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    • 71. 发明授权
      US4054010A Apparatus for grinding edges of planar workpieces 失效
    • Apparatus for grinding edges of planar workpieces
    • US4054010A
    • 1977-10-18
    • US650698
    • 1976-01-20
    • Vern D. Shipman
    • Vern D. Shipman
    • B24B9/00 , B24B9/06 , B24B35/00 , H01L21/304
    • H01L21/02021 , B24B35/00 , B24B9/00 , B24B9/065
    • An apparatus for grinding the edges of planar workpieces such as semiconductor wafers, wherein an abrasive material is provided on the side of a flexible substrate which is mounted in a cantilevered fashion. By virtue of the flexibility in the substrate, the grinding surface can move in and out, if necessary, in order to accommodate any eccentricities or out-of-round portions of the planar workpiece. In a preferred embodiment for semiconductor wafer processing, the wafer is rotated at a speed in excess of 3000 rpm and as high as, say, 10,000 rpm. The grinding surface is preferably established on a round disc which is centrally supported on a shaft; and loading on the grinding surface is typically in a direction that is generally parallel to the longitudinal axis of the shaft. In order to distribute wear of the abrasive surface evenly around the disc, the disc is permitted to have a relatively slow rotational speed; the rapidly rotating wafer is used to induce rotation of the disc, and a friction restraint is employed to prevent the disc (and its grinding surface) from rotating too fast, i.e., more than about 100 rpm. Preferably, the abrasive material on the grinding surface constitutes diamond bort having a size of about 100 microns. In order to obviate difficulties that might arise due to mechanical resonance in the grinding system, it is preferred that the relative speed between the workpiece and the grinding surface be varied during a grinding operation. Thus, the workpiece may be rotated at a varying speed between, say, 3000 rpm and 1,000 rpm, during a single cycle; any bouncing that may occur as a result of resonance in the system will inevitably be distributed around the workpiece and not concentrated in a single spot. The substrate material on which the abrasive material (diamond bort) is mounted may be a polycarbonate sheet material having a thickness of 20 or 30 mils. Another substrate may be a cloth-like material shaped to form a diaphragm and supported during grinding operations by pressurized fluid in a chamber below the diaphragm.
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Espacenet 法律信息 同族专利 专利引用
    • 72. 发明授权
      US3988863A Structure for and method of total form abrasion machining 失效
    • Structure for and method of total form abrasion machining
    • 总体磨损加工的结构和方法
    • US3988863A
    • 1976-11-02
    • US633614
    • 1975-11-20
    • Thomas J. O'Connor
    • Thomas J. O'Connor
    • B24B35/00 , B24B41/00 , B24B19/00
    • B24B41/00 , B24B35/005
    • A machine for producing a rotary orbital motion between a cutting master having an abrasive mirror image surface of a form to be abraded into a friable material and a workpiece of friable material while moving the surface of the cutting master and workpiece into contact including adjustable eccentric means for varying the rotary orbital motion between the workpiece and the cutting master, a hydraulic piston and cylinder for moving the cutting master and workpiece into engagement with each other during imparting of the rotary orbital motion between the cutting master and workpiece, hydraulic means for applying predetermined variable pressure between the cutting master and workpiece, a control circuit for controlling the operation of the total form abrading machine including means for controlled pulsing of the cutting master away from the workpiece, and means for flushing between the electrode and workpiece during an abrading operation, and the method of using the total form abrading machine.
    • 一种用于在切割母版之间产生旋转轨道运动的机器，该切割母版具有要磨削成脆性材料的形式的磨料镜像表面和易碎材料的工件，同时使切割母版和工件的表面移动到包括可调偏心装置 用于改变工件和切割主体之间的旋转轨道运动;液压活塞和气缸，用于在切割主工件和工件之间施加旋转轨道运动期间使切割主工件和工件彼此接合，液压装置用于施加预定 切割主体和工件之间的可变压力，用于控制总成型研磨机的操作的控制电路，包括用于将切割母板远离工件受控脉冲的装置，以及用于在研磨操作期间在电极和工件之间冲洗的装置， 以及使用总体磨损mac的方法 哼
    • 基本信息 添加关注 加入工作空间 PDF全文 PDF下载 全文下载 相似专利 双屏查看 权利要求书 说明书全文 Espacenet 法律信息 同族专利 专利引用
    • 78. 发明授权
      US3333366A Apparatus for parallel face finishing 失效
    • Apparatus for parallel face finishing
    • 平面整理装置
    • US3333366A
    • 1967-08-01
    • US42075164
    • 1964-12-23
    • MICROMATIC HONE CORP
    • CZUBAK ALBIN S , MILITZER ROBERT W
    • B24B35/00
    • B24B35/00
    • 1,069,174. Grinding. MICROMATIC HONE CORPORATION. Oct. 11, 1965 [Dec. 23,1 964], No. 42939/65. Heading B3D. Apparatus for finishing parallel faces of a workpiece rotatable about an axis perpendicular to the faces comprises: (a) a housing mounted for reciprocation in a plane perpendicular to the axis, the housing including at least one pair of parallel spaced longitudinally extending guide surfaces; (b) a pair of abrasive stones carried by the housing for movement therewith; and (c) means carried by the housing and movable along the guide surfaces for moving the stones into engagement with a workpiece face. The disc 14, Fig. 1, of a disc brake is supported between fixtures, one of which is rotatably supported by an adjustable hand wheel 16 and the other is carried by the shaft of an electric motor 18 serving to rotate the disc. Two opposing pairs of abrasive tool assemblies are mounted in a tool housing 23 vertically reciprocated on a fixed frame 13 by an hydraulic cylinder 15. Each tool assembly comprises an abrasive stone 33 fixed to a holder 35, Fig. 3 (not shown). Each holder has longitudinally spaced tapered rear faces 37 engaging tapered faces 39 on a plate 41 slidable in a groove in the tool housing. To advance the stone into contact with the workpiece, pressure fluid is admitted through inlet 51 and acts on a piston 43 to move the plate 41 downwards. To remove the plate 41 upwards, pressure fluid is admitted through inlet 63 and acts on a piston 55, the stone being retracted from the workpiece by leaf springs 65. In operation, the workpiece is mounted between the fixtures and the motor 18 actuated to rotate the workpiece. With the stones retracted the tool housing 23 is lowered. The stones are advanced into contact with the workpieces and the housing reciprocated rapidly to produce a random surface grain structure or slowly to produce a concentric surface grain structure. The operation may be terminated by a timer or by a gauging device. In a modification. Fig. 7 (not shown), the tool housing 23 is reciprocated through a connecting rod 75 by a crank-pin 77 on a disc 73 driven by a variable speed motor. The workpiece 14 is raised into finishing position by a lift 83 hydraulically or otherwise actuated, and having a concavity 85 to cradle the workpiece. One fixture 87 is reciprocable by a fluid motor 89 or a hand wheel and has a tapered end portion 91 engaging a central opening 93 in the workpiece to raise it clear of the lift and press it into engagement with the other fixture. The workpieces may be handled automatically.
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