/07 , G01N29/24 , G01N29/46 , H01L21/768 , G01N29/04
CPC分类号： H01L22/12 , G01N29/04 , G01N29/06 , G01N29/0681 , G01N29/069 , G01N29/07 , G01N29/2418 , G01N29/46 , G01N2291/0289 , H01L21/76898 , H01L22/20
摘要： Advanced interconnect technologies such as Through Silicon Vias (TSVs) have become an integral part of 3-D integration. Methods and systems and provided for laser-based acoustic techniques in which a short laser pulse generates broadband acoustic waves that propagate in the TSV structure. An optical interferometer detects the surface displacement caused by the acoustic waves reflecting within the structure as well as other acoustic waves traveling near the surface that has information about the structure dimensions and irregularities, such as voids. Features of voids, such as their location, are also identified based on the characteristics of the acoustic wave as it propagates through the via. Measurements typically take few seconds per site and can be easily adopted for in-line process monitoring.

86. 发明申请

US20170363582A1 METHOD AND SYSTEM FOR OBLIQUE BACKSCATTERING ULTRASOUND IMAGING 审中-公开
公开(公告)号：US20170363582A1
公开(公告)日：2017-12-21
申请号：US15538802
申请日：2015-12-23
申请人： TRUSTEES OF BOSTON UNIVERSITY
发明人： Jerome Charles MERTZ
IPC分类号： G01N29/06 , G01S7/52 , A61B8/00 , A61B8/15 , A61B8/08
CPC分类号： G01N29/0681 , A61B8/15 , A61B8/4218 , A61B8/4488 , A61B8/4494 , A61B8/48 , A61B8/5261 , A61B8/54 , G01N2291/044 , G01S7/52046 , G01S7/52085 , G01S15/8913
摘要： An Oblique Backscatter Ultrasound imaging system includes a transceiver that has an US source and a plurality of US detectors configured in receive signals off axis from the US source. While the system is arranged in a reflective configuration, the device produces transmissive contrast signals to yield improved images. The transceiver can be mounted to a movable stage or robotic arm to enable it to scan the surface of a target. Alternatively, scanning can be performed by 1D or 2D phased-array transmission or detection.

87. 发明授权

US09513260B2 Methods, systems and apparatus of an all-optics ultrasound sensor 有权
标题翻译：全光学超声波传感器的方法，系统和装置
公开(公告)号：US09513260B2
公开(公告)日：2016-12-06
申请号：US14299807
申请日：2014-06-09
申请人： Northwestern University
发明人： Hao F. Zhang , Cheng Sun
IPC分类号： G01N29/06 , G01N29/34 , G01N29/14 , G01N29/24 , G01N21/17 , G02B6/12 , G02B6/122 , G02B21/00
CPC分类号： G01N29/0681 , G01N21/1702 , G01N29/14 , G01N29/2418 , G01N29/34 , G01N2291/02466 , G02B6/12007 , G02B6/1221 , G02B21/0004
摘要： Certain examples provide a transparent ultrasonic transducer including a transparent substrate and a transparent optical resonator positioned on the transparent substrate. The transparent optical resonator is to facilitate excitation of a biological sample and to receive acoustic emission from the biological sample triggered by the excitation, for example.Certain examples provide a ring resonator ultrasonic detector including a microscope cover slide. The microscope cover sheet includes a substrate and a ring optical resonator positioned on the substrate. The example ring optical resonator is to facilitate illumination of a biological sample and to receive acoustic emission from the biological sample in response to the illumination.
摘要翻译：某些示例提供了包括显微镜盖滑块的环形谐振器超声波检测器。显微镜覆盖片包括位于基板上的基板和环形光学谐振器。示例性环形光学谐振器是为了便于照射生物样品并且响应于照明而接收来自生物样品的声发射。

