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71. 发明授权

US07066649B2 Actuator 失效
标题翻译：执行器
公开(公告)号：US07066649B2
公开(公告)日：2006-06-27
申请号：US10813147
申请日：2004-03-30
申请人： Shigekazu Nagai , Akio Saitoh
发明人： Shigekazu Nagai , Akio Saitoh
IPC分类号： F16C29/08 , F16J15/43
CPC分类号： F16H25/2418 , B23Q11/08 , F16H25/2204 , Y10T74/18712
摘要： In an actuator, displacement resistance in axial movement of a slider is reduced to improve durability and enhance maintainability. At each side of the actuator, a slit is made between a top cover and a side cover. Magnetic bodies are provided on the surfaces of both side walls of the slit which face a fixing block of a slider and a magnetic fluid with a viscosity, surface tension, etc. is held between the magnetic bodies. At each side, the fixing block of the slider axially moves along the slit which is closed by the magnetic bodies.
摘要翻译：在致动器中，滑块的轴向运动中的位移阻力被减小以改善耐久性并增强可维护性。在致动器的每一侧，在顶盖和侧盖之间形成狭缝。磁体设置在与滑块的固定块相对的狭缝的两个侧壁的表面上，并且具有粘性，表面张力等的磁性流体保持在磁体之间。在每一侧，滑块的固定块沿着由磁体封闭的狭缝轴向移动。

72. 发明授权

US06947125B2 Bearing arrangement for reaction mass in a controlled environment 失效
标题翻译：在受控环境中的反作用物质的轴承布置
公开(公告)号：US06947125B2
公开(公告)日：2005-09-20
申请号：US10648263
申请日：2003-08-27
申请人： Santiago E. del Puerto
发明人： Santiago E. del Puerto
IPC分类号： F16C33/10 , F16C29/02 , F16C29/04 , F16C29/08 , F16C32/06 , F16C33/74 , F16C33/78 , G03F7/20 , H01L21/027 , G03B27/42
CPC分类号： G03F7/70766 , G03F7/70841
摘要： A reaction mass apparatus for stabilizing a scanning system during lithographic processing comprises a baseframe; at least one reaction mass movably coupled to the baseframe by at least three first bearings and coupled to a stage by at least two second bearings and at least one drive; and a plurality of bellows, each bellows surrounding a corresponding first bearing, the bellows each having a first end coupled to a reaction mass and a second end coupled to the baseframe. The apparatus can comprise an enclosure, containing a controlled environment and enclosing the stage, the second bearings, the drive, and the reaction mass, wherein each bellows separates a corresponding first bearing from the controlled environment and wherein each bellows second end is coupled to the enclosure.
摘要翻译：用于在光刻处理期间稳定扫描系统的反应质量装置包括基架; 至少一个反作用力块通过至少三个第一轴承可移动地联接到所述基架上，并通过至少两个第二轴承和至少一个驱动器联接到平台; 以及多个波纹管，每个波纹管围绕对应的第一轴承，所述波纹管各自具有联接到反作用物质的第一端和联接到所述基架的第二端。该装置可以包括包含受控环境并且包围平台，第二轴承，驱动器和反作用物质的外壳，其中每个波纹管将相应的第一轴承与受控环境分离，并且其中每个波纹管的第二端连接到外壳。

73. 发明授权

US6135638A Linear motion guide unit with lubricating plate assembly 有权
标题翻译：具有润滑板组件的直线运动导向单元
公开(公告)号：US6135638A
公开(公告)日：2000-10-24
申请号：US348545
申请日：1999-07-07
申请人： Norimasa Agari
发明人： Norimasa Agari
IPC分类号： F16C29/06 , F16C29/08 , F16C33/66 , F16C33/10
CPC分类号： F16C29/0688 , F16C29/084 , F16C33/6648
摘要： A linear motion guide unit comprises a round track shaft and a slider surrounding around the track shaft for sliding movement along the track shaft. A lubricating plate assembly for self-lubrication may be simply installed in most prior linear motion guide units, with no need of modification in the basic specification of a slider. Both the lubricating plate assembly and the slider are held by a retaining ring in a radially enlarged bore in the housing of the instrument in such a manner as to be kept from falling off the bore. The lubricating plate assembly includes a case accommodating therein an end seal and a lubricant plate, which is composed of a lubricant- containing member, made of a sintered resinous component having a porous structure impregnated with lubricant. As the slider moves along the track shaft, the lubricant-containing member may apply incessantly the lubricant to the track shaft.
摘要翻译：直线运动引导单元包括圆形轨道轴和围绕轨道轴的滑块，用于沿着轨道轴滑动运动。用于自润滑的润滑板组件可以简单地安装在大多数现有的直线运动导向单元中，而不需要在滑块的基本规格中进行修改。润滑板组件和滑块都通过保持环保持在仪器壳体中的径向扩大的孔中，以防止从孔中脱落。润滑板组件包括容纳端部密封件和润滑剂板的壳体，其由具有浸渍有润滑剂的多孔结构的烧结树脂部件制成的含润滑剂的部件组成。当滑块沿着履带轴移动时，含润滑剂的构件可以不断地将润滑剂施加到履带轴上。

