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    • 71. 发明申请
    • Plasma Processing Apparatus And Plasma Processing Method
    • 等离子体处理装置和等离子体处理方法
    • US20090194506A1
    • 2009-08-06
    • US12420370
    • 2009-04-08
    • Hitoshi TamuraNaoki YasuiSeiichi Watanabe
    • Hitoshi TamuraNaoki YasuiSeiichi Watanabe
    • B44C1/22
    • H01L21/6833H01J37/32706
    • The invention provides a plasma processing apparatus and a plasma processing method capable of controlling the voltage of the processing substrate with high accuracy, thereby enabling a highly accurate plasma processing. According to the invention, a voltage of the processing substrate is measured using a processing substrate with a voltage probe prepared in advance, and based on a bias voltage supplied to an electrostatic chuck mechanism and a bias current flowing through the electrostatic chuck mechanism, a capacity component which is an impedance representing the electric property of the electrostatic chuck mechanism is computed numerically. Then, based on a predetermined expression, the voltage of the processing substrate is estimated using the bias voltage of the processing substrate to be measured, the bias current flowing through the electrostatic chuck mechanism and the capacity component which is the impedance acquired in advance.
    • 本发明提供一种能够高精度地控制处理基板的电压的等离子体处理装置和等离子体处理方法,能够进行高精度的等离子体处理。 根据本发明,使用具有预先制备的电压探针的处理基板来测量处理基板的电压,并且基于提供给静电卡盘机构的偏置电压和流过静电卡盘机构的偏置电流, 数字地计算作为表示静电卡盘机构的电特性的阻抗的分量。 然后,基于预定表达式,使用待测量的处理基板的偏置电压,流过静电卡盘机构的偏置电流和预先获取的阻抗的电容分量来估计处理基板的电压。
    • 72. 发明授权
    • Mold
    • 模子
    • US07381047B2
    • 2008-06-03
    • US11581447
    • 2006-10-17
    • Noriko EihaSeiichi Watanabe
    • Noriko EihaSeiichi Watanabe
    • B29C45/26B29C33/30
    • B29C45/56B29L2011/0016Y10S425/808
    • A mold capable of preventing deterioration of the mold even when a material for spherical members is harder than that for the mold, and capable of aligning the center axis between an insert member and a body member thereof with high accuracy even when a pressure of resin filling is applied. The mold has an insert member with a cavity surface, and a body member for supporting the insert member from outside via a plurality of spherical members. Tubular liners harder than the spherical members are provided between the body member and the spherical members and between the insert member and the spherical members.
    • 即使当球形构件的材料比模具的硬度更硬时,也能够高精度地对准插入构件和主体构件之间的中心轴,即使当树脂填充物的压力 被申请;被应用。 模具具有带有空腔表面的插入件,以及用于经由多个球形构件从外部支撑插入件的本体构件。 在本体部件与球形部件之间以及插入部件和球形部件之间设置有比球形部件更硬的管状衬垫。
    • 76. 发明申请
    • Mold
    • 模子
    • US20070087068A1
    • 2007-04-19
    • US11581447
    • 2006-10-17
    • Noriko EihaSeiichi Watanabe
    • Noriko EihaSeiichi Watanabe
    • B29C45/84
    • B29C45/56B29L2011/0016Y10S425/808
    • A mold capable of preventing deterioration of the mold even when a material for spherical members is harder than that for the mold, and capable of aligning the center axis between an insert member and a body member thereof with high accuracy even when a pressure of resin filling is applied. The mold has an insert member with a cavity surface, and a body member for supporting the insert member from outside via a plurality of spherical members. Tubular liners harder than the spherical members are provided between the body member and the spherical members and between the insert member and the spherical members.
    • 即使当球形构件的材料比模具的硬度更硬时,也能够高精度地对准插入构件和主体构件之间的中心轴,即使当树脂填充物的压力 被申请;被应用。 模具具有带有空腔表面的插入件,以及用于经由多个球形构件从外部支撑插入件的本体构件。 在本体部件与球形部件之间以及插入部件和球形部件之间设置有比球形部件更硬的管状衬垫。