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    • 81. 发明申请
    • METHOD FOR MANUFACTURING COMPOSITE WAFERS
    • 制造复合波导的方法
    • US20140308800A1
    • 2014-10-16
    • US14343515
    • 2012-09-14
    • Shoji AkiyamaKazutoshi Nagata
    • Shoji AkiyamaKazutoshi Nagata
    • H01L21/762
    • H01L21/76254H01L21/02002H01L21/2007H01L21/2011H01L21/76243H01L21/76251
    • This invention provides a method for manufacturing composite wafers in which at least two composite wafers can be obtained from one donor wafer, and in which the chamfering step can be omitted. Provided is a method for manufacturing composite wafers comprising: bonding surfaces of at least two handle wafers and a surface of a donor wafer which has a diameter greater than or equal to a sum of diameters of the at least two handle wafers and which has a hydrogen ion implantation layer formed inside thereof by implanting hydrogen ions from the surface of the donor wafer, to obtain a bonded wafer; heating the bonded wafer at 200° C. to 400° C.; and detaching a film from the donor wafer along the hydrogen ion implantation layer of the heated bonded wafer, to obtain the composite wafers having the film transferred onto the at least two handle wafers.
    • 本发明提供一种制造复合晶片的方法,其中可以从一个施主晶片获得至少两个复合晶片,并且其中可以省略倒角步骤。 提供了一种用于制造复合晶片的方法,包括:将至少两个手柄晶片的接合表面和施主晶片的表面直接大于或等于至少两个手柄晶片的直径之和,并且具有氢 通过从施主晶片的表面注入氢离子形成在其内部的离子注入层,以获得接合晶片; 将粘合晶片在200℃加热至400℃; 以及沿加热的接合晶片的氢离子注入层从施主晶片分离膜,以获得具有转移到至少两个处理晶片上的膜的复合晶片。
    • 87. 发明授权
    • Method for heat treatment of silicon wafers and silicon wafer
    • 硅晶片和硅晶片的热处理方法
    • US07011717B2
    • 2006-03-14
    • US10929480
    • 2004-08-31
    • Norihiro KobayashiShoji AkiyamaYuuichi MatsumotoMasaro Tamatsuka
    • Norihiro KobayashiShoji AkiyamaYuuichi MatsumotoMasaro Tamatsuka
    • H01L31/036
    • H01L21/3225Y10S438/913Y10S438/935Y10S438/955Y10S438/974
    • According to the present invention, there are provided a method for heat treatment of silicon wafers wherein a silicon wafer is subjected to a heat treatment at a temperature of from 1000° C. to the melting point of silicon in an inert gas atmosphere, and temperature decreasing in the heat treatment is performed in an atmosphere containing 1–60% by volume of hydrogen, a method for heat treatment of silicon wafers under a reducing atmosphere containing hydrogen by using a rapid heating and rapid cooling apparatus, wherein temperature decreasing rate from the maximum temperature in the heat treatment to 700° C. is controlled to be 20° C./sec or less, and a silicon wafer which has a crystal defect density of 1.0×104 defects/cm3 or more in a wafer bulk portion, a crystal defect density of 1.0×104 defects/cm3 or less in a wafer surface layer of a depth of 0.5 μm from the surface, a crystal defect density of 0.15 defects/cm2 or less on a wafer surface and surface roughness of 1.0 nm or less in terms of the P-V value. By these, crystal defects in wafer surface layers can be reduced by a simple method with a small amount of hydrogen used without degrading microroughness of wafers.
    • 根据本发明,提供了一种硅晶片的热处理方法,其中硅晶片在惰性气体气氛中在1000℃至硅熔点下进行热处理,温度 热处理的降低在含有1-60体积%的氢气的气氛中进行,通过使用快速加热和快速冷却装置在含氢气的还原气氛下热处理硅晶片的方法,其中从 控制到700℃的热处理的最高温度为20℃/秒以下,晶体缺陷密度为1.0×4×4×缺陷/ cm 2的硅晶片 在晶片本体部分中> 3 <或更多,在深度的晶片表面层中的晶体缺陷密度为1.0×4×4×3/3或更小 0.5μm以下的晶体缺陷密度为0.15个/ cm 2以下 在P-V值方面为1.0nm以下的表面粗糙度。 通过这些,可以通过使用少量氢气的简单方法来降低晶片表面层中的晶体缺陷,而不降低晶片的微观粗糙度。
    • 90. 发明授权
    • Method for manufacturing silicon mirror wafer, silicon mirror wafer, and heat treatment furnace
    • 硅镜片,硅镜片和热处理炉的制造方法
    • US06806199B2
    • 2004-10-19
    • US09979084
    • 2001-11-16
    • Norihiro KobayashiShoji Akiyama
    • Norihiro KobayashiShoji Akiyama
    • H01L21302
    • H01L21/3247C30B29/06C30B33/00
    • There are provided a manufacturing process for a mirror finished silicon wafer capable of manufacturing a mirror finished silicon wafer, having an excellent quality in which grown-in crystal defects are annihilated by heat-treating the silicon mirror finished wafer in a heat treatment in a gas atmosphere of high safety at a lower cost without selection of a heat treatment furnace for use in the heat treatment, a mirror finished silicon wafer having an excellent quality, and a heat treatment furnace preferably used in the manufacturing process. In the manufacturing process for a mirror finished silicon wafer comprising the steps of: connecting a reaction tube of a heat treatment furnace to a supply line for a non-oxidative raw material gas via a connection portion; supplying a non-oxidative gas into the reaction tube through the supply line and the connection portion; and heat-treating the mirror finished silicon wafer in the heat treatment furnace in an atmosphere of a non-oxidative gas, wherein a content of impurities in the non-oxidative gas supplied into the reaction tube is 3 ppm or less.
    • 提供了一种用于制造镜面成品硅晶片的镜面成品硅晶片的制造方法,其具有通过在气体的热处理中热处理硅镜成品晶片而消除生长的晶体缺陷的优良品质 没有选择用于热处理的热处理炉,具有优异品质的镜面成品硅晶片,以及优选在制造过程中使用的热处理炉,成本较低的高安全性气氛。 在镜面成型硅晶片的制造工序中,包括以下步骤:经由连接部将热处理炉的反应管与非氧化性原料气体的供给管连接; 通过供应管线和连接部分将非氧化性气体供应到反应管中; 在非氧化性气体气氛中,在热处理炉中对镜面成品硅片进行热处理,其中供给反应管的非氧化性气体中的杂质含量为3ppm以下。