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81. 发明申请

US20060193432A1 Method for adjusting gap between two objects and exposure method using the same, gap adjusting apparatus, and exposure apparatus 失效
标题翻译：用于调整两个物体之间的间隙的方法和使用其的曝光方法，间隙调节装置和曝光装置
公开(公告)号：US20060193432A1
公开(公告)日：2006-08-31
申请号：US11411462
申请日：2006-04-25
申请人： Takahiro Matsumoto
发明人： Takahiro Matsumoto
IPC分类号： G21K5/00
CPC分类号： G03F9/703 , G03F1/22 , G03F1/42 , G03F7/7035 , G03F9/7038 , G03F9/7049 , G03F9/7088
摘要： A method of making a gap between first and second objects have a predetermined value includes steps of introducing light to an entry window on the first object, detecting an intensity of light from an exit window on the first object, and positioning the second object, with respect to a direction concerning the gap, based on an intensity of light detected in the detecting step. The exit window is positioned so that light enters through the entry window of the first object, reflects off the second object, and then enters the exit window of the first object if the gap has the predetermined value.
摘要翻译：在第一和第二物体之间形成间隙的方法具有预定值，包括将光引入到第一物体上的入口窗口，检测来自第一物体上的出口窗口的光强度以及将第二物体定位的步骤，基于在检测步骤中检测到的光强度，关于间隙的方向。出口窗口被定位成使得光通过第一物体的入口窗口进入，反射离开第二物体，然后如果间隙具有预定值，则进入第一物体的出口窗口。

82. 发明授权

US06999893B2 Position detecting device and position detecting method 失效
标题翻译：位置检测装置和位置检测方法
公开(公告)号：US06999893B2
公开(公告)日：2006-02-14
申请号：US10662408
申请日：2003-09-16
申请人： Takahiro Matsumoto , Hideki Ina
发明人： Takahiro Matsumoto , Hideki Ina
IPC分类号： G01C3/00
CPC分类号： G03F9/7088 , G03F7/70633 , G03F9/7003 , G03F9/7046 , G03F9/7065 , G03F9/7069 , G03F9/7092
摘要： A position detection method for detecting the position of marks comprises the following steps: a step for detecting first information relating to the position of the mark by detecting light from the mark under first measurement conditions; a step for detecting second information relating to the position of the mark by detecting light from the mark under second measurement conditions which differ from the first measurement conditions; and a step for detecting the position of the mark based on the first and second information, thereby providing a high-precision position detecting method and device serving as an alignment or overlaying detection device in an exposure apparatuses used in manufacturing semiconductor devices, wherein position detection precision is not lost even in the event that the alignment marks are not symmetrical or there are irregularities in the non-symmetry of multiple alignment marks within the same wafer.
摘要翻译：用于检测标记位置的位置检测方法包括以下步骤：通过在第一测量条件下检测来自标记的光来检测与标记的位置有关的第一信息的步骤; 通过在与第一测量条件不同的第二测量条件下检测来自标记的光来检测与标记的位置有关的第二信息的步骤; 以及用于基于第一和第二信息检测标记的位置的步骤，从而在用于制造半导体器件的曝光装置中提供用作对准或重叠检测装置的高精度位置检测方法和装置，其中位置检测即使在对准标记不对称或在同一晶片内的多个对准标记的非对称性中存在不规则性的情况下，精度也不会降低。

83. 发明申请

US20050128452A1 Wavelength selecting method, position detecting method and apparatus, exposure method and apparatus, and device manufacturing method 失效
标题翻译：波长选择方法，位置检测方法和装置，曝光方法和装置以及装置制造方法
公开(公告)号：US20050128452A1
公开(公告)日：2005-06-16
申请号：US11002906
申请日：2004-12-03
申请人： Takahiro Matsumoto
发明人： Takahiro Matsumoto
IPC分类号： G03B27/52 , G03F9/00
CPC分类号： G03F9/7065 , G03B27/52 , G03F9/7011
摘要： A wavelength selecting method for selecting a wavelength of light, the light being used to detect a position of a target with a signal from an image of an alignment mark covered with resist, includes the steps of obtaining a reflectance of the resist at a position outside the alignment mark by irradiating lights having plural wavelengths to the resist at the position, and selecting one of the lights which one has a wavelength that provides the maximum value of reflectance among the reflectances measured by the measuring step or which one has a wavelength that falls within a predetermined wave range centering on the wavelength that provide the maximum reflectance.
摘要翻译：一种用于选择光的波长选择方法，用于利用由抗蚀剂覆盖的对准标记的图像的信号来检测目标的位置的光包括以下步骤：获得外部位置处的抗蚀剂的反射率通过将该多个波长的光照射到该位置处的抗蚀剂，并选择一个具有提供最大值由测量步骤测量的反射率之间的反射率一个具有以提供最大反射率的波长为中心的预定波长范围内的波长。

