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71. 发明授权

US08295003B2 Thermal assisted head using curved wave guide 有权
标题翻译：热辅助头使用弯曲波导
公开(公告)号：US08295003B2
公开(公告)日：2012-10-23
申请号：US12786915
申请日：2010-05-25
申请人： Tsutomu Chou , Seiichi Takayama , Eiji Komura
发明人： Tsutomu Chou , Seiichi Takayama , Eiji Komura
IPC分类号： G11B5/02 , G02B6/26 , G02B6/42 , G02B6/10
CPC分类号： G11B5/314 , G02B6/107 , G11B5/6088 , G11B2005/001 , G11B2005/0021
摘要： A curved waveguide is a curved waveguide that propagates laser light entering from the laser diode as propagating light. The curved waveguide includes a core that is curved in one direction where the propagating light can be propagated and that includes outer surfaces along a propagating direction of the propagating light defined by four surfaces including first and second planar surfaces that curve in respective planar surfaces and that are positioned to face each other, and inside and outside curved surfaces that connect the first and second planar surfaces: an outside metal cladding that is positioned in a direction orthogonal to an oscillation direction of an electric field of the propagating light in a cross section orthogonal to the propagating direction of the propagating light and along the outside curved surface of the core, that is made of gold, silver, copper or aluminum, or that is primarily composed of one component of these materials; and a cladding layer that covers the first and second planar surfaces and the outside metal clad.
摘要翻译：弯曲波导是将从激光二极管进入的激光传播成传播光的弯曲波导。弯曲波导包括在传播光可以传播的一个方向上弯曲的芯，并且包括沿着由四个表面限定的传播光的传播方向的外表面，该四个表面包括在相应的平面中曲线的第一和第二平面表面，并且定位成彼此面对，以及连接第一和第二平面的内表面和外表面：外侧金属包层，其在与正交于横截面正交的传播光的电场的振荡方向正交的方向上传播光的传播方向和沿金属，银，铜或铝制成的芯的外部弯曲表面，或主要由这些材料的一种组分组成; 以及覆盖第一和第二平坦表面和外部金属包层的包覆层。

72. 发明授权

US08075730B2 Apparatus for manufacturing a semiconductor device 有权
标题翻译：用于制造半导体器件的装置
公开(公告)号：US08075730B2
公开(公告)日：2011-12-13
申请号：US11631387
申请日：2005-06-29
申请人： Satoru Shimura , Kazuhiro Kubota , Ryuichi Asako , Seiichi Takayama
发明人： Satoru Shimura , Kazuhiro Kubota , Ryuichi Asako , Seiichi Takayama
IPC分类号： C23F1/00 , H01L21/306 , C23C16/00
CPC分类号： H01L21/76831 , H01L21/02063 , H01L21/31058 , H01L21/31116 , H01L21/31138 , H01L21/67167 , H01L21/67178 , H01L21/67207 , H01L21/76808 , H01L21/76811 , H01L21/76814 , H01L21/76826
摘要： In a semiconductor device manufacturing method, an etching mask (75b) having a predetermined opening pattern is formed on an etching target film (74) disposed on a target object. Then, an etching process is performed on the etching target film (74) through the opening pattern of the etching mask (75b) within a first process chamber, thereby forming a groove or hole (78a) in the etching target film. Then, the target object treated by the etching process is transferred from the first process chamber to a second process chamber, within a vacuum atmosphere. Then, a silylation process is performed on a side surface of the groove or hole (78a), which is an exposed portion of the etching target film (74), within the second process chamber.
摘要翻译：在半导体器件制造方法中，在设置在目标物体上的蚀刻靶膜（74）上形成具有规定的开口图案的蚀刻掩模（75b）。然后，通过第一处理室内的蚀刻掩模（75b）的开口图案对蚀刻目标膜（74）进行蚀刻处理，从而在蚀刻目标膜中形成凹槽或孔（78a）。然后，通过蚀刻处理处理的目标物体在真空气氛中从第一处理室转移到第二处理室。然后，在第二处理室内，作为蚀刻对象膜（74）的露出部的槽（78a）的侧面进行甲硅烷化处理。

