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    • 82. 发明授权
    • Illuminating optical apparatus and exposure apparatus having the same
    • 照明光学装置和具有该装置的曝光装置
    • US5245384A
    • 1993-09-14
    • US899546
    • 1992-06-16
    • Takashi Mori
    • Takashi Mori
    • G03F7/20H01L21/027
    • G03F7/70058
    • An illuminating optical apparatus adapted to eliminate the occurrence of any exposure light quantity loss and maintain an uniform exposure condition even if the .sigma. value of an illuminating system is varied in response to changing of the pattern of a reticle to be exposed and an exposure apparatus having such illuminating optical apparatus. The illuminating optical apparatus includes an elliptical mirror for condensing an illuminating light from a light source, a collimating optical system for collimating the condensed illuminating light, an optical integrator for forming a plurality of secondary light sources from the coliminated illuminating light, and an afocal zoom optical system arranged in an optical path between the collimating optical system and the optical integrator to vary the secondary light sources in size. An image of an opening of the elliptical mirror is formed at an entrance surface of the optical integrator or in the vicinity thereof.
    • 一种照明光学装置,其适用于消除任何曝光光量损失的发生,并且即使照明系统的σ值响应于待曝光的掩模版的图案的改变而变化,并且保持均匀的曝光条件,以及具有 这种照明光学装置。 照明光学装置包括:用于聚集来自光源的照明光的椭圆镜;用于准直聚光照明光的准直光学系统;用于从聚焦照明光形成多个次级光源的光学积分器;以及远焦放大 光学系统布置在准直光学系统和光学积分器之间的光路中,以改变二次光源的尺寸。 椭圆镜的开口的图像形成在光学积分器的入射面或其附近。
    • 85. 发明授权
    • Current sensitized transfer type printer with a heated common electrode
    • 电流传感式打印机,带有加热的公共电极
    • US5107277A
    • 1992-04-21
    • US673279
    • 1991-03-21
    • Takashi Mori
    • Takashi Mori
    • B41J2/325
    • B41J2/325
    • A current-sensitized transfer type printer comprising an ink sheet including an ink layer, a conductive layer and a resistance layer which are stacked in this order, a feeding mechanism for feeding the ink sheet in a predetermined direction, a plurality of recording electrodes, each of which is in contact with the resistance layer of the ink sheet, a common electrode which is in contact with the resistance layer of the ink sheet, a power supply for supplying a current between each recording electrode which is selected in accordance with image information and the common electrode, the current flowing through the resistance layer and the conductive layer existing between each recording electrode which is selected and the common electrode, and a heater for heating the common electrode.
    • 一种电流敏化转印型打印机,包括:油墨层,包括依次堆叠的油墨层,导电层和电阻层,用于沿预定方向进给油墨纸的进给机构,多个记录电极,每个 其与墨片的电阻层接触,与油墨片的电阻层接触的公共电极,用于在根据图像信息选择的每个记录电极之间提供电流的电源和 公共电极,流过电阻层的电流和存在于所选择的记录电极和公共电极之间的导电层,以及用于加热公共电极的加热器。