74. 发明授权

US6113272A Rolling motion guide apparatus 有权
标题翻译：滚动导轨装置
公开(公告)号：US6113272A
公开(公告)日：2000-09-05
申请号：US317185
申请日：1999-05-24
申请人： Hidekazu Michioka , Tadashi Hirokawa
发明人： Hidekazu Michioka , Tadashi Hirokawa
IPC分类号： F16C29/06 , F16C29/08
CPC分类号： F16C29/086 , F16C29/088
摘要： A rolling motion guide apparatus comprises a track member having a rolling member rolling groove along a longitudinal direction of the track member, a plurality of rolling members rolling along the rolling member rolling groove of the track member, a movable member having a loaded rolling member rolling groove which constitutes a loaded rolling member rolling passage in association with the rolling member rolling groove of the track member. The movable member is movable along the track member through the rolling members rolling in the loaded rolling member rolling passage. A seal member is provided on a surface of the movable member facing the track member. The seal member is composed of a base plate portion disposed along the surface of the movable member facing the track member and sealing portions disposed to longitudinal side edge portions of the base plate portion so as to be contacted to the track member. The base plate portion is formed of resin material different from resin material of which the sealing portions are formed. The base plate portion and the sealing portions is integrally molded with each other through an extrusion process.
摘要翻译：一种滚动运动导向装置，具有沿着轨道构件的长度方向具有滚动构件滚动槽的轨道构件，沿轨道构件的滚动构件滚动槽滚动的多个滚动构件，具有滚动构件的滚动构件的可动构件与轨道构件的滚动构件滚动槽相关联地构成负载滚动构件滚动通道的槽。可移动部件通过滚动部件在承载滚动部件滚动通道中滚动而沿着轨道部件移动。密封构件设置在面向轨道构件的可移动构件的表面上。密封构件由沿着可动构件的面向轨道构件的表面设置的基板部分和设置在基板部分的纵向侧边缘部分上以与轨道构件接触的密封部分组成。基板部分由与形成密封部分的树脂材料不同的树脂材料形成。底板部分和密封部分通过挤压工艺彼此一体地模制。

75. 发明授权

US6019513A Sealing device for linear guide apparatus 失效
公开(公告)号：US6019513A
公开(公告)日：2000-02-01
申请号：US678765
申请日：1996-07-11
申请人： Toru Tsukada , Yutaka Igarashi , Soichiro Kato , Toshikazu Yabe , Fumio Ueki
发明人： Toru Tsukada , Yutaka Igarashi , Soichiro Kato , Toshikazu Yabe , Fumio Ueki
IPC分类号： F16C29/08 , F16C33/66 , F16C29/06
CPC分类号： F16C29/086 , F16C29/0642 , F16C33/6611 , F16C33/6622 , F16C33/6648
摘要： In a linear guide apparatus including an axially extending guide rail, a slider engaged with the guide-rail, and a plurality of rolling elements loaded into the slider, the linear guide apparatus further includes a sealing device fixed to the slider in slidable contact with the guide rail for sealing a clearance existing between the guide rail and the slider, in which the sealing device includes a lubricant-containing polymer member formed of a synthetic resin containing a lubricant, and having a contact portion contacting with the guide rail to surround the guide rail, both wing portions, a connecting portion connecting the wing portions to be C-shaped substantially, and a pair of first recesses formed in the respective wing portions for fixing the lubricant-containing polymer member to the slider; a first plate member fitted to the lubricant-containing polymer member opposed to the slider; and a pair of first cylindrical members inserted to the respective first recesses.