84. 发明授权

US06171884B2 Method of manufacturing a chip type electronic element 有权
标题翻译：芯片型电子元件的制造方法
公开(公告)号：US06171884B2
公开(公告)日：2001-01-09
申请号：US09235960
申请日：1999-01-22
申请人： Masuyoshi Houda , Takahiro Matsumoto
发明人： Masuyoshi Houda , Takahiro Matsumoto
IPC分类号： H01L2100
CPC分类号： H03H9/178 , H01L41/29 , Y10S148/138 , Y10S438/964
摘要： A method of manufacturing a chip type electronic component includes the steps of forming a multilayer body including a major surface and a side surface by laminating a plurality of substrates and at least one internal electrode interposed between two of the substrates, forming a groove between the two substrates at the side surface of the multilayer body so as to expose an end of the at least one internal electrode, and making the side surface of the multilayer body rough by performing barrel polishing on the multilayer body, the barrel polishing being performed in a barrel pot in which water, media, an abrasive powder and the multilayer body are provided and forming an external electrode on the side surface of the multilayer body, the external electrode being connected to the end of the internal electrode exposed at the groove.
摘要翻译：制造芯片型电子部件的方法包括以下步骤：通过层叠多个基板和插入在两个基板之间的至少一个内部电极来形成包括主表面和侧面的多层体，在两个基板之间形成凹槽基板在多层体的侧面露出，以暴露至少一个内部电极的端部，并且通过在多层体上进行滚筒抛光来使多层体的侧面粗糙化，滚筒抛光在筒体中进行设置有水，介质，磨料粉末和多层体的罐，在多层体的侧面形成外部电极，外部电极与暴露在槽的内部电极的端部连接。

85. 发明授权

US5980780A Racemic compound and anti-ferroelectric liquid crystal composition containing the compound 失效
标题翻译：含有该化合物的外消旋化合物和反铁电液晶组合物
公开(公告)号：US5980780A
公开(公告)日：1999-11-09
申请号：US55211
申请日：1998-04-06
申请人： Yuki Motoyama , Takahiro Matsumoto , Tomoyuki Yui , Masahiro Johno
发明人： Yuki Motoyama , Takahiro Matsumoto , Tomoyuki Yui , Masahiro Johno
IPC分类号： G02F1/13 , C07C69/92 , C09K19/02 , C09K19/20 , C09K19/46 , C09K19/21
CPC分类号： C09K19/0266 , C07C69/92 , C09K19/2021
摘要： A racemic compound of the formula (1) ##STR1## and an anti-ferroelectric liquid crystal composition consisting essentially of said racemic compound and one anti-ferroelectric liquid crystal compound of the formula (2) or a mixture of two or more compounds selected from anti-ferroelectric liquid crystal compounds of the formula (2), ##STR2## said composition of the present invention, exhibiting a small spontaneous polarization and a fast response so that a display device having a high display quality can be achieved.
摘要翻译：式（1）的外消旋化合物和基本上由所述外消旋化合物和式（2）的一种反铁电液晶化合物或两种或更多种选自抗铁电体的化合物的混合物组成的反铁电液晶组合物式（2）的液晶化合物，本发明的所述组合物，具有小的自发极化和快速响应，从而可以实现具有高显示质量的显示装置。

