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    • 72. 发明授权
    • Method for fabricating a field emission device having reduced
row-to-column leakage
    • 制造具有减少的列到列泄漏的场致发射器件的方法
    • US5821132A
    • 1998-10-13
    • US912612
    • 1997-08-18
    • John SongThomas Nilsson
    • John SongThomas Nilsson
    • H01J1/30H01J1/304H01J9/02H01J31/12H01L21/00
    • H01J9/025
    • A method for fabricating a diamond-like carbon field emission device (300, 800) includes the steps of: (i) forming on a column conductor (330, 830) a ballast layer (364), (ii) forming on the ballast layer (364), in registration with a central well region (332, 832) of the column conductor (330, 830), a surface emitter (370, 870) made from diamond-like carbon, (iii) forming on the ballast layer (364) and surface emitter (370, 870) a field shaping layer (374), (iv) pattering the ballast layer (364) and the field shaping layer (374) to form a ballast (365) and field shaper layer (377) having opposed edges which, with the opposed edges of the column conductor (330, 830), define smooth, continuous surfaces (371, 871), (v) depositing a blanket dielectric layer (341), and (vi) forming an emission well (360, 860) above the central well region (332, 832) of the column conductor (330, 830).
    • 制造类金刚石碳场发射器件(300,800)的方法包括以下步骤:(i)在列导体(330,830)上形成压载层(364),(ii)在镇流器层上形成 (364)与列导体(330,830)的中心阱区域(332,832)对准,由类金刚石碳制成的表面发射器(370,870),(iii)在压载层( 364)和表面发射器(370,870),场成形层(374),(iv)图案化镇流器层(364)和场成形层(374)以形成镇流器(365)和场成形层(377) 具有相对的边缘,其中柱导体(330,830)的相对边缘限定平滑的连续表面(371,871),(v)沉积覆盖介电层(341),和(vi)形成发射阱 (360,860)在列导体(330,830)的中心阱区域(332,832)之上。
    • 77. 发明授权
    • Field emission device with series resistor tip and method of
manufacturing
    • 带串联电阻头的场发射装置及制造方法
    • US5783905A
    • 1998-07-21
    • US774853
    • 1996-12-27
    • Johann GreschnerPeter PleshkoGerhard Schmid
    • Johann GreschnerPeter PleshkoGerhard Schmid
    • H01J1/304H01J9/02H01J1/30
    • H01J1/3042H01J9/025H01J2201/30426H01J2201/319
    • The invention generally relates to the technical field of devices using the effect to emit electrons out of a solid into vacuum due to high electric field strength. Such devices are usually called field emission devices. The invention relates more specifically to the structure of a field emission device, to the method of fabricating a field emission device, and to the use of a multitude of field emission devices in the technical field of flat panel displays. The inventive structure of a field emission device (15) comprises an individual series resistor for each electron emitting tip (1), wherein the series resistor is formed by the tip (1) itself. The tip (1) comprises a body (9) of a first material with high resistivity and an at least partial coating (7) of a second material with low work function, wherein the body (9) of the first material forms the series resistor and the coating (7) of the second material provides for electron emission. The method for fabricating a field emission device (15) uses depositing and sacrificial layer etch back techniques to provide easy and precise control of tip height and shape and also easy and precise control of the tip-to-gate distance and geometry.
