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    • 89. 发明授权
    • Current transformer
    • 电流互感器
    • US09384884B2
    • 2016-07-05
    • US13981930
    • 2012-01-13
    • Matthew Brookes
    • Matthew Brookes
    • G01R19/18H01F27/40G01R15/18H01F38/30H01F38/32H01F38/38G01R19/00G01R1/00H02M1/00G01M1/00
    • H01F27/40G01M1/00G01R1/00G01R15/185G01R19/0092H01F38/30H01F38/32H01F38/38H02M1/00
    • A current transformer is described which comprises a housing having one or more apertures, each for receiving a primary cable or busbar, one or more magnetic cores enclosed within the housing and being positioned proximate to respective ones of the apertures so that a magnetic field is produced in a magnetic core when a primary current flows through a primary cable or busbar received through the respective aperture, and one or more secondary windings enclosed within the housing, each secondary winding being wrapped around at least a portion of a respective magnetic core so that a secondary current is induced in a secondary winding when a magnetic field is produced in the respective magnetic core. Shunt circuitry is enclosed within the housing and is connected across the secondary windings to generate a respective voltage signal for each secondary winding. A connector socket is integrally mounted to the housing for outputting the voltage signals. In this way, the labor costs incurred during installation of the current transformer can be reduced, a risk of wiring errors can be avoided, and a risk of electrocution from secondary terminals being left open-circuit is removed.
    • 描述了一种电流互感器,其包括具有一个或多个孔的壳体,每个孔用于接纳主电缆或母线,一个或多个磁芯封闭在壳体内并且定位成靠近相应的一个孔,从而产生磁场 当主电流流过通过相应孔口接收的主电缆或母线以及封装在壳体内的一个或多个次级绕组时,磁芯中的每个次级绕组围绕相应磁芯的至少一部分缠绕,使得 当在各个磁芯中产生磁场时,在次级绕组中感应出二次电流。 分流电路封装在壳体内,并且跨越次级绕组连接以产生每个次级绕组的相应电压信号。 连接器插座一体地安装到壳体以输出电压信号。 以这种方式,可以减少在安装电流互感器期间产生的劳动力成本,可以避免接线错误的风险,并且除去从次级端子开路的触电危险。
    • 90. 发明申请
    • FLUID MONITORING SYSTEM AND METHOD FOR SEMICONDUCTOR FABRICATION TOOLS
    • 流体监测系统和半导体制造工具的方法
    • US20160178416A1
    • 2016-06-23
    • US14976944
    • 2015-12-21
    • WaferTech, LLC
    • Chris LARY
    • G01F1/32
    • H01L21/67253C23C16/00G01M1/00
    • A system and method provide for monitoring and controlling fluid flow in semiconductor manufacturing apparatuses. The method and system include a vortex flow meter coupled to a digital readout that displays the measured flow rate and trip point. The flow meter display includes input devices used to adjust the trip point. The system and method provide for sending signals via a custom relay to the semiconductor manufacturing apparatus which is adapted to terminate a processing operation or change the fluid flow if the trip point is tripped. The system and method also provide for sending an electrical signal to a computer by way of a data acquisition unit and a converter. The converter converts the signal to a communication protocol consistent with the computer network and provides fluid flow information and trip point data as a function of time to the computer which then displays such data graphically.
    • 一种用于监测和控制半导体制造装置中的流体流动的系统和方法。 该方法和系统包括耦合到数字读数器的涡流流量计,其显示测量的流量和跳闸点。 流量计显示屏包括用于调整跳闸点的输入设备。 该系统和方法提供了通过定制继电器将信号发送到半导体制造装置,其适于终止处理操作或者如果跳闸点被跳闸则改变流体流动。 该系统和方法还提供通过数据采集单元和转换器将电信号发送到计算机。 该转换器将信号转换成与计算机网络一致的通信协议,并向计算机提供作为时间的函数的流体流信息和跳点数据,然后计算机以图形方式显示这些数据。