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    • 74. 发明申请
    • METHOD OF MANUFACTURING NEAR-FIELD LIGHT GENERATING ELEMENT AND METHOD OF MANUFACTURING HEAT-ASSISTED MAGNETIC RECORDING HEAD
    • 制造近场光产生元件的方法和制造热辅助磁记录头的方法
    • US20110210095A1
    • 2011-09-01
    • US12714998
    • 2010-03-01
    • Yoshitaka SasakiHiroyuki ItoShigeki TanemuraHironori Araki
    • Yoshitaka SasakiHiroyuki ItoShigeki TanemuraHironori Araki
    • G11B5/33B24B1/00
    • G11B5/314B24B37/048G11B5/3163G11B2005/0021
    • A near-field light generating element has an outer surface including first and second inclined surfaces and an edge part that connects the first and second inclined surfaces to each other. In a method of manufacturing the near-field light generating element, a polishing stopper layer is initially formed on a metal layer, and the polishing stopper layer and the metal layer are etched so that the metal layer is provided with the first inclined surface. Next, a coating layer is formed to cover the metal layer and the polishing stopper layer. The coating layer is made of a non-metallic inorganic material that has an etching rate lower than that of the metal layer in a second etching step to be performed later. Next, the coating layer is polished until the polishing stopper layer is exposed. Next, the second etching step is performed to etch the polishing stopper layer and the metal layer using the coating layer as the etching mask. This provides the metal layer with the second inclined surface and the edge part, and thereby makes the metal layer into the near-field light generating element.
    • 近场光产生元件具有包括第一和第二倾斜表面的外表面和将第一和第二倾斜表面彼此连接的边缘部分。 在制造近场光产生元件的方法中,最初在金属层上形成抛光阻挡层,并且蚀刻抛光阻挡层和金属层,使得金属层设置有第一倾斜表面。 接下来,形成涂覆层以覆盖金属层和抛光阻挡层。 在稍后执行的第二蚀刻步骤中,涂层由非金属无机材料制成,其蚀刻速率低于金属层的蚀刻速率。 接下来,抛光涂层直到抛光停止层露出。 接下来,进行第二蚀刻步骤,使用涂层作为蚀刻掩模来蚀刻抛光停止层和金属层。 由此,使金属层具有第二倾斜面和边缘部,由此使金属层成为近场光产生元件。
    • 75. 发明申请
    • Method of manufacturing magnetic head for perpendicular magnetic recording
    • 用于垂直磁记录的磁头制造方法
    • US20110147343A1
    • 2011-06-23
    • US12654548
    • 2009-12-23
    • Hironori ArakiYoshitaka SasakiHiroyuki ItoShigeki TanemuraJianing ZhouMin Li
    • Hironori ArakiYoshitaka SasakiHiroyuki ItoShigeki TanemuraJianing ZhouMin Li
    • G11B5/127
    • G11B5/1278G11B5/3116G11B5/3163
    • A magnetic head includes: a pole layer including a track width defining portion and a wide portion; and an accommodation layer disposed on a bottom forming layer and having a groove that accommodates the pole layer. The groove includes a first portion for accommodating at least part of the track width defining portion, and a second portion for accommodating at least part of the wide portion. A manufacturing method for the magnetic head includes the steps of; forming a groove defining layer on a nonmagnetic layer that is intended to later become the accommodation layer; forming a mask that covers an area of the nonmagnetic layer where to form the first portion of the groove; etching the nonmagnetic layer so that the second portion of the groove is formed in the nonmagnetic layer; removing the mask; and taper-etching the nonmagnetic layer so that the first portion of the groove is formed in the nonmagnetic layer and the groove is thereby completed.
    • 磁头包括:包括轨道宽度限定部分和宽部分的极层; 以及容纳层,其设置在底部形成层上并具有容纳极层的槽。 凹槽包括用于容纳轨道宽度限定部分的至少一部分的第一部分和用于容纳至少部分宽部分的第二部分。 磁头的制造方法包括以下步骤: 在非磁性层上形成凹槽限定层,所述非磁性层旨在稍后成为所述容纳层; 形成覆盖形成所述槽的第一部分的非磁性层的区域的掩模; 蚀刻非磁性层,使得凹槽的第二部分形成在非磁性层中; 去除面膜; 并且对非磁性层进行锥形蚀刻,使得凹槽的第一部分形成在非磁性层中,从而完成凹槽。
    • 77. 发明申请
    • Heat-assisted magnetic recording head with laser diode fixed to slider
    • 带激光二极管的热辅助磁记录头固定在滑块上
    • US20110013497A1
    • 2011-01-20
    • US12458546
    • 2009-07-15
    • Yoshitaka SasakiHiroyuki ItoShigeki TanemuraHironori Araki
    • Yoshitaka SasakiHiroyuki ItoShigeki TanemuraHironori Araki
    • G11B11/00G11B5/02
    • G11B5/314G11B5/4866G11B2005/001G11B2005/0021
    • A heat-assisted magnetic recording head includes a slider, an edge-emitting laser diode fixed to the slider, and an external mirror provided outside the slider. The slider includes a magnetic pole, a waveguide, a near-field light generating element, and a substrate. The substrate has a top surface facing toward the magnetic pole, the near-field light generating element and the waveguide. The slider has a top surface that lies above the top surface of the substrate, at an end of the slider farther from the top surface of the substrate. The laser diode includes: an active layer; an emitting end face that lies at an end in a direction parallel to the plane of the active layer and includes an emission part for emitting laser light; and a bottom surface that lies at an end in a direction perpendicular to the plane of the active layer. The laser diode is arranged so that the bottom surface faces the top surface of the slider. The external mirror reflects the laser light emitted from the emission part toward the waveguide.
    • 热辅助磁记录头包括滑块,固定到滑块的边缘发射激光二极管和设置在滑块外部的外反射镜。 滑块包括磁极,波导,近场光产生元件和基板。 基板具有面向磁极的顶表面,近场光产生元件和波导。 滑块具有位于基板顶表面上方的顶表面,在滑块的距基板顶表面更远的一端。 激光二极管包括:有源层; 位于与有源层的平面平行的方向上的端部的发射端面,并且包括用于发射激光的发射部分; 以及位于与有源层的平面垂直的方向上的端部的底表面。 激光二极管被布置成使得底表面面向滑块的顶表面。 外部反射镜将从发射部分发射的激光朝向波导反射。