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    • 71. 发明授权
    • System and method for epitaxial deposition of a crystal using a liquid-solvent fluidized-bed mechanism
    • 使用液体溶剂流化床机理外延沉积晶体的系统和方法
    • US07922815B2
    • 2011-04-12
    • US12485016
    • 2009-06-15
    • Zalman M. Shapiro
    • Zalman M. Shapiro
    • C30B29/04
    • C30B9/10C30B29/04C30B35/00C30B35/005Y10T117/10Y10T117/1024
    • A system and method for growing diamond crystals from diamond crystal seeds by epitaxial deposition at low temperatures and atmospheric and comparatively low pressures. A solvent is circulated (by thermal convection and/or pumping), wherein carbon is added in a hot leg, transfers to a cold leg having, in some embodiments, a range of progressively lowered temperatures and concentrations of carbon via the circulating solvent, and deposits layer-by-layer on diamond seeds located at the progressively lower temperatures since as diamond deposits the carbon concentration lowers and the temperature is lowered to keep the solvent supersaturated. The solvent includes metal(s) or compound(s) that have low melting temperatures and transfer carbon at comparatively low temperatures. A controller receives parameter signals from a variety of sensors located in the system, processes these signals, and optimizes diamond deposition by outputting the necessary control signals to a plurality of control devices (e.g., valves, heaters, coolers, pumps).
    • 一种用于在低温和大气压和较低压力下通过外延沉积从金刚石晶种生长金刚石晶体的系统和方法。 溶剂循环(通过热对流和/或泵送),其中碳被加入到热腿中,转移到冷腿,在一些实施方案中,通过循环溶剂逐渐降低温度和碳浓度的范围,以及 沉积在逐渐降低的温度下的金刚石晶种上,因为当金刚石沉积时,碳浓度降低并且降低温度以保持溶剂变得过饱和。 溶剂包括在较低温度下具有低熔点和转移碳的金属或化合物。 控制器从位于系统中的各种传感器接收参数信号,处理这些信号,并通过向多个控制装置(例如,阀,加热器,冷却器,泵)输出必要的控制信号来优化金刚石沉积。
    • 75. 发明申请
    • Method and apparatus for controlling the growth process of a monocrystalline silicon ingot
    • 用于控制单晶硅锭生长过程的方法和装置
    • US20100319611A1
    • 2010-12-23
    • US12456552
    • 2009-06-18
    • Benno OrschelKeiichi Takanashi
    • Benno OrschelKeiichi Takanashi
    • C30B15/20
    • C30B29/06C30B15/26G01B11/08G06T7/12G06T2207/30148Y10T117/10Y10T117/1004Y10T117/1008
    • The present invention provides a method and apparatus for controlling the growth of a silicon ingot in which the diameter of the growing silicon ingot can be accurately measured. A camera captures an image of the interface ring between the growing silicon ingot and the silicon melt. An image processor extracts local intensity maxima from the captured image, which are then digitized into an image data which comprises attributes of the pixels forming the local intensity maxima. An analyzer statistically analyzes the image data to derive parameters of an equation statistically simulating the interface ring. A probabilistic filter conducts the statistical analysis on the equation in which the respective pixels are weighted by their weight factors. The weight factor functions to attenuate the effect of noises caused by pixels which do not represent the interface ring. The statistical analysis may be repeated, using the renewed parameters, to progressively attenuate the effect of the noises to thereby obtain a satisfactorily accurate diameter of the silicon ingot.
    • 本发明提供了一种用于控制硅锭生长的方法和装置,其中可以精确地测量生长的硅锭的直径。 相机捕获生长的硅锭和硅熔体之间的界面环的图像。 图像处理器从捕获的图像中提取局部强度最大值,然后数字化为包括形成局部强度最大值的像素的属性的图像数据。 分析仪统计分析图像数据,得出统计模拟界面环的方程式的参数。 概率滤波器对各个像素的权重因子加权的方程进行统计分析。 权重因子用于衰减由不表示接口环的像素引起的噪声的影响。 可以使用更新的参数重复统计分析来逐渐衰减噪声的影响,从而获得令人满意的硅锭的精确直径。
    • 76. 发明授权
    • Supporting apparatus for supporting a growing single crystal of semiconductor material, and process for producing a single crystal
    • 用于支撑日益增长的半导体材料单晶的支撑装置,以及用于制造单晶的工艺
    • US07815736B2
    • 2010-10-19
    • US11509408
    • 2006-08-24
    • Dieter Knerer
    • Dieter Knerer
    • C30B35/00C30B15/00
    • C30B15/30C30B29/06Y10S117/902Y10S117/911Y10T117/10Y10T117/1024Y10T117/1032Y10T117/1072
    • An apparatus for supporting a single crystal during Czochralski crystal pulling below a thickened crystal neck has lower bearing surface(s) with a central opening inscribable with a horizontal circle of diameter D1, centered on a vertical axis, the bearing surface(s) connected by connecting element(s) to minimally one securing element for securing to a crystal pulling lifting device, the connecting elements arranged to provide a clear-space in the region above the bearing surface(s) in which a circle of diameter D2 centered on the vertical axis (D2>D1) is inscribable over a length of the vertical axis. The unitary apparatus is useful for crystal ingot growth by immersion into the semiconductor melt prior to growth of a Dash neck and a thickening of the Dash neck. The apparatus is then raised to support the crystal by bearing against the bottom of the thickening.
    • 一种用于在Czochralski水晶拉伸加厚的水晶颈部之下支撑单晶的装置具有较低的支承表面,其中心开口具有可垂直于中心的直径为D1的水平圆形的中心开口,所述支承表面通过 连接元件到最小限度的一个固定元件,用于固定到提拉提升装置,连接元件布置成在支承表面上方的区域中提供透明空间,其中以直径为中心的直径为D2的圆 轴(D2> D1)可以在垂直轴的长度上刻录。 该单一设备可用于通过浸入半导体熔体中的晶锭生长,并在破裂颈部生长之前和Dash颈部增厚。 然后将装置升起以通过支承增厚件的底部来支撑晶体。