86. 发明授权

US5881596A Urine sampling vessel 失效
标题翻译：尿液采样容器
公开(公告)号：US5881596A
公开(公告)日：1999-03-16
申请号：US817617
申请日：1997-03-28
申请人： Akira Tsuji , Ichiro Morimoto , Takahiro Matsumoto
发明人： Akira Tsuji , Ichiro Morimoto , Takahiro Matsumoto
IPC分类号： A61B10/00 , B01L3/00 , G01N33/493 , G01F19/00
CPC分类号： B01L3/502 , A61B10/007 , G01N33/493
摘要： A cylindrical vessel body 20 has an end opened. A urine taking cap 50 comprises a fitting cylinder section 51 which can be freely fitted in tight contact with the opened end of the vessel body 20, a urine sampling cylinder section 52 connected to the fitting cylinder section 51 and having a urine sampling inlet 5b opened thereon, and a grip section 53 connected to an outer end of the urine sampling cylinder section 52. In addition, a cover cylinder 30 has an end opened, the opened end being capable of being fitted in tight contact with a tapered face 5e of the urine sampling cylinder section 52 in the state in which the vessel body 20 having the urine taking cap 50 attached thereto is inserted. A ring protrusion 55 is formed on an outer peripheral face of a connecting portion of the urine sampling cylinder section 52 and the grip section 53, and the grip section 53 can be freely extended axially by an extension cylinder 5g.
摘要翻译： PCT No.PCT / JP94 / 01587第 371日期1997年3月28日 102（e）1997年3月28日PCT PCT 1994年9月28日PCT公布。出版物WO95 / 09362 日期1995年4月6日圆柱形容器主体20的一端开口。尿液采集盖50包括：可自由地与容器主体20的开口端部紧密接触的嵌合筒部51;连接于嵌合筒部51的尿液取样筒部52，并且具有开放的尿液取样口5b 以及与尿液采样筒部52的外端连接的把手部53.另外，盖筒30的端部开口，开口端能够与锥形面5e紧密接触在其中插入有吸尿帽50的血管主体20的状态下的尿液取样筒部52被插入。在尿液取样筒部52和握持部53的连接部的外周面形成有环状突起55，并且能够通过延伸筒5g自由地将握持部53轴向延伸。

87. 发明授权

US5588582A Method for manufacturing a cooling drum for a continuous casting system 失效
标题翻译：制造连续铸造系统的冷却鼓的方法
公开(公告)号：US5588582A
公开(公告)日：1996-12-31
申请号：US450404
申请日：1995-05-25
申请人： Kunimasa Sasaki , Youichi Wakiyama , Takahiro Matsumoto , Kisaburo Tanaka , Keiichi Yamamoto
发明人： Kunimasa Sasaki , Youichi Wakiyama , Takahiro Matsumoto , Kisaburo Tanaka , Keiichi Yamamoto
IPC分类号： B22D11/06 , B23K20/00
CPC分类号： F28F5/02 , B22D11/0682 , Y10T29/49888
摘要： A cooling drum can continuously cast a favorable band-shaped cast piece having little thermal deformation. The cooling drum comprises a three-layer structure including a rigid member, a cooling member metallurgically bonded to the outside of the rigid member, and a heat-resistance member plated by electro-deposition on the outer circumferential surface of the cooling member. The rigid member is made of austenite group stainless steel, the cooling member is made of Cu or Cu-alloy, and the heat-resistance member is made of either Ni or its alloy or Co or its alloy.
摘要翻译：冷却鼓可以连续铸造几乎没有热变形的有利的带状铸件。冷却鼓包括三层结构，其包括刚性构件，与刚性构件的外部冶金结合的冷却构件，以及通过电沉积镀在冷却构件的外周表面上的耐热构件。刚性构件由奥氏体组不锈钢制成，冷却构件由Cu或Cu合金制成，耐热构件由Ni或其合金或Co或其合金制成。

88. 发明授权

US5482651A Dioxane type liquid crystal substance 失效
标题翻译：二恶烷型液晶物质
公开(公告)号：US5482651A
公开(公告)日：1996-01-09
申请号：US25571
申请日：1993-03-03
申请人： Hiroshi Mineta , Tomoyuki Yui , Yoshihiro Gocho , Takahiro Matsumoto
发明人： Hiroshi Mineta , Tomoyuki Yui , Yoshihiro Gocho , Takahiro Matsumoto
IPC分类号： C07D319/06 , C07D309/06 , C09K19/02 , C09K19/34
CPC分类号： C09K19/0266 , C07D309/06 , C09K19/3402 , C09K2019/3422
摘要： An antiferroelectric liquid crystal substance represented by the following general formula (1) ##STR1## wherein R represents a straight-chain alkyl group of 6-10 carbon atoms; X represents ##STR2## when X is ##STR3## Y is any of CH.sub.3, CF.sub.3 and C.sub.2 H.sub.5, L is 0 or an integer of 5 to 8, m is 0 or 1, and n is an integer of 1 to 10; when X is ##STR4## Y is any of CH.sub.3, CF.sub.3 and C.sub.2 H.sub.5, and (1) when Y is CH.sub.3, L is 0 or an integer of 5 to 8, m is 0 or 1, and n is an integer of 1 to 10, (2) when Y is CF.sub.3, L is an integer of 5 to 8, m is 1, and n is an integer of 1 to 10 and (3) when Y is C.sub.2 H.sub.5, L is 0, m is 0, and n is an integer of 4-10.
摘要翻译：由下列通式（1）表示的反铁电液晶物质（1）其中R表示6-10个碳原子的直链烷基; X表示，Y表示CH3，CF3，C2H5，L为0或5〜8的整数，m为0或1，n为1〜10的整数。当X为Y 3时，L为0或5〜8的整数，m为0或1，n为1〜10的整数，（2）Y为CF 3时，L为5〜 8，m为1，n为1〜10的整数，（3）Y为C2H5时，L为0，m为0，n为4-10的整数。

