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81. 发明授权

US09109935B2 MEMS utility meters with integrated mass flow sensors 有权
标题翻译：具有集成质量流量传感器的MEMS功率表
公开(公告)号：US09109935B2
公开(公告)日：2015-08-18
申请号：US13662523
申请日：2012-10-28
申请人： Xiangyou Yang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
发明人： Xiangyou Yang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
IPC分类号： G01F1/68 , G01F1/684 , G01F25/00 , G01F15/00
CPC分类号： G01F1/6845 , G01F1/6842 , G01F15/00 , G01F25/0007
摘要： This invention is related to an apparatus which incorporates a microfabricated silicon mass flow sensor to measure city gas flow rate in a medium pressure range for utility industry which is dominated by conventional mechanical meters such as turbine and rotary meters. The microfabricated mass flow sensor is so called micro-electro-mechanical systems (a.k.a. MEMS) device. Due to the small feature size of micro scale for MEMS mass flow sensor, the invented apparatus includes many advantages such as low power consumption, compact package, high reliability and extended dynamic measurement range. This apparatus is also provided with a stable flow conditioning to achieve a desired dynamic range capability. Furthermore, because of the high accuracy characteristic, the apparatus in this invention could be applied for custody transfer or tariff in utility industry as well.
摘要翻译：本发明涉及一种装置，该装置包括微制硅质量流量传感器，用于测量以常规机械仪表如涡轮机和旋转仪表为主的公用工业的中压范围内的城市气体流量。微型质量流量传感器是所谓的微机电系统（微机电系统）设备。由于MEMS质量流量传感器的微尺度特征尺寸小，本发明装置具有功耗低，封装紧凑，可靠性高，扩展动态测量范围等优点。该装置还具有稳定的流动调节以实现期望的动态范围能力。此外，由于具有高精度特性，本发明的装置也可应用于公用事业行业的托管转让或关税。

82. 发明授权

US08950253B2 MEMS mass flow sensor assembly and method of making the same 有权
标题翻译： MEMS质量流量传感器组件及其制造方法
公开(公告)号：US08950253B2
公开(公告)日：2015-02-10
申请号：US13736941
申请日：2013-01-08
申请人： Liji Huang , Chih-Chang Chen
发明人： Liji Huang , Chih-Chang Chen
IPC分类号： G01F1/68 , G01F1/69
CPC分类号： G01F1/69 , G01F1/684 , G01F1/6845 , G01F1/692
摘要： A silicon mass flow sensor manufacture process that enables the backside contacts and eliminates the conventional front side wire binding process, and the assembly of such a mass flow sensor is disclosed in the present invention. The achieved assembly enhances the reliability by eliminating the binding wire exposure to the flow medium that may lead to detrimental failure due to the wire shortage or breakage while the miniature footprint could be maintained. The assembly further reduces flow instability from the flow sensor package including the bump of wire sealing. The invented mass flow sensor assembly can be a flow sensor module if the supporting sensor carrier is pre-designed with the control electronics. Without the control electronics, the said mass flow sensor assembly is easy to install into desired flow channels and connect to the external control electronics.
摘要翻译：硅质量流量传感器制造方法，其能够实现背面接触并消除常规的前侧线束粘合过程，并且在本发明中公开了这种质量流量传感器的组装。实现的组件通过消除可能导致由于电线短缺或断裂而导致有害故障的流动介质的接合线而增强了可靠性，同时可以保持微小的占地面积。该组件进一步减少了流量传感器封装的流动不稳定性，包括电线密封凸块。如果支撑传感器载体与控制电子装置预先设计，则本发明的质量流量传感器组件可以是流量传感器模块。没有控制电子器件，所述质量流量传感器组件易于安装到期望的流动通道中并连接到外部控制电子装置。

