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    • 82. 发明授权
    • Semiconductor substrate and method for producing the same
    • 半导体衬底及其制造方法
    • US06335269B1
    • 2002-01-01
    • US09390296
    • 1999-09-03
    • Nobuhiko Sato
    • Nobuhiko Sato
    • H01L2120
    • H01L21/02381H01L21/02532H01L21/0262H01L21/02661
    • The present invention provides a semiconductor substrate comprising a non-porous monocrystalline layer with decreased crystal defects which is formed on a porous silicon layer, and a method of producing the substrate. The method of producing the substrate comprises a heat treatment step of heat-treating a porous layer in an atmosphere not containing a silicon type gas, and a step of growing a non-porous monocrystalline silicon layer on the porous silicon layer, wherein the heat treatment step is executed such that the etched thickness of silicon is 2 nm or less and that the rate of change r for the Haze value of the porous silicon layer defined by (the Haze value after the heat treatment)/(the Haze value before the heat treatment) satisfies the relationship between 1≦r≦3.5.
    • 本发明提供了一种包括形成在多孔硅层上的具有减少的晶体缺陷的非多孔单晶层的半导体衬底及其制造方法。 制造基板的方法包括在不含硅型气体的气氛中热处理多孔层的热处理步骤和在多孔硅层上生长无孔单晶硅层的步骤,其中热处理 执行步骤,使得硅的蚀刻厚度为2nm以下,并且由(热处理后的雾度值)/(加热前的雾度值)定义的多孔硅层的雾度值的变化率r 处理)满足1 <= r <= 3.5的关系。
    • 86. 发明授权
    • Method for producing semiconductor substrate
    • 半导体衬底的制造方法
    • US5854123A
    • 1998-12-29
    • US729722
    • 1996-10-07
    • Nobuhiko SatoTakao YoneharaKiyofumi Sakaguchi
    • Nobuhiko SatoTakao YoneharaKiyofumi Sakaguchi
    • H01L21/20H01L21/02H01L21/265H01L21/322H01L21/762H01L27/12H01L31/18H01L21/76
    • H01L21/02032H01L21/3221H01L21/3223H01L21/3226H01L21/76251H01L21/76254H01L21/76259H01L31/1892Y02E10/50
    • A method is provided for producing, with high reproducibility, an SOI substrate which is flat and high in quality, and simultaneously for achieving resources saving and reduction in cost through recycling of a substrate member. For accomplishing this, a porous-forming step is performed forming a porous Si layer on at least a surface of an Si substrate and a large porosity layer forming step is performed for forming a large porosity layer in the porous Si layer. This large porosity layer forming step is performed by implanting ions into the porous Si layer with a given projection range or by changing current density of anodization in said porous-forming step. At this time, a non-porous single-crystal Si layer is epitaxial-grown on the porous Si layer. Thereafter, the surface of the porous Si layer and a support substrate are bonded together, and then separation is performed at the porous Si layer with the large porosity. Subsequently, selective etching is performed to remove the porous Si layer.
    • 提供了一种以高再现性制造平坦且质量高的SOI衬底的方法,同时用于通过再循环衬底构件实现资源节省和降低成本。 为了实现这一点,在Si衬底的至少一个表面上进行形成多孔Si层的多孔形成步骤,并且进行大孔隙层形成步骤以在多孔Si层中形成大孔隙率层。 通过将离子注入到具有给定投影范围的多孔Si层中或通过改变所述多孔形成步骤中的阳极氧化的电流密度来进行该大孔隙率层形成步骤。 此时,在多孔Si层上外延生长无孔单晶Si层。 此后,将多孔Si层和支撑基板的表面接合在一起,然后在具有大孔隙率的多孔Si层上进行分离。 随后,进行选择性蚀刻以去除多孔Si层。
    • 90. 发明申请
    • MONONUCLEAR CELL PREPARATION MATERIAL AND MONONUCLEAR CELL PREPARATION METHOD USING SAME
    • 单核细胞制备材料和单核细胞制备方法
    • US20140072954A1
    • 2014-03-13
    • US14110980
    • 2012-04-02
    • Nobuyoshi UmedaNobuhiko SatoAyako Tsukamoto
    • Nobuyoshi UmedaNobuhiko SatoAyako Tsukamoto
    • C12N5/0786
    • C12N5/0645C12N5/0087G01N33/491
    • The present invention aims to provide a mononuclear cell preparation material capable of improving the mononuclear cell recovery while reducing granulocyte contamination, and a mononuclear cell preparation method which improves the mononuclear cell recovery. Provided is a mononuclear cell preparation material for removing granulocytes from blood to prepare mononuclear cells, which includes a nonwoven fabric made of a polyamide resin. Also provided is a method for preparing mononuclear cells using a device with the mononuclear cell preparation material packed in a container, the method including the steps of: (A) passing blood through the mononuclear cell preparation device from an inlet side to an outlet side of the device, thereby capturing granulocytes in the device; and (B) passing a washing solution through the mononuclear cell preparation device from the inlet side to the outlet side of the device, thereby recovering mononuclear cells remaining in the device.
    • 本发明旨在提供能够改善单核细胞恢复同时减少粒细胞污染的单核细胞制备材料,以及改善单核细胞恢复的单核细胞制备方法。 提供一种用于从血液中除去粒细胞以制备单核细胞的单核细胞制备材料,其包括由聚酰胺树脂制成的无纺布。 还提供了使用包装在容器中的单核细胞制备材料的装置制备单核细胞的方法,所述方法包括以下步骤:(A)将血液通过单核细胞制备装置从入口侧到出口侧 从而在装置中捕获粒细胞; 和(B)将清洗液从装置的入口侧通过单核细胞制备装置,从而回收剩余在装置中的单核细胞。