76. 发明授权

US5871283A Intermediate cover for use in a linear guide device 失效
标题翻译：用于直线导向装置的中间盖
公开(公告)号：US5871283A
公开(公告)日：1999-02-16
申请号：US811173
申请日：1997-03-04
申请人： Rinzo Isobe , Toru Tsukada , Yoshinori Mizumura
发明人： Rinzo Isobe , Toru Tsukada , Yoshinori Mizumura
IPC分类号： F16C29/06 , B23Q11/08 , F16C29/00 , F16C29/08
CPC分类号： B23Q11/0825 , F16C29/008 , F16C29/0635 , F16C29/084
摘要： An intermediate cover is used to cover the surface of a guide rail existing between first and second sliders arranged on the guide rail of a linear guide device. The intermediate cover is structured such that it includes on the two ends thereof two mounting portions respectively for mounting the two ends of the cover onto the two sliders, and it also includes a body portion having a U-shaped section and including an upper surface and two side surfaces located adjacent to the upper surface and two side surfaces of the guide rail.
摘要翻译：中间盖用于覆盖布置在线性引导装置的导轨上的第一和第二滑块之间的导轨的表面。中间盖构造成使得其两端分别具有两个安装部分，用于将盖的两个端部安装到两个滑块上，并且还包括主体部分，该主体部分具有U形部分并且包括上表面和两个侧表面邻近导轨的上表面和两个侧表面。

77. 发明授权

US5624195A Light-weight miniature linear guide device 失效
标题翻译：轻型微型直线导轨装置
公开(公告)号：US5624195A
公开(公告)日：1997-04-29
申请号：US355347
申请日：1994-12-12
申请人： Yasushi Abe , Toru Tsukada
发明人： Yasushi Abe , Toru Tsukada
IPC分类号： F16C33/76 , F16C29/06 , F16C29/08 , F16C33/72
CPC分类号： F16C29/063 , F16C29/084
摘要： A light-weight miniature linear guide device provides: a guide rail including a first load ball rolling groove formed on an inner surface of the guide rail and extended longitudinally; a slider including a slider body adapted to be fitted in the guide rail, the slider body including a second load ball rolling groove formed on an outer surface of the slider body, and a circulator fitted in the slider body, the circulator having a non-load ball circulating path which is extended longitudinally; a plurality of balls fitted to roll in a space defined by the first and second load ball rolling grooves and the non-load ball circulating path of the circulator. Further, in the miniature linear guide device, the slider body includes a protrusion formed in a longitudinal end portion of the slider body, and a sealing member is secured to the protrusion to sealingly close a gap formed between the inner surface of the guide rail and the slider body. The miniature linear guide device can smoothly be operated even in a dusty atmosphere and prevented from scattering lubricant to lengthen the service life.
摘要翻译：一种轻型微型直线导引装置，提供：导轨，包括形成在导轨的内表面上并纵向延伸的第一负载滚珠滚动槽; 滑块，其具有适于安装在所述导轨中的滑块体，所述滑块主体包括形成在所述滑块体的外表面上的第二负载滚珠滚动槽和安装在所述滑块体中的循环器，纵向延伸的负载球循环路径; 多个球安装成在由第一和第二负载球滚动槽和循环器的无负载球循环路径限定的空间中滚动。此外，在微型线性引导装置中，滑块体包括形成在滑块体的纵向端部的突起，并且密封构件固定到突起部，以密封地封闭形成在导轨的内表面和滑块体。微型线性引导装置即使在多尘的气氛中也能够平稳地运行，并且防止其散射润滑剂以延长使用寿命。

