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    • 82. 发明授权
    • Methods for removing dielectric materials
    • 去除介电材料的方法
    • US08221642B2
    • 2012-07-17
    • US12755223
    • 2010-04-06
    • Li LiDon L. Yates
    • Li LiDon L. Yates
    • B44C1/22H01L21/302
    • C03C15/00C03C17/22C03C2218/32C03C2218/33H01L21/31111H01L21/32H01L21/76202
    • A method for removing a plurality of dielectric films from a supporting substrate by providing a substrate with a dielectric layer overlying another dielectric layer, contacting the substrate at a first temperature with an acid solution exhibiting a positive etch selectivity at the first temperature, and then contacting the substrate at a second temperature with an acid solution exhibiting a positive etch selectivity at the second temperature. The dielectric layers exhibit different etch rates when etched at the first and second temperatures. The first and second acid solutions may contain phosphoric acid. The first dielectric layer may be silicon nitride and the second dielectric layer may be silicon oxide. Under these conditions, the first temperature may be about 175° C. and the second temperature may be about 155° C.
    • 一种用于通过提供覆盖在另一电介质层上的介电层的衬底来从支撑衬底去除多个电介质膜的方法,在第一温度下使衬底与在第一温度下呈现正蚀刻选择性的酸溶液接触,然后接触 在第二温度下用碱性溶液在第二温度下显示出正的蚀刻选择性。 当在第一和第二温度下进行蚀刻时,介电层表现出不同的蚀刻速率。 第一和第二酸溶液可以含有磷酸。 第一电介质层可以是氮化硅,第二电介质层可以是氧化硅。 在这些条件下,第一温度可以是约175℃,第二温度可以是约155℃。
    • 89. 发明授权
    • Media-access-control protocol for a network employing multi-user wireless channels
    • 采用多用户无线信道的网络的媒体访问控制协议
    • US08149752B2
    • 2012-04-03
    • US12124258
    • 2008-05-21
    • Li LiHarish ViswanathanRamachandran Ramjee
    • Li LiHarish ViswanathanRamachandran Ramjee
    • H04H20/71G01R31/08H04B3/36
    • H04W40/02H04L1/0002H04L1/0057H04L45/125H04W40/34H04W72/1263Y02D70/142Y02D70/22Y02D70/30
    • A medium-access-control (MAC) scheduler, according to one embodiment of which a station of a wireless network evaluates data throughputs corresponding to three different transmission configurations for transmission of a packet over a first of that station's wireless links. The first and second of those transmission configurations have the packet encoded in the first and second tiers, respectively, of a two-tier signal. The third transmission configuration has the packet encoded as a conventional single-tier signal. For each of the first and second transmission configurations, the station selects a second of that station's wireless links for transmission of at least a second packet, with the first and second packets encoded in different respective tiers of the two-tier signal. The station varies power allocation between the first and second tiers to optimize data throughput for each of the first and second transmission configurations and selects from the first, second, and third transmission configurations one resulting in the highest data throughput.
    • 媒体访问控制(MAC)调度器,根据其一个实施例,无线网络的站评估对应于三个不同传输配置的数据吞吐量,以在该站的无线链路上的第一个无线链路上传输分组。 这些传输配置中的第一和第二配置分别在两层信号的第一和第二层中编码分组。 第三传输配置将分组编码为传统的单层信号。 对于第一和第二传输配置中的每一个,站选择该站的无线链路中的第二个用于传输至少第二分组,其中第一和第二分组被编码在两层信号的不同相应层中。 该站改变第一和第二层之间的功率分配,以优化第一和第二传输配置中的每一个的数据吞吐量,并且从第一,第二和第三传输配置中选择一个导致最高数据吞吐量。