83. 发明申请

US20140118161A1 MEMS UTILITY METERS WITH EXCHANGEABLE METROLOGY UNIT 有权
标题翻译：具有可交换计量单位的MEMS实用程序
公开(公告)号：US20140118161A1
公开(公告)日：2014-05-01
申请号：US13662520
申请日：2012-10-28
申请人： Changming Jiang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
发明人： Changming Jiang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
IPC分类号： G01F5/00 , G08C15/06
CPC分类号： H04Q9/00 , H04Q2209/43 , H04Q2209/60
摘要： An all-electronic utility gas meter using with micromachined (a.k.a. MEMS Micro Electro Mechanical Systems) silicon sensor to measure gas metrology data for custody transfer or tariff in city gas metering application is disclosed in the present invention. The meter has two separate metrology units. One of the units is located in the main flow channel with the insertion probing configuration while the other is configured as a bypass unit assembly with the main metrology unit. The bypass metrology unit can perform independent metrology tasks and can be exchanged onsite during service, maintenance or repair without dismantle the meter from the service pipeline. The bypass metrology unit also can be used to compare the measured data from time to time and performance self-diagnosis that shall help the performance and data authentication during the meter field service. Both of the units can be powered by battery or external sources. The units can be connected to network as well as provide internal plural storages for data transmission and safety.
摘要翻译：在本发明中公开了一种使用微机械（即微机电MEMS机电系统）硅传感器来测量用于城市燃气计量应用中的监管转移或关税的气体计量数据的全电气公用事业气量计。仪表有两个独立的计量单位。其中一个单元位于具有插入探测配置的主流道中，而另一个被配置为与主计量单元的旁路单元组件。旁路计量单元可以执行独立的计量任务，并可在维修，维护或维修期间进行现场交换，而无需将仪表从服务管道拆除。旁路计量单元还可用于比较不时测量的数据和性能自我诊断，这将有助于仪表现场服务期间的性能和数据认证。这两个单元可以由电池或外部来源供电。这些单元可以连接到网络，并提供用于数据传输和安全的内部多个存储。

84. 发明申请

US20140116129A1 MEMS Utility Meters with Integrated Mass Flow Sensors 有权
标题翻译：具有集成质量流量传感器的MEMS实用仪表
公开(公告)号：US20140116129A1
公开(公告)日：2014-05-01
申请号：US13662523
申请日：2012-10-28
申请人： Xiangyou Yang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
发明人： Xiangyou Yang , Yong Feng , Sugang Jiang , Chih-Chang Chen , Liji Huang
IPC分类号： G01F1/684
CPC分类号： G01F1/6845 , G01F1/6842 , G01F15/00 , G01F25/0007
摘要： This invention is related to an apparatus which incorporates a microfabricated silicon mass flow sensor to measure city gas flow rate in a medium pressure range for utility industry which is dominated by conventional mechanical meters such as turbine and rotary meters. The microfabricated mass flow sensor is so called micro-electromechanical systems (a.k.a. MEMS) device. Due to the small feature size of micro scale for MEMS mass flow sensor, the invented apparatus includes many advantages such as low power consumption, compact package, high reliability and extended dynamic measurement range. This apparatus is also provided with a stable flow conditioning to achieve a desired dynamic range capability. Furthermore, because of the high accuracy characteristic, the apparatus in this invention could be applied tot custody transfer or tariff in utility industry as well.
摘要翻译：本发明涉及一种装置，该装置包括微制硅质量流量传感器，用于测量以常规机械仪表如涡轮机和旋转仪表为主的公用工业的中压范围内的城市气体流量。微型质量流量传感器是所谓的微机电系统（微机电系统）设备。由于MEMS质量流量传感器的微尺度特征尺寸小，本发明装置具有功耗低，封装紧凑，可靠性高，扩展动态测量范围等优点。该装置还具有稳定的流动调节以实现期望的动态范围能力。此外，由于具有高精度特性，本发明的装置也可应用于公用事业行业的保管转让或关税。

85. 发明授权

US08644693B2 Integrated micromachining proximity switch sensors in air/oil lubricators 有权
标题翻译：空气/油润滑器中的集成微加工接近开关传感器
公开(公告)号：US08644693B2
公开(公告)日：2014-02-04
申请号：US12796565
申请日：2010-06-08
申请人： Liji Huang , Jiliang Ruan , Jian Luo , Chih-Chang Chen
发明人： Liji Huang , Jiliang Ruan , Jian Luo , Chih-Chang Chen
IPC分类号： F24H1/10
CPC分类号： G01N33/2888 , G01N25/18
摘要： An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon thermal sensor as a proximity switch sensor in air/oil Lubricators is disclosed in the present invention. The present invention relates to mass flow sensing and measurement for both gas and liquid phase and relates to air/oil lubrication process for multi-point lubrication machine. The invented apparatus is utilized as an alarm device to prevent mechanical system failures caused by the discontinuity of oil lubrication. The MEMS silicon thermal sensor is distinguished with a variety of advantages of small size, low power consumption, high reliability and high accuracy. In addition to the above benefits, the most significant and critical advantage is its fast response time of less than 20 msec, which makes the proximity switch control become viable for preventing equipment damage from oil lubricants discontinuity.
摘要翻译：本发明公开了一种与微加工（即微机电MEMS机械系统）硅热传感器集成的装置，作为空气/油中的接近开关传感器。本发明涉及气相和液相的质量流量感测和测量，涉及多点润滑机的空气/油润滑过程。本发明的装置用作报警装置，以防止油润滑不连续引起的机械系统故障。 MEMS硅热传感器具有体积小，功耗低，可靠性高，精度高等优点。除了上述优点之外，最重要和最关键的优点是其快速响应时间小于20毫秒，这使得接近开关控制变得可行，以防止油润滑剂不连续的设备损坏。