88. 发明申请

US20160249812A1 SINGLE-CELL LABEL-FREE PHOTOACOUSTIC FLOWOXIGRAPHY IN VIVO 审中-公开
标题翻译：单细胞无标签免费摄影流式细胞仪
公开(公告)号：US20160249812A1
公开(公告)日：2016-09-01
申请号：US15148685
申请日：2016-05-06
申请人： Washington University
发明人： Lihong Wang , Lidai Wang , Konstantin Maslov
IPC分类号： A61B5/00 , A61B5/145
CPC分类号： A61B5/0095 , A61B5/0059 , A61B5/0068 , A61B5/0082 , A61B5/02007 , A61B5/14542 , A61B5/14546 , A61B5/444 , A61B5/4848 , A61B8/485 , A61B2090/306 , G01N21/1702 , G01N29/0681 , G01N29/2418 , G01N2291/02836 , G01N2291/02872 , G02B21/0028 , G02B21/008
摘要： A method for obtaining a 3-D OR-PAM image of microvasculature within a region of interest of a subject is provided. The method includes: focusing a first light pulse at a first depth beneath a first surface position within the region of interest; receiving a first PA signal in response to the first light pulse; focusing a second light pulse at a second depth beneath the first surface position within the region of interest; receiving a second PA signal in response to the second light pulse; and forming the 3-D OR-PAM image by combining the first PA signal and the second PA signal.
摘要翻译：提供了一种获得受试者感兴趣区域内微血管的3-D OR-PAM图像的方法。该方法包括：将第一光脉冲聚焦在感兴趣区域内的第一表面位置下方的第一深度处; 响应于所述第一光脉冲接收第一PA信号; 在感兴趣区域内的第一表面位置下方的第二深度处聚焦第二光脉冲; 响应于所述第二光脉冲接收第二PA信号; 以及通过组合第一PA信号和第二PA信号来形成3-D OR-PAM图像。

89. 发明授权

US09377443B2 Scanning acoustic microscope with an inverted transducer and bubbler functionality 有权
标题翻译：用反向换能器和起泡器功能扫描声学显微镜
公开(公告)号：US09377443B2
公开(公告)日：2016-06-28
申请号：US14216429
申请日：2014-03-17
申请人： Sonoscan, Inc.
发明人： Lawrence W. Kessler , Thomas Kleinschmidt , Dan Micek
IPC分类号： G01N29/06 , G01N29/28 , G01N29/265
CPC分类号： G01N29/0681 , G01N29/265 , G01N29/28 , G01N2291/101 , G01N2291/2697
摘要： A scanning acoustic microscope includes a transducer mounted in a cup below a particular elevation capable of producing ultrasonic energy and a coupling fluid source disposed below the particular elevation, which is configured to introduce coupling fluid into the cup. Ultrasonic energy is directed upwardly through coupling fluid disposed between and contacting the transducer and a first surface of a part to be inspected. The part is disposed at the particular elevation such that a second surface of the part is not contacted by coupling fluid during testing.
摘要翻译：扫描声学显微镜包括安装在低于能够产生超声能量的特定高度的杯中的换能器和设置在特定高度下方的耦合流体源，该耦合流体源构造成将耦合流体引入杯中。超声波能量向上通过设置在传感器之间并且接触换能器的耦合流体和待检查部件的第一表面。该部件设置在特定高度处，使得部件的第二表面在测试期间不与耦合流体接触。

90. 发明授权

US09226666B2 Confocal photoacoustic microscopy with optical lateral resolution 有权
标题翻译：共聚焦光学显微镜，具有光学横向分辨率
公开(公告)号：US09226666B2
公开(公告)日：2016-01-05
申请号：US13874653
申请日：2013-05-01
申请人： Washington University
发明人： Lihong Wang , Konstantin Maslov
IPC分类号： A61B8/00 , A61B5/00 , G01N21/17 , G01N29/06 , G01N29/24 , G02B21/00 , A61B8/08
CPC分类号： A61B5/0095 , A61B5/0059 , A61B5/0068 , A61B5/0082 , A61B5/02007 , A61B5/14542 , A61B5/14546 , A61B5/444 , A61B5/4848 , A61B8/485 , A61B2090/306 , G01N21/1702 , G01N29/0681 , G01N29/2418 , G01N2291/02836 , G01N2291/02872 , G02B21/0028 , G02B21/008
摘要： A method for determining a ratio of hemoglobin absorption within a biological tissue using a handheld device is provided. The method includes focusing at least one light pulse into a predetermined area inside an object using at least one excitation wavelength, wherein a fluorescence signal is based on at least a local excitation optical fluence and properties of fluorophores in the predetermined area. The method further includes receiving a photoacoustic signal emitted by the object in response to the at least one light pulse, the photoacoustic signal being a product of the local excitation optical fluence, an optical absorption coefficient of hemoglobin, and an acoustic detection sensitivity. The method further includes determining the ratio of hemoglobin absorption based on a hemoglobin absorption coefficient that is based at least partially on the fluorescence signal and the photoacoustic signal.
摘要翻译：提供了一种使用手持装置确定生物组织内的血红蛋白吸收比的方法。该方法包括使用至少一个激发波长将至少一个光脉冲聚焦在物体内的预定区域中，其中荧光信号基于至少局部激发光能量密度和预定区域中荧光团的性质。该方法还包括响应于至少一个光脉冲接收由对象发射的光声信号，光声信号是局部激发光能通量，血红蛋白的光吸收系数和声检测灵敏度的乘积。该方法还包括基于至少部分地基于荧光信号和光声信号的血红蛋白吸收系数来确定血红蛋白吸收的比率。

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