78. 发明授权

US5547285A Linear guide means 失效
标题翻译：直线导轨装置
公开(公告)号：US5547285A
公开(公告)日：1996-08-20
申请号：US227738
申请日：1994-04-14
申请人： Bernhard Hutzel , Gunter Blaurock , Michael Klein
发明人： Bernhard Hutzel , Gunter Blaurock , Michael Klein
IPC分类号： F16C29/04 , B23Q1/26 , F16C29/06 , F16C29/08 , F16C33/66 , F16N7/12 , F10C29/06
CPC分类号： F16C29/065 , B23Q1/26 , F16C29/086 , F16C33/6659 , F16N7/12
摘要： A guide carriage 12 is guided on a guide rail 10 by rollers 12a. The rollers 12a engage guideways 10c. For lubricating the guideways 10c there are mounted on the end faces of the guide carriage 12 plate-shaped housings 14. Constructed in these plate-shaped housings are guides 24 for lubricating element fittings 26. The lubricating element fittings accommodate track lubricating elements 34 of felt. The lubricating element fittings 26 are pressed against the guideways 10c by pre-tensioning springs 42. The track lubricating elements 34 are captively accommodated in the lubricating element fittings 26. The lubricating element fittings 26 are captively guided in the guides 24. The track lubricating elements 24 are in a lubricant conductive connection with lubricant supply chambers 40 within the plate-shaped housing 14.
摘要翻译：引导滑架12通过滚子12a在导轨10上引导。辊12a接合导轨10c。为了润滑导轨10c，安装在导向架12的板状壳体14的端面上。构造在这些板状壳体中的是用于润滑元件配件26的导向件24.润滑元件配件容纳毡的轨道润滑元件34 。润滑元件配件26通过预张紧弹簧42而被压靠在导轨10c上。轨道润滑元件34被固定地容纳在润滑元件配件26中。润滑元件配件26被引导到引导件24中。轨道润滑元件 24与板状壳体14内的润滑剂供应室40处于润滑剂导电连接。

79. 发明授权

US5509736A Linear guiding device 失效
标题翻译：直线导引装置
公开(公告)号：US5509736A
公开(公告)日：1996-04-23
申请号：US302119
申请日：1994-09-07
申请人： Werner Keller , German Dutsch , Roland Hartmann
发明人： Werner Keller , German Dutsch , Roland Hartmann
IPC分类号： F16C29/06 , F16C29/08 , F16C33/66
CPC分类号： F16C29/0645 , F16C29/0609 , F16C29/086 , F16C29/088 , F16C33/6622 , F16C33/6674
摘要： A main body of a bearing (12) is guided on a guide rail (10) by at least one rolling-element circuit (14, 16) and receives at one end an end plate (13). A deflection duct (50, 52) is recessed in the end plate and receives a deflection piece (60), which crosses the deflection duct (50, 52). A lubricant-supply system (86) for the rolling-element circuit (14, 16) is provided inside the end plate (13). The lubricant-supply system (86) is partly within a deflection-piece receiver duct (58) which accommodates the deflection piece (60). The lubricant-supply system (86) includes a lubricant channel (92) which runs entirely within the end plate (13) so that it is encapsulated completely by the material of the end plate (13).
摘要翻译：轴承（12）的主体通过至少一个滚动元件回路（14,16）在导轨（10）上被引导，并且在一端容纳端板（13）。偏转管道（50,52）在端板中凹陷并且接收与偏转管道（50,52）相交的偏转片（60）。在端板（13）的内部设置用于滚动体电路（14,16）的润滑剂供给系统（86）。润滑剂供应系统（86）部分地在容纳偏转片（60）的偏转片接纳管（58）内。润滑剂供应系统（86）包括完全在端板（13）内运行的润滑剂通道（92），使得其被端板（13）的材料完全封装。

80. 发明授权

US5492413A Sealing device for a linear guide 失效
标题翻译：直线导轨密封装置
公开(公告)号：US5492413A
公开(公告)日：1996-02-20
申请号：US277166
申请日：1994-07-19
申请人： Toru Tsukada
发明人： Toru Tsukada
IPC分类号： B23Q11/08 , F16C29/06 , F16C29/08 , F16C33/66 , F16C33/76
CPC分类号： F16C29/0647 , F16C29/086 , F16C33/6611 , F16C33/6622 , F16C33/6648
摘要： A sealing device for a linear guide providing a guide rail and a slider, which is mounted on each of both ends of the slider so as to sealingly close the gaps between the inner surface of the slider and the outer surface of the guide rail, provides a first layer of rubber or synthetic resin and a second layer of lubricant-contained rubber of synthetic resin which are at least partially laid on and bonded to each other, so that the lubricant is kept supplied from the second layer to the surfaces with which the sealing device is sealingly in contact.
摘要翻译：一种用于提供导轨和滑块的线性导轨的密封装置，其安装在滑块的两端中的每一端以密封地关闭滑块的内表面和导轨的外表面之间的间隙，提供橡胶或合成树脂的第一层和合成树脂的第二层含润滑剂的橡胶，其至少部分地铺设并彼此结合，使得润滑剂保持从第二层供应到密封装置密封接触。

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