86. 发明授权

US08544320B2 Integrated micromachined wind and gas velocity profiler 有权
标题翻译：集成微加工风和气体速度分析仪
公开(公告)号：US08544320B2
公开(公告)日：2013-10-01
申请号：US12782521
申请日：2010-05-18
申请人： Liji Huang , Jialuo Jack Xuan , Chih-Chang Chen
发明人： Liji Huang , Jialuo Jack Xuan , Chih-Chang Chen
IPC分类号： G01F1/68
CPC分类号： G01F1/6845 , F41G1/40 , G01F1/692
摘要： A wind or gas velocity profiler integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon sensors in an open or enclosed space is disclosed in the present invention. There are three main embodiments disclosed in the present invention. Through the preambles of the independent claims, the advantages and merits of such measurement apparatus with MEMS flow sensor will be demonstrated as well. A silicon-based MEMS flow sensor can greatly reduce the sensor fabrication cost by a batch production. The integration with MEMS flow sensor makes the invented anemometer operate in the ways of better measurement accuracy, lower power consumption, higher reliability and a compact dimension compared to traditional anemometers such as cup anemometer, thermal anemometer and ultrasonic anemometer.
摘要翻译：在本发明中公开了与开放式或封闭空间中的微机械（微机电，微机电系统）硅传感器集成的风或气体速度分析仪。在本发明中公开了三个主要实施例。通过独立权利要求的前序，也将证明具有MEMS流量传感器的这种测量装置的优点和优点。硅基MEMS流量传感器可以通过批量生产大大降低传感器制造成本。与传统的风速计，比如杯式风速计，热风速计和超声波风速计相比，与MEMS流量传感器的集成使得本发明的风速计以更好的测量精度，更低的功耗，更高的可靠性和紧凑的尺寸运行。

87. 发明授权

US08464593B2 Integrated micro-machined air flow velocity meter for projectile arms 有权
标题翻译：用于射弹臂的集成微加工空气流速计
公开(公告)号：US08464593B2
公开(公告)日：2013-06-18
申请号：US12786233
申请日：2010-05-24
申请人： Liji Huang , Wei Ching , Chih-Chang Chen
发明人： Liji Huang , Wei Ching , Chih-Chang Chen
IPC分类号： G01F1/00 , G01F1/68
CPC分类号： G01F1/692 , F41G1/40 , F41G1/46 , F41G1/473 , G01F1/6845
摘要： An apparatus integrated with micromachined (a.k.a. MEMS, Micro Electro Mechanical Systems) silicon sensor to measure air flow velocity on targeting correction for projectiles arms is disclosed in the present invention. The air flow velocity component perpendicular to the travel direction of bullets with respect to projectile arm body (e.g. bullets, shells, or arrows) has main effect to the targeting accuracy. Such effect is pretty much determined by the wind speed and the projectile travel distance. The integration with MEMS mass flow sensor has made the invented apparatus possible to be compact, low power consumption, low cost and high accuracy. The low power consumption characteristic of MEMS mass flow sensor is especially crucial for making the apparatus of present invention feasible by battery operated.
摘要翻译：在本发明中公开了一种与微加工（即微机电MEMS机械系统）硅传感器集成的装置，用于测量射弹臂的瞄准校正时的空气流速。相对于射弹臂体（例如子弹，外壳或箭头），子弹的行进方向垂直的气流速度分量对瞄准精度有主要影响。这种影响几乎取决于风速和射弹行程距离。与MEMS质量流量传感器的集成使得本发明的设备可以紧凑，低功耗，低成本和高精度。 MEMS质量流量传感器的低功耗特性对于通过电池供电使本发明的装置变得可行是特别关键的。

