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    • 78. 发明申请
    • ACTIVE PIXEL SENSOR WITH NANOWIRE STRUCTURED PHOTODETECTORS
    • 主动像素传感器与纳米结构的光电转换器
    • US20130009040A1
    • 2013-01-10
    • US13543556
    • 2012-07-06
    • Young-June YUMunib Wober
    • Young-June YUMunib Wober
    • H01L27/00
    • H01L27/14612H01L27/1461H01L27/14625H01L27/14643H01L27/14645H01L31/0232H01L31/02327H01L31/0352H01L31/035227H01L31/03529H01L31/101H01L31/102H01L31/1126Y02E10/50
    • “An imaging device formed as an active pixel array combining a CMOS fabrication process and a nanowire fabrication process. The pixels in the array may include a single or multiple photogates surrounding the nanowire. The photogates control the potential profile in the nanowire, allowing accumulation of photo-generated charges in the nanowire and transfer of the charges for signal readout. Each pixel may include a readout circuit which may include a reset transistor, charge transfer switch transistor, source follower amplifier, and pixel select transistor. A nanowire is generally structured as a vertical rod on the bulk semiconductor substrate to receive light energy impinging onto the tip of the nanowire. The nanowire may be configured to function as either a photodetector or a waveguide configured to guild the light to the substrate. Light of different wavelengths can be detected using the imaging device.”
    • 一种形成为组合CMOS制造工艺和纳米线制造工艺的有源像素阵列的成像器件。 阵列中的像素可以包括围绕纳米线的单个或多个摄像机。 摄影门控制纳米线中的电位分布,允许在纳米线中积累光生电荷并传输电荷用于信号读出。 每个像素可以包括读出电路,其可以包括复位晶体管,电荷转移开关晶体管,源极跟随放大器和像素选择晶体管。 纳米线通常构造为在体半导体衬底上的垂直杆,以接收入射到纳米线尖端的光能。 纳米线可以被配置为用作被配置为将光引导到衬底的光电检测器或波导。 可以使用成像装置检测不同波长的光。