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    • 89. 发明申请
    • SMART WINDOW FOR SEMICONDUCTOR PROCESSING TOOL
    • 用于半导体加工工具的SMART WINDOW
    • US20170010218A1
    • 2017-01-12
    • US14795785
    • 2015-07-09
    • Lam Research Corporation
    • Xinxin HeCameron Paul Simoes
    • G01N21/88G02F1/01G01N21/95G02F1/17
    • G01N21/8806E06B2009/2464G01N21/9501G02F1/0102G02F1/0121G02F1/172
    • Semiconductor processing tool smart window kits, and smart windows for semiconductor processing tools and semiconductor processing tool doors, are discussed herein. Some smart windows may include a smart film with an active area that is electronically controllable between an opaque state and a transparent state, and that may be configured to prevent light from passing through the smart window and entering into a semiconductor processing tool and/or semiconductor processing chamber when in the opaque state. Additional components, configurations, and/or systems of some kits and smart windows are further discussed herein, which may include an electrical contact cover that may be configured to electrically connect the smart film to a power source and a smart film controller that may be configured to cause a smart film to transition between the opaque and transparent states.
    • 本文讨论了半导体加工工具智能窗口套件以及用于半导体加工工具和半导体加工工具门的智能窗口。 一些智能窗口可以包括具有在不透明状态和透明状态之间可电子控制的有源区域的智能膜,并且可以被配置为防止光通过智能窗并进入半导体处理工具和/或半导体 处理室处于不透明状态。 本文进一步讨论了一些套件和智能窗口的附加组件,配置和/或系统,其中可包括可被配置为将智能膜电连接到电源的电接触盖和可配置的智能膜控制器 使智能电影在不透明状态和透明状态之间转换。