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    • 81. 发明申请
    • Management of configuration data using extensible markup language
    • 使用可扩展标记语言管理配置数据
    • US20050187912A1
    • 2005-08-25
    • US10786786
    • 2004-02-24
    • Moshe MatsaJulius QuiaotChristopher VincentThomas Brown
    • Moshe MatsaJulius QuiaotChristopher VincentThomas Brown
    • G06F7/00G06F9/445G06F17/30
    • G06F9/44505G06F16/80
    • A system, method and computer program product are provided for managing configuration data. According to the method, a plurality of configuration values are stored in a hierarchical tree having a plurality of nodes, a defined structure, and defined data types for the stored configuration values, with each node being associated with at least one configuration value. At least one application component is registered with at least one of the nodes of the tree, based on at least one query received from the at least one application component. The at least one application component is notified when a configuration value associated with the at least one node is modified, based on an addition or change in at least one configuration value that matches the at least one query. In a preferred embodiment, the hierarchical tree is an Extensible Markup Language (XML) tree, and an XML schema describes the structure of the XML tree and the data types that are stored.
    • 提供了一种用于管理配置数据的系统,方法和计算机程序产品。 根据该方法,将多个配置值存储在具有多个节点,定义的结构以及用于存储的配置值的定义的数据类型的分层树中,其中每个节点与至少一个配置值相关联。 基于从至少一个应用组件接收的至少一个查询,至少一个应用组件被注册到该树的至少一个节点。 基于与所述至少一个查询匹配的至少一个配置值的添加或改变,当与所述至少一个节点相关联的配置值被修改时,通知所述至少一个应用组件。 在优选实施例中,分层树是可扩展标记语言(XML)树,并且XML模式描述了XML树的结构和存储的数据类型。
    • 82. 发明申请
    • CORIOLIS MASS FLOW SENSOR
    • CORIOLIS质量流量传感器
    • US20050150311A1
    • 2005-07-14
    • US10711708
    • 2004-09-30
    • Todd BergerJoseph DilleJames BirdsallThomas Brown
    • Todd BergerJoseph DilleJames BirdsallThomas Brown
    • G01F1/84
    • G01F1/8427G01F1/844G01F1/8472
    • A Coriolis mass flow sensor includes a flow tube, a light source, and a light pipe having a light inlet situated to receive light from the light source and a light outlet for emitting light received from the light source. A light detector receives light from the light pipe light outlet, and a drive device vibrates the flow tube such that the flow tube moves through a light path between the light outlet of the light pipe and the light detector. In certain embodiments, the light pipe defines a generally square cross section. A sensing aperture having a predetermined shape is situated between the light outlet of the light pipe and the light detector. The sensing aperture passes a portion of the light emitted from the light outlet of the light to the light detector, such that the light entering the light detector has the predetermined shape.
    • 科里奥利质量流量传感器包括流管,光源和具有位于接收来自光源的光的光入口的光管和用于发射从光源接收的光的光出口。 光检测器从光管灯出口接收光,并且驱动装置使流管振动,使得流管移动通过光管的光出口和光检测器之间的光路。 在某些实施例中,光管限定大致正方形的横截面。 具有预定形状的感测孔位于光管的光出口和光检测器之间。 感测孔将从光出射口发射的光的一部分通过光检测器,使得进入光检测器的光具有预定的形状。
    • 86. 发明授权
    • Method for determining the efficiency of a planarization process
    • 确定平坦化处理效率的方法
    • US6057068A
    • 2000-05-02
    • US205483
    • 1998-12-04
    • Christopher H. RaederThomas BrownPeter A. Burke
    • Christopher H. RaederThomas BrownPeter A. Burke
    • B24B49/00H01L21/306G03F9/00
    • B24B37/005B24B49/00H01L21/30625
    • A method for measuring the planarization efficiency of a planarization process and a device for use with the method are provided. The device may be a substrate having a set of isolated features, such as trenches or hills, with different widths. In the method, a removable layer of material is formed over the substrate. The substrate features form corresponding features in the removable layer with varying dimensions. A pre-planarization thickness of the removable layer of material is measured at each feature and at one or more of isolation areas. The removable layer of material is then planarized using a planarization process associated with one or more process parameters. A post-planarization thickness of the removable is measured at each feature and at one or more of the isolation regions. The planarization efficiency of the planarization process is then determined as a function of the dimensions of the substrate features or corresponding features in the removable layers and/or one or more process parameters. The determined planarization efficiency may be output by, for example, generating a graph of the planarization efficiency or using the planarization efficiency to change one or more parameters of the planarization process.
    • 提供了一种用于测量平面化处理的平坦化效率的方法和用于该方法的装置。 该装置可以是具有一组具有不同宽度的隔离特征(例如沟槽或丘陵)的基板。 在该方法中,在衬底上形成可去除的材料层。 衬底特征在具有不同尺寸的可移除层中形成相应的特征。 在每个特征和一个或多个隔离区域处测量可去除材料层的预平坦化厚度。 然后使用与一个或多个工艺参数相关联的平坦化处理将可移除的材料层平坦化。 在每个特征和一个或多个隔离区域处测量可去除的后平面化厚度。 然后,平坦化处理的平坦化效率被确定为可移除层中的衬底特征或相应特征的尺寸和/或一个或多个工艺参数的函数。 确定的平坦化效率可以通过例如生成平坦化效率的图形或者使用平坦化效率来改变平坦化处理的一个或多个参数来输出。