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    • 82. 发明授权
    • Microscope and sample observation method
    • 显微镜和样品观察法
    • US07110172B2
    • 2006-09-19
    • US10880100
    • 2004-06-30
    • Hirotoshi TeradaIkuo ArataMasaharu TokiwaHiroshi TanabeShigeru Sakamoto
    • Hirotoshi TeradaIkuo ArataMasaharu TokiwaHiroshi TanabeShigeru Sakamoto
    • G02B21/00
    • G02B21/0016G02B21/33Y10S359/90
    • For a semiconductor device S as an inspected object, there are provided an image acquisition part 1, an optical system 2 including an objective lens 20, and a solid immersion lens (SIL) 3 movable between an insertion position including an optical axis from the semiconductor device S to the objective lens 20 and a standby position off the optical axis. Then observation is carried out in two control modes consisting of a first mode in which the SIL 3 is located at the standby position and in which focusing and aberration correction are carried out based on a refractive index no and a thickness to of a substrate of the semiconductor device S, and a second mode in which the SIL 3 is located at the insertion position and in which focusing and aberration correction are carried out based on the refractive index no and thickness t0 of the substrate, and a refractive index n1, a thickness d1, and a radius of curvature R1 of SIL 3. This provides a microscope and a sample observation method capable of readily performing observation of the sample necessary for an analysis of microstructure or the like of the semiconductor device.
    • 对于作为检查对象的半导体装置S,提供了图像获取部分1,包括物镜20的光学系统2和在包括来自半导体的光轴的插入位置之间可移动的固体浸没透镜(SIL)3 装置S到物镜20和离开光轴的待机位置。 然后在两个控制模式中进行观察,该两种控制模式包括SIL 3位于待机位置的第一模式,并且基于第一模式的基板的折射率no和厚度对其执行聚焦和像差校正 半导体器件S和第二模式,其中SIL 3位于插入位置,并且基于衬底的折射率no和厚度t 0 0进行聚焦和像差校正, 和折射率n 1 1,厚度d 1,以及SIL 3的曲率半径R 1 1。 这提供了能够容易地观察对半导体器件的微细结构等的分析所需的样品的显微镜和样品观察方法。
    • 86. 发明授权
    • Metal catalyst carrier
    • 金属催化剂载体
    • US07030059B2
    • 2006-04-18
    • US10732303
    • 2003-12-11
    • Hiroshi Tanabe
    • Hiroshi Tanabe
    • B01J32/00F01N3/28B32B3/28
    • B01J35/04F01N3/2821F01N2330/04F01N2330/38Y10T428/1234Y10T428/12361Y10T428/1241
    • A metal catalyst carrier has a core comprising a corrugated sheet and a flat sheet with a plurality of slots in a shape elongated in a direction perpendicular to a cell passage direction. The slots are formed before a sheet metal is corrugated and have a predetermined interval apart from one another. The plural slots disposed along the direction perpendicular to the cell passage direction are arranged to form a plurality of slot arrays arranged in the cell passage direction, and an interval Y in the cell passage direction and an interval X in the direction perpendicular to the cell passage direction, between the opening peripheral edge portions of the slots adjacent to each other in the slot arrays adjacent to each other, are set under the conditions satisfying X≧0 mm and X≧−(5/2)Y+10 mm, thereby preventing the occurrence of distortions and cracks in the process of corrugating the sheet metal.
