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    • 73. 发明申请
    • Network analyzer, network analyzing method, program, and recording medium
    • 网络分析仪,网络分析方法,程序和记录介质
    • US20070143051A1
    • 2007-06-21
    • US10598201
    • 2005-02-10
    • Yoshikazu NakayamaTakeshi Tanabe
    • Yoshikazu NakayamaTakeshi Tanabe
    • G06F19/00
    • G01R35/005G01R27/28
    • Errors of a measuring system are corrected by acquiring the phases of transmission tracking errors. A network analyzer includes a measuring system error factor recording unit which records measuring system error factors generated independently of frequency conversion carried out by a DUT, and an error factor acquiring unit which measures first coefficients and second coefficients of a correction mixer where a signal output from a terminal is a sum of a product of a signal input to the terminal and the first coefficient, and a product of a signal input to the other terminal and the second coefficient, and the ratio of magnitudes of the second coefficients is constant, and acquires the transmission tracking errors caused by the frequency conversion based on the measuring system error factors recorded in the measuring system error factor recording unit, the first coefficients, and the second coefficients.
    • 通过获取传输跟踪误差的相位来校正测量系统的错误。 网络分析器包括测量系统误差因子记录单元,其记录独立于DUT进行的频率转换的测量系统误差因子,以及误差因子获取单元,其测量校正混合器的第一系数和第二系数,其中从 终端是输入到终端的信号与第一系数的乘积的和,以及输入到另一个终端的信号与第二系数的乘积,并且第二系数的大小的比率是恒定的,并且获取 基于记录在测量系统误差因子记录单元中的测量系统误差因子的频率变换引起的传输跟踪误差,第一系数和第二系数。
    • 75. 发明申请
    • Power supply device, method, program, recording medium, network analyzer, and spectrum analyzer
    • 电源装置,方法,程序,记录介质,网络分析仪和频谱分析仪
    • US20050289392A1
    • 2005-12-29
    • US10536436
    • 2003-11-19
    • Masato HarutaYoshikazu Nakayama
    • Masato HarutaYoshikazu Nakayama
    • G01R27/28G01R35/00H03G3/20H03G3/30G06F11/00
    • G01R31/2841G01R27/28G01R35/005H03G3/30
    • It is possible to apply a correct power to a load even when the output impedance and a load impedance of a signal source are different from a characteristic impedance of a transmission line. The power applied to the load can be expressed by a measurement system error factor, a load coefficient X of the load, and an S parameter of the input signal R. Accordingly, a target input signal decision can decide a target value of the S parameter of the input signal R according to the power desired to be applied to the load, the measurement system error factor, and the load coefficient X of the load. Furthermore, an input signal level control section controls the input signal level so that the S parameter of the input signal R has this target value. This is performed by changing the amplification ratio of an amplification ratio variable amplifier. Thus, it is possible to apply a desired power to the load not depending on whether the impedance is matched or not.
    • 即使当信号源的输出阻抗和负载阻抗与传输线的特性阻抗不同时,也可以向负载施加正确的电力。 施加到负载的功率可以由测量系统误差因子,负载的负载系数X和输入信号R的S参数表示。因此,目标输入信号判定可以决定S参数的目标值 的输入信号R根据期望施加到负载的功率,测量系统误差因子和负载的负载系数X. 此外,输入信号电平控制部分控制输入信号电平,使得输入信号R的S参数具有该目标值。 这是通过改变放大倍率可变放大器的放大率来进行的。 因此,可以不依赖于阻抗是否匹配而对负载施加期望的功率。
    • 76. 发明授权
    • Substrate inspection using the propagation characteristics of RF electromagnetic waves
    • 使用射频电磁波传播特性的基板检查
    • US06320401B1
    • 2001-11-20
    • US09327672
    • 1999-06-08
    • Yoshimi SugimotoYoshikazu NakayamaMasao Watanabe
    • Yoshimi SugimotoYoshikazu NakayamaMasao Watanabe
    • G01N2202
    • G01N22/00
    • A substrate inspection device successively stacks a first electrode plate, a standard substrate, a second electrode plate, a sample substrate, and a third electrode plate, in that order, with the sample substrate and the standard substrate placed in symmetrical opposition. A network analyzer both measures the propagation characteristics of RF electromagnetic waves from the second electrode plate to the first electrode plate as standard characteristics and measures the propagation characteristics of RF electromagnetic waves from the second electrode plate to the third electrode plate as the test characteristics. The quality of the sample substrate can be determined by comparing the measured standard characteristics with the test characteristics, thereby enabling, for example, the simple detection of defects inside a multilayer sample substrate.
    • 基板检查装置依次堆叠第一电极板,标准基板,第二电极板,样品基板和第三电极板,其中样品基板和标准基板以对称的方式放置。 网络分析仪测量作为标准特性的从第二电极板到第一电极板的RF电磁波的传播特性,并且测量从第二电极板到第三电极板的RF电磁波的传播特性作为测试特性。 可以通过将测量的标准特性与测试特性进行比较来确定样品基底的质量,从而能够例如简单地检测多层样品基底内的缺陷。