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    • 77. 发明授权
    • Method for manufacturing magneto-resistive random access memory
    • 制造磁阻随机存取存储器的方法
    • US07220599B2
    • 2007-05-22
    • US10950584
    • 2004-09-28
    • Wan-jun ParkTaek-dong LeeByeong-kook ParkTae-wan KimI-hun SongSang-jin Park
    • Wan-jun ParkTaek-dong LeeByeong-kook ParkTae-wan KimI-hun SongSang-jin Park
    • H01L21/00H01L29/76
    • H01L27/228B82Y10/00
    • A magneto-resistive random access memory includes a MOS transistor having a first gate and source and drain junctions on a substrate, a lower electrode connected to the source junction, a first magnetic layer on the lower electrode, a dielectric barrier layer including aluminum and hafnium on the first magnetic layer which, together with the first magnetic layer, form a potential well, a second magnetic layer on the dielectric barrier layer opposite the first magnetic layer, an upper electrode on the second magnetic layer, a second gate interposed between the first gate and the lower electrode to control the magnetic data of one of the first and second magnetic layers, and a bit line positioned orthogonal to the first gate and electrically connected to the upper electrode. Improved characteristics of the barrier layer increase a magnetic resistance ratio and improve data storage capacity of the magneto-resistive random access memory.
    • 磁阻随机存取存储器包括MOS晶体管,其具有第一栅极和衬底上的源极和漏极结,连接到源极结的下部电极,下部电极上的第一磁性层,包括铝和铪的介电阻挡层 在与第一磁性层一起形成势阱的第一磁性层上,与第一磁性层相对的介电阻挡层上的第二磁性层,第二磁性层上的上部电极,位于第一磁性层之间的第二栅极 栅极和下部电极,以控制第一和第二磁性层之一的磁性数据,以及与第一栅极正交并电连接到上部电极的位线。 阻挡层的改进的特性提高了磁阻比并提高了磁阻随机存取存储器的数据存储容量。
    • 78. 发明申请
    • Reflection mask for EUV photolithography and method of fabricating the reflection mask
    • 用于EUV光刻的反射掩模和制造反射掩模的方法
    • US20060281017A1
    • 2006-12-14
    • US11441835
    • 2006-05-26
    • Suk-pil KimI-hun SongYoung-Soo ParkSeung-hyuk ChangHoon Kim
    • Suk-pil KimI-hun SongYoung-Soo ParkSeung-hyuk ChangHoon Kim
    • G21K5/00G03F1/00
    • G21K1/062B82Y10/00B82Y40/00G03F1/24
    • A reflection mask for extreme ultraviolet (EUV) photolithography and a method of fabricating the same, in which the reflection mask includes a substrate, a lower reflection layer formed in a multi-layer structure on the substrate and including a material reflecting EUV light, an upper reflection layer formed in a multi-layer structure on the lower reflection layer and reflecting EUV light, and a phase reversing layer formed between the lower reflection layer and the upper reflection layer in a certain pattern and causing destructive interference between reflection light from the upper reflection layer and reflection light from the lower reflection layer. An incidence of a shadow effect can be reduced and unnecessary EUV light can be eliminated, so that a pattern on the reflection mask can be projected precisely on a silicon wafer. Since the phase reversing layer includes the same material as the reflection layer and an absorption layer, mask fabrication processes can be handled easily.
    • 一种用于极紫外(EUV)光刻的反射掩模及其制造方法,其中反射掩模包括基板,在基板上形成为多层结构的下反射层,并且包括反射EUV光的材料, 在下反射层上形成多层结构并反射EUV光的上反射层和以一定图案形成在下反射层和上反射层之间的相位反转层,并且产生来自上层的反射光之间的相消干涉 反射层和来自下反射层的反射光。 可以减少阴影效应的入射,并且可以消除不必要的EUV光,使得反射掩模上的图案可以精确地投影在硅晶片上。 由于相位反转层包括与反射层和吸收层相同的材料,因此可以容易地处理掩模制造工艺。