88. 发明授权

US06572958B1 Magnetic recording media comprising a silicon carbide corrosion barrier layer and a c-overcoat 失效
标题翻译：磁记录介质包括碳化硅腐蚀阻挡层和c覆盖层
公开(公告)号：US06572958B1
公开(公告)日：2003-06-03
申请号：US09621530
申请日：2000-07-21
申请人： Kueir-Weei Chour , Liji Huang , Jie-Ming Yu , Kuo-Hsing Hwang , Chung Shih , Lin Huang , Charles Leu , Qixu Chen , Rajiv Yadav Ranjan
发明人： Kueir-Weei Chour , Liji Huang , Jie-Ming Yu , Kuo-Hsing Hwang , Chung Shih , Lin Huang , Charles Leu , Qixu Chen , Rajiv Yadav Ranjan
IPC分类号： G11B572
CPC分类号： G11B5/8408 , G11B5/72 , Y10T428/2495 , Y10T428/265
摘要： A magnetic recording medium is provided with a dual layer protective overcoat system comprising a SiC corrosion barrier layer and a carbon-containing protective overcoat thereon. The SiC layer effectively prevents or significantly reduces Co and Ni diffusion to the medium surface. Embodiments include magnetic recording media comprising a SiC corrosion barrier layer over a magnetic layer, an overlying protective layer of amorphous hydrogenated carbon, amorphous nitrogenated carbon or amorphous hydrogen-nitrogenated carbon, and a lubricant topcoat thereon. Embodiments of the present invention further include magnetic recording media comprising Ni—P plated aluminum, Ni-plated glass or non-conductive substrates including glass, glass-ceramic and ceramic materials. Embodiments of the present invention further include a dual protective overcoat system having a combined thickness less than about 100 Å, such as less than about 75 Å, e.g., less than about 50 Å, with the SiC corrosion barrier layer having a thickness ranging from 1 Å to 40 Å.
摘要翻译：磁记录介质设置有双层保护外涂层系统，其包括SiC腐蚀阻挡层和其上的含碳保护外涂层。 SiC层有效地防止或显着减少Co和Ni扩散到介质表面。实施例包括在磁性层上包含SiC腐蚀阻挡层的磁记录介质，无定形氢化碳的上覆保护层，无定形氮化碳或无定形氢化氮，以及其上的润滑剂面涂层。本发明的实施例还包括包含Ni-P镀铝，镀Ni玻璃或包括玻璃，玻璃 - 陶瓷和陶瓷材料的非导电衬底的磁记录介质。本发明的实施方案还包括双重保护外涂层系统，其具有小于约，例如小于约，例如小于约50埃的组合厚度，其中SiC腐蚀阻挡层的厚度范围为1 Å至40Å。

89. 发明授权

US06565718B1 Magnetic recording medium with high density, thin dual carbon overcoats 有权
标题翻译：具有高密度，薄双层碳涂层的磁记录介质
公开(公告)号：US06565718B1
公开(公告)日：2003-05-20
申请号：US09946934
申请日：2001-09-06
申请人： Kueir-Weei Chour , Liji Huang , Jie-Ming Yu , Kuo-Hsing Hwang , Chung Shih
发明人： Kueir-Weei Chour , Liji Huang , Jie-Ming Yu , Kuo-Hsing Hwang , Chung Shih
IPC分类号： G11B5851
CPC分类号： G11B5/72 , Y10S428/90 , Y10T428/24942 , Y10T428/2495 , Y10T428/265 , Y10T428/30
摘要： A magnetic recording medium is formed with dual carbon-containing protective layers having a combined thickness of less than about 100 Å with high corrosion resistance and superior magnetic performance. Embodiments of the present invention include sputter depositing a first protective layer of hydrogenated carbon at a density of at least 1.9 while applying a DC bias of about 250V to about 400V to the substrate, and sputter depositing a second protective layer comprising nitrogen-doped hydrogenated carbon on the first protective layer.
摘要翻译：形成具有小于约100的组合厚度的双含碳保护层的磁记录介质，具有高耐腐蚀性和优异的磁性能。本发明的实施例包括以至少1.9的密度溅射沉积氢化碳的第一保护层，同时向衬底施加约250V至约400V的DC偏压，并溅射沉积包含掺氮氢化碳的第二保护层在第一保护层上。

90. 发明授权

US06303214B1 Magnetic recording medium with high density thin dual carbon overcoats 失效
标题翻译：具有高密度薄双碳外壳的磁记录介质
公开(公告)号：US06303214B1
公开(公告)日：2001-10-16
申请号：US09477064
申请日：2000-01-04
申请人： Kueir-Weei Chour , Liji Huang , Jie-Ming Yu , Kuo-Hsing Hwang , Chung Shih
发明人： Kueir-Weei Chour , Liji Huang , Jie-Ming Yu , Kuo-Hsing Hwang , Chung Shih
IPC分类号： G11B572
CPC分类号： G11B5/72 , Y10S428/90 , Y10T428/24942 , Y10T428/2495 , Y10T428/265 , Y10T428/30
摘要： A magnetic recording medium is formed with dual carbon-containing protective layers having a combined thickness of less than about 100 Å with high corrosion resistance and superior magnetic performance. Embodiments of the present invention include sputter depositing a first protective layer of hydrogenated carbon at a density of at least 1.9 while applying a DC bias of about 250V to about 400V to the substrate, and sputter depositing a second protective layer comprising nitrogen-doped hydrogenated carbon on the first protective layer.
摘要翻译：形成具有小于约100的组合厚度的双含碳保护层的磁记录介质，具有高耐腐蚀性和优异的磁性能。本发明的实施例包括以至少1.9的密度溅射沉积氢化碳的第一保护层，同时向衬底施加约250V至约400V的DC偏压，并溅射沉积包含掺氮氢化碳的第二保护层在第一保护层上。

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