89. 发明授权

US5398511A Regenerative refrigerator 失效
标题翻译：再生冰箱
公开(公告)号：US5398511A
公开(公告)日：1995-03-21
申请号：US19580
申请日：1993-02-18
申请人： Takashi Inaguchi , Masashi Nagao , Hideto Yoshimura , Kazuki Moritsu , Takahiro Matsumoto , Shuuichi Nakagawa
发明人： Takashi Inaguchi , Masashi Nagao , Hideto Yoshimura , Kazuki Moritsu , Takahiro Matsumoto , Shuuichi Nakagawa
IPC分类号： F25B9/14 , F25B9/02
CPC分类号： F25B9/14 , F25B2309/003
摘要： According to the present invention there is provided a regenerative refrigerator wherein a gas discharged from a compressor is introduced through a regenerator into a closed chamber whose internal volume changes with movement of a movable member, the movable member being disposed within a cylinder through a predetermined gap between its outer peripheral surface and the inner peripheral surface of the cylinder, and is allowed to expand therein, then is discharged again through the same route. In this regenerative refrigerator, the size, d, of the said gap is set in the range of 1/1000.ltoreq.d/D.ltoreq.1/100 relative to the inside diameter, D, of the cylinders or a gas convection preventing member is disposed in the said gap, or seals which are in contact with the inner peripheral surface of the cylinder are provided on the outer peripheral surfaces of both end portions of the movable member.
摘要翻译：根据本发明，提供了一种再生冷冻机，其中从压缩机排出的气体通过再生器被引入密封室，其内部容积随着可移动部件的移动而变化，可动件通过预定间隙设置在气缸内在其外周面和圆筒的内周面之间，允许其在其中膨胀，然后通过相同的路线再次排出。在这种再生式冰箱中，所述间隙的尺寸d相对于气缸的内径D或气体对流设定在1/1000

90. 发明授权

US5347109A High-frequency heating apparatus mounted on a motor vehicle 失效
标题翻译：安装在汽车上的高频加热装置
公开(公告)号：US5347109A
公开(公告)日：1994-09-13
申请号：US842146
申请日：1992-03-20
申请人： Yuji Nakabayashi , Naoyoshi Maehara , Daisuke Bessyo , Takahiro Matsumoto
发明人： Yuji Nakabayashi , Naoyoshi Maehara , Daisuke Bessyo , Takahiro Matsumoto
IPC分类号： H05B6/66 , H05B6/68 , H05B6/80
CPC分类号： H05B6/80 , H05B6/685
摘要： A DC power source constituted by a power generator (20), a dynamo (22) and a rectification means (23), an inverter power source (24) which boosts an output of the DC power source so as to drive a magnetron (28) and an inverter controller for controlling the inverter power source (24) by an output of a generated electric power output detecting means (31) for detecting the output of the DC power source are provided, whereby a required dielectric heating function can be stably achieved by controlling an operational state of the inverter power source (24) by the output of the DC power source.
摘要翻译： PCT No.PCT / JP91 / 00998 Sec。 371日期：1992年3月20日 102（e）1992年3月20日PCT PCT 1991年7月25日PCT公布。第WO92 / 02111号公报日期：1992年2月6日。由发电机（20），发电机（22）和整流装置（23）构成的直流电源，将直流电源的输出升压的逆变器电源（24）为了驱动磁控管（28），通过用于检测直流电源的输出的生成电力输出检测装置（31）的输出来控制逆变器电源（24）的逆变器控制器，由此需要通过直流电源的输出控制逆变器电源（24）的工作状态，可以稳定地实现介质加热功能。

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