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    • 71. 发明授权
    • Chamber material made of Al alloy and heater block
    • 室内材料由铝合金和加热块组成
    • US06521046B2
    • 2003-02-18
    • US09773638
    • 2001-02-02
    • Toshiyuki TanakaKoji WadaJun HisamotoHiroki SawadaHiroshi Matsuura
    • Toshiyuki TanakaKoji WadaJun HisamotoHiroki SawadaHiroshi Matsuura
    • C23C1600
    • H01J37/32467
    • A chamber material made of Al alloy excellent in thermal cracking resistance and chemical and/or physical corrosion resistance and capable of reducing contamination excellently and further having excellent and wide applicable brazing property in a high temperature corrosive circumstance, in which the substrate aluminum material for the chamber material made of Al alloy having an anodized film comprises 0.1 to 2.0% Si, 0.1 to 3.5% Mg, 0.02 to 4.0% Cu on the mass% basis and the balance of Al and impurity element with Cr in the impurity elements being less than 0.04%. Preferably, Fe is 0.1% or less and Mn is 0.04% or less in the impurity element and, further, the total sum of impurity elements other than Cr and Mn being restricted to 0.1% or less. This invention can be utilized suitably to various materials used in high temperature corrosive circumstance, particularly, in high temperature corrosive gas or plasma atmosphere.
    • 由耐热龟裂性,耐化学腐蚀性和/或物理耐腐蚀性优异并且能够在高温腐蚀环境中具有优异且广泛适用的钎焊性能的,能够优异地降低污染的Al合金制的腔室材料,其中用于 具有阳极氧化膜的Al合金制成的室内材料以质量%计含有0.1〜2.0%的Si,0.1〜3.5%的Mg,0.02〜4.0%的Cu,余量的Al和杂质元素的杂质元素的Cr少于 0.04%。 优选的是,在杂质元素中,Fe为0.1%以下,Mn为0.04%以下,Cr,Mn以外的杂质元素的总和为0.1%以下。 本发明可以适用于高温腐蚀性环境中使用的各种材料,特别是在高温腐蚀性气体或等离子体气氛中。
    • 72. 发明授权
    • Object discharge mechanism
    • 物体排放机制
    • US5755551A
    • 1998-05-26
    • US699987
    • 1996-08-20
    • Yutaka SaekiHiroki SawadaIchiro IwasakaKenichi Yamashita
    • Yutaka SaekiHiroki SawadaIchiro IwasakaKenichi Yamashita
    • B65G1/137B65G47/08B65G59/06B65G56/09
    • B65G59/068
    • An object discharge mechanism for discharging a bottommost object from a stack of objects includes a bottom platform on which the bottommost object of the stack of objects rests. The platform has a longitudinal slot running along the object discharge direction. The upper portion of a belt, stretched between two vertically mounted pulleys, runs through the longitudinal slot parallel to the upper surface of the bottom platform. Discharge projections are mounted periodically on an outer surface of the belt. The discharge projections push objects across the bottom platform in the object discharge direction when the belt is rotated. The object discharge mechanism also includes a lifting member for lifting all objects above the bottommost object in the stack of objects. The lifting member reduces the frictional force created by the weight of the stack of objects on the bottommost object during discharge of the bottommost object.
    • 用于从物体堆放出最下面的物体的物体排出机构包括底部平台,物体堆叠的最下面的物体停靠在底部平台上。 平台具有沿物体排出方向延伸的纵向槽。 在两个垂直安装的滑轮之间延伸的带的上部穿过平行于底部平台的上表面的纵向狭槽。 放电突起周期性地安装在带的外表面上。 当皮带旋转时,排出突起在物体排放方向上推动物体穿过底部平台。 物体排放机构还包括用于提升物体堆叠中最底部物体上方的所有物体的提升构件。 提升构件在最下面的物体排放期间降低由最下面的物体上的物体堆的重量产生的摩擦力。