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    • 86. 发明授权
    • Methods and apparatus for calibrating pressure gauges in a substrate processing system
    • 在基板处理系统中校准压力表的方法和装置
    • US08616043B2
    • 2013-12-31
    • US12916450
    • 2010-10-29
    • James P. CruseEzra Robert GoldJared Ahmad LeeMing Xu
    • James P. CruseEzra Robert GoldJared Ahmad LeeMing Xu
    • G01L27/02
    • G01L27/005H01L21/67253Y10T137/86083
    • Systems and methods for calibrating pressure gauges in one or more process chambers coupled to a transfer chamber having a transfer volume is disclosed herein. The method includes providing a first pressure in the transfer volume and in a first inner volume of a first process chamber coupled to the transfer chamber, wherein the transfer volume and the first inner volume are fluidly coupled, injecting a calibration gas into the transfer volume to raise a pressure in the transfer volume and in the first inner volume to a second pressure, measuring the second pressure using each of a reference pressure gauge coupled to the transfer chamber and a first pressure gauge coupled to the first process chamber while the transfer volume and the first inner volume are fluidly coupled, and calibrating the first pressure gauge based on a difference in the measured second pressure between the reference pressure gauge and the first pressure gauge.
    • 本文公开了用于校准耦合到具有转移体积的转移室的一个或多个处理室中的压力计的系统和方法。 该方法包括在传送体积和连接到传送室的第一处理室的第一内部容积中提供第一压力,其中传送体积和第一内部体积被流体耦合,将校准气体注入到传送体积中 将传送体积和第一内部体积中的压力提高到第二压力,使用耦合到传送室的参考压力表中的每一个测量第二压力,以及耦合到第一处理室的第一压力表,同时传送体积和 第一内部体积流体耦合,并且基于测量的参考压力计和第一压力计之间的第二压力的差异校准第一压力计。
    • 87. 发明授权
    • Resonant converter equipped with multiple output circuits to provide multiple power outlets
    • 谐振转换器配有多个输出电路,提供多个电源插座
    • US08587963B2
    • 2013-11-19
    • US12356838
    • 2009-01-21
    • Zhanghe NanMing XuQiao Liang Chen
    • Zhanghe NanMing XuQiao Liang Chen
    • H02M3/335
    • H02M3/33592Y02B70/1433Y02B70/1475
    • A resonant converter equipped with a phase shifting output circuit includes a resonant circuit to receive input power and regulate to become at least one resonant power, a switch unit to switch an ON period for the input power to pass through the resonant circuit and a power transformation circuit to regulate the resonant power and output a transformed power. The resonant converter further has a primary output circuit and at least one secondary output circuit. The primary output circuit regulates the transformed power to become a primary output power. A resonant control unit captures a feedback signal from the primary output circuit and generates a resonant control signal. A phase shifting control unit receives the resonant control signal and regulate to become a phase shifting driving signal. The secondary output circuit is controlled by the phase shifting driving signal and provides a secondary output power.
    • 配备有相移输出电路的谐振转换器包括:谐振电路,用于接收输入功率并调节成至少一个谐振功率;开关单元,用于切换输入功率的通过周期以通过谐振电路;以及功率变换 电路来调节谐振功率并输出变换功率。 谐振转换器还具有初级输出电路和至少一个次级输出电路。 主输出电路调节变换后的功率成为主输出功率。 谐振控制单元捕获来自主输出电路的反馈信号并产生谐振控制信号。 相移控制单元接收谐振控制信号并调节成为相移驱动信号。 次级输出电路由相移驱动信号控制,并提供次级输出功率。