    • 本发明一般涉及由于高电场强度而使用这种效应将电子从固体发射到真空中的装置的技术领域。 这种装置通常称为场致发射装置。 本发明更具体地涉及场发射装置的结构,制造场致发射装置的方法以及在平板显示器的技术领域中使用多种场致发射装置。 场发射器件(15)的本发明结构包括用于每个电子发射尖端(1)的单独的串联电阻器,其中串联电阻器由尖端(1)本身形成。 尖端(1)包括具有高电阻率的第一材料的主体(9)和具有低功函数的第二材料的至少部分涂层(7),其中第一材料的主体(9)形成串联电阻器 并且第二材料的涂层(7)提供电子发射。 用于制造场发射器件(15)的方法使用沉积和牺牲层回蚀技术来提供尖端高度和形状的容易和精确的控制,并且还容易且精确地控制尖端到栅极的距离和几何形状。
    • 78. 发明授权
    • Field emission cold cathode having micro electrodes of different
electron emission characteristics
    • 具有不同电子发射特性的微电极的场发射冷阴极
    • US5734223A
    • 1998-03-31
    • US564811
    • 1995-11-29
    • Hideo MakishimaYoshiaki Yanai
    • Hideo MakishimaYoshiaki Yanai
    • H01J29/04H01J1/304H01J3/02H01J31/12H01J1/30
    • H01J3/022H01J2201/319
    • In a field emission cold cathode composed of a plurality of micro cold cathodes, the diameter of a plurality of openings formed in a gate electrode is large at a central region of an electron emission zone but small at a peripheral region of the electron emission zone, or the thickness of the gate electrode is small at the central region of the electron emission zone but large at the peripheral region of the electron emission zone. Alternatively, the thickness of an insulator layer is small at the central region of the electron emission zone but large at the peripheral region of the electron emission zone. Or, a resistance layer is provided between a substrate and a plurality of electron emission electrodes, and resistivity of the resistance layer is small at the central region of the electron emission zone but large at the peripheral region of the electron emission zone.
    • 在由多个微冷阴极构成的场致发射冷阴极中,形成在栅电极中的多个开口的直径在电子发射区的中心区域处较大,但在电子发射区的外围区域较小, 或者栅电极的厚度在电子发射区的中心区域较小,但在电子发射区的外围区域较大。 或者,绝缘体层的厚度在电子发射区的中心区域较小,但在电子发射区的外围区域较大。 或者,在基板和多个电子发射电极之间设置电阻层,电子发射区的中心区域的电阻率较小,但在电子发射区的外围区域较大。
    • 80. 发明授权
    • Field emission control including different RC time constants for display
screen and grid
    • 场发射控制包括显示屏和电网的不同RC时间常数
    • US5721560A
    • 1998-02-24
    • US509501
    • 1995-07-28
    • David A. Cathey, Jr.William LewisGlen E. HushSteven Howell
    • David A. Cathey, Jr.William LewisGlen E. HushSteven Howell
    • G09G3/22H01J3/02H01J1/30H01J19/24
    • H01J3/022G09G3/22G09G2300/08G09G2330/026H01J2329/00
    • A method for controlling a field emission display to reduce emission to grid during turn on and turn off is provided. A field emission display (FED) includes emitter sites formed on a baseplate; a grid for controlling electron emission from the emitter sites; a display screen for collecting electrons to form an image and a power supply. In order to reduce emission to grid during turn on, the display screen is enabled by the power supply prior to enabling of the emitter sites. An anode-baseplate voltage differential is thus established prior to electron emission. For turn on, the method includes varying the capacitances of the control circuits for the display screen and grid such that a time constant (RC) for the grid is larger than a time constant (RC) for the display screen. Alternately the method of the invention can be implemented during turn on using software, using time delay circuit components, or using an emitter site control circuit to control electron flow to the emitter sites. During turn off, the electron emission and anode-baseplate voltage differential are eliminated while a path to ground is provided for the grid.
    • 提供一种用于控制场致发射显示以在打开和关闭期间减少到格栅的发射的方法。 场发射显示器(FED)包括形成在基板上的发射器位置; 用于控制来自发射器位点的电子发射的栅格; 用于收集电子以形成图像和电源的显示屏。 为了在接通电源时减少发射到电网,显示屏在启动发射器位置之前由电源启用。 因此,在电子发射之前建立阳极基板电压差。 为了打开,该方法包括改变用于显示屏和栅格的控制电路的电容,使得网格的时间常数(RC)大于显示屏幕的时间常数(RC)。 或者,本发明的方法可以在打开使用软件,使用时间延迟电路组件或使用发射器位置控制电路来控制到发射器位置的电子流的情况下实现。 在关闭期间,消除了电子发射和阳极基板电压差,同时为电网提供了接地的路径。