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    • 85. 发明授权
    • Method and apparatus for fabricating three dimensional element from anisotropic material
    • 从各向异性材料制造三维元件的方法和装置
    • US06605225B1
    • 2003-08-12
    • US09646701
    • 2000-09-21
    • Tsutomu YamashitaSang-Jae Kim
    • Tsutomu YamashitaSang-Jae Kim
    • H01L3922
    • H01L39/2496B82Y10/00Y10S505/832Y10S505/922
    • A three-dimensional element is fabricated from a high-temperature superconductor. The method and apparatus can fabricate, for example, a single-electron tunnel device or an intrinsic Josephson device which utilize the layer structure peculiar to the high-temperature superconductor, with machining from the side surface of a monocrystal or thin film. In the focused-ion beam etching, a substrate holder which is rotatable about 360°, is rotated, at the minimum, through an angle of about 90°, and the thin film or monocrystal on the substrate is etched from the side surface thereof so as to fabricate the element. After the thin film or monocrystal is machined from above by means of an focused-ion beam to thereby form a bridge having a junction length, the sample is rotated by about 90° (270°). Subsequently, a multi-layer current path layer is formed through side-surface machining. The junction length is accurately controlled through measurement of the current path length from an image display.
    • 三维元件由高温超导体制成。 该方法和装置可以制造例如利用单晶或薄膜的侧表面进行加工的利用高温超导体特有的层结构的单电子隧道装置或固有约瑟夫逊装置。 在聚焦离子束蚀刻中,可旋转约360°的衬底保持器至少旋转大约90°的角度,并且从其侧表面蚀刻衬底上的薄膜或单晶,因此 以制造元素。 在通过聚焦离子束从上面加工薄膜或单晶之后,形成具有结长的桥,样品旋转大约90°(270°)。 随后,通过侧面加工形成多层电流通路层。 通过从图像显示器测量当前路径长度来精确控制结长度。