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    • 89. 发明授权
    • Multi-stage fin formation methods and structures thereof
    • 多级翅片形成方法及其结构
    • US09595475B2
    • 2017-03-14
    • US14556908
    • 2014-12-01
    • TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
    • Jhon Jhy Liaw
    • H01L21/8234H01L21/308H01L29/66H01L27/088H01L29/06
    • H01L21/823431H01L21/3086H01L21/823481H01L27/0886H01L29/0649H01L29/6656
    • A method for fabricating a semiconductor device having a multi-stage fin profile includes providing a substrate and forming a first spacer having a first spacer width over the substrate. The first spacer masks a first portion of the substrate during a first etch process. By way of example, the first etch process is performed on the substrate to form a first-stage fin region, where a width of the first-stage fin region is substantially equal to about the first spacer width. A second spacer having a second spacer width is formed over the substrate, where the second spacer and the first-stage fin region mask a second portion of the substrate during a second etch process. In some examples, the second etch process is performed on the substrate to form a second-stage fin region, where a width of the second-stage fin region is greater than the width of the first-stage fin region.
    • 一种制造具有多级翅片轮廓的半导体器件的方法包括提供衬底并形成在衬底上具有第一间隔物宽度的第一间隔物。 在第一蚀刻工艺期间,第一间隔物掩盖衬底的第一部分。 作为示例,在衬底上执行第一蚀刻工艺以形成第一级鳍片区域,其中第一级鳍片区域的宽度基本上等于第一间隔物宽度。 具有第二间隔物宽度的第二间隔物形成在衬底上,其中在第二蚀刻工艺期间第二间隔物和第一段鳍区域掩盖衬底的第二部分。 在一些示例中,在衬底上执行第二蚀刻工艺以形成第二级鳍片区域,其中第二级鳍片区域的宽度大于第一级鳍片区域的宽度。