    • 金属催化剂载体具有包括波纹片和具有沿与细胞通过方向垂直的方向细长的多个狭缝的平片的芯。 在金属片是波纹状之前形成槽,并且彼此隔开预定间隔。 布置成沿着与细胞通过方向垂直的方向设置的多个狭槽布置成形成沿着细胞通过方向布置的多个狭槽阵列,以及细胞通过方向上的间隔Y和垂直于细胞通道的方向上的间隔X 在彼此相邻的槽阵列中彼此相邻的狭槽的开口周边部分之间的方向设定在满足X> = 0mm和X> = - (5/2)Y + 10mm的条件下, 从而防止在金属板的波纹化过程中发生变形和裂纹。
    • 87. 发明申请
    • Solid immersion lens holder
    • 固体浸没镜头支架
    • US20050094293A1
    • 2005-05-05
    • US10878527
    • 2004-06-29
    • Hiroshi TanabeIkuo ArataHirotoshi Terada
    • Hiroshi TanabeIkuo ArataHirotoshi Terada
    • G02B7/14G02B21/33G02B7/02
    • G02B7/14G02B21/33
    • An arrangement, equipped with a holder 9, which supports a solid immersion lens 3 in the gravity direction with the bottom surface of solid immersion lens 3 being protruded downward through an opening 9b, is provided. With this arrangement, when solid immersion lens 3 is set on an observed object, solid immersion lens 3 is put in a state in which it is raised by the observed object and is made free with respect to holder 9. Also in this state, an excessive pressure will not be applied to the observed object and yet solid immersion lens 3 is put in close contact in conformance with the observed object and temperature drifts at the holder 9 side or the observed object side are cut off from the counterpart side and thus the influences of such temperature drifts are eliminated. A solid immersion lens holder, with which the damaging of the observed object can be eliminated and which enables high-precision observation, is thus provided.
    • 提供了一种装置,其具有保持器9,其在固体浸没透镜3的底面通过开口部分9b向下突出而在重力方向上支撑固体浸没透镜3。 通过这种布置,当固体浸没透镜3设置在观察对象上时,固体浸没透镜3被置于被观察物体升高的状态,并相对于保持器9而自由。 同样在这种状态下,不会对观察到的物体施加过大的压力,并且固体浸没透镜3与观察到的物体保持紧密接触,并且保持器9侧的温度漂移或被观察物体侧被切断 相应的一方,因此消除了这种温度漂移的影响。 因此提供了可以消除观察对象的损坏并且能够进行高精度观察的固体浸没透镜保持器。
    • 88. 发明申请
    • Solid immersion lens moving device and microscope using the same
    • 固体浸没透镜移动装置和显微镜使用相同
    • US20050094258A1
    • 2005-05-05
    • US10878547
    • 2004-06-29
    • Hiroshi TanabeIkuo Arata
    • Hiroshi TanabeIkuo Arata
    • G02B21/26G02B21/33G02B21/00
    • G01N21/956G01N21/8806G02B21/26G02B21/33
    • A solid immersion lens moving device is provided with a first arm member 71, to which is connected a solid immersion lens holder 5 that supports a solid immersion lens 3; a first arm member rotation source 72, which rotates this first arm member 71 within an X-Y plane that is substantially parallel to an observed object; a second arm member 73, holding this first arm member rotation source 72; and a second arm member rotation source 74, having a rotation axis at a position that is non-coaxial to the rotation axis of first arm member rotation source 72 and rotating second arm member 73 within the X-Y plane. By enabling the movement of solid immersion lens 3 to a desired position within the X-Y plane by the rotation of the two arm members 71 and 73, the need to make the component parts long in the orthogonal X and Y directions is eliminated and a simple arrangement that occupies a small area is provided. A solid immersion lens moving device, with which low cost is realized while realizing compactness of the device, and a microscope equipped with the same are thereby realized.
    • 固体浸没透镜移动装置设置有第一臂构件71,其连接有支撑固体浸没透镜3的固体浸没透镜保持器5; 第一臂构件旋转源72,其使第一臂构件71在基本上平行于观察对象的X-Y平面内旋转; 保持该第一臂构件旋转源72的第二臂构件73; 以及第二臂构件旋转源74,其具有在与第一臂构件旋转源72的旋转轴线不同轴的位置处的旋转轴线以及在X-Y平面内旋转的第二臂构件73。 通过使两个臂构件71和73的旋转能够将固体浸没透镜3移动到XY平面内的期望位置,消除了在正交X和Y方向上使部件长度长的需要,并且简单的布置 提供占地面积小的区域。 从而实现了在实现装置的紧凑性的同时实现低成本的固体浸没透镜移动装置和具有该固体浸没透镜移动装置的显微镜。