73. 发明申请

US20110292772A1 THERMAL ASSISTED HEAD USING CURVED WAVE GUIDE 有权
标题翻译：热辅助头使用弯曲波导
公开(公告)号：US20110292772A1
公开(公告)日：2011-12-01
申请号：US12786915
申请日：2010-05-25
申请人： Tsutomu Chou , Seiichi Takayama , Eiji Komura
发明人： Tsutomu Chou , Seiichi Takayama , Eiji Komura
IPC分类号： G11B11/00 , G02B6/036
CPC分类号： G11B5/314 , G02B6/107 , G11B5/6088 , G11B2005/001 , G11B2005/0021
摘要： A curved waveguide is a curved waveguide that propagates laser light entering from the laser diode as propagating light. The curved waveguide includes a core that is curved in one direction where the propagating light can be propagated and that includes outer surfaces along a propagating direction of the propagating light defined by four surfaces including first and second planar surfaces that curve in respective planar surfaces and that are positioned to face each other, and inside and outside curved surfaces that connect the first and second planar surfaces: an outside metal cladding that is positioned in a direction orthogonal to an oscillation direction of an electric field of the propagating light in a cross section orthogonal to the propagating direction of the propagating light and along the outside curved surface of the core, that is made of gold, silver, copper or aluminum, or that is primarily composed of one component of these materials; and a cladding layer that covers the first and second planar surfaces and the outside metal clad.
摘要翻译：弯曲波导是将从激光二极管进入的激光传播成传播光的弯曲波导。弯曲波导包括在传播光可以传播的一个方向上弯曲的芯，并且包括沿着由四个表面限定的传播光的传播方向的外表面，该四个表面包括在相应的平面中曲线的第一和第二平面表面，并且定位成彼此面对，以及连接第一和第二平面的内表面和外表面：外侧金属包层，其在与正交于横截面正交的传播光的电场的振荡方向正交的方向上传播光的传播方向和沿金属，银，铜或铝制成的芯的外部弯曲表面，或主要由这些材料的一种组分组成; 以及覆盖第一和第二平坦表面和外部金属包层的包覆层。

74. 发明授权

US07912335B2 Two-dimensional photonic crystal and optical device using the same 有权
标题翻译：二维光子晶体和光学器件使用相同
公开(公告)号：US07912335B2
公开(公告)日：2011-03-22
申请号：US11794192
申请日：2005-12-28
申请人： Susumu Noda , Takashi Asano , Seiichi Takayama
发明人： Susumu Noda , Takashi Asano , Seiichi Takayama
IPC分类号： G02B6/10
CPC分类号： B82Y20/00 , G02B6/12007 , G02B6/1225
摘要： An object of the present invention is to provide a two-dimensional photonic crystal in which conditions for both the TE-polarized light and the TM-polarized light can be easily satisfied. A body includes a first area having a triangular lattice pattern arrangement of a circular hole and a second area having a triangular lattice pattern arrangement of an equilateral triangular holes. Therefore, the TE-PBG which is a photonic band gap (PBG) for the TE-polarized light is created in the first area, and the TM-PBG which is a PBG for the TM-polarized light is created in the second area. Parameters such as the period and size of the holes can be independently set for the first area and the second area, so that an energy region common to the TE-PBG and the TM-PBG (i.e. absolute PBG) can be made larger and easily created. Forming a waveguide and resonators and or the like corresponding to an energy within the absolute PBG allows formation of a polarized light multiplexer/demultiplexer and a frequency (wavelength) multiplexer/demultiplexer without depending on polarized light or the like.
摘要翻译：本发明的目的是提供二维光子晶体，其中可以容易地满足TE偏振光和TM偏振光两者的条件。主体包括具有圆形孔的三角形格子图案布置的第一区域和具有等边三角形孔的三角形格子图案布置的第二区域。因此，在第一区域中产生作为TE偏振光的光子带隙（PBG）的TE-PBG，在第二区域中产生作为TM偏振光的PBG的TM-PBG。诸如孔的周期和尺寸的参数可以独立地设置为第一区域和第二区域，使得TE-PBG和TM-PBG（即绝对PBG）共有的能量区域可以变得更大和容易创建。对应于绝对PBG内的能量的波导和谐振器等形成偏振光多路复用器/解复用器和频率（波长）复用器/解复用器，而不依赖于偏振光等。

75. 发明授权

US07509013B2 Two-dimensional photonic crystal 有权
标题翻译：二维光子晶体
公开(公告)号：US07509013B2
公开(公告)日：2009-03-24
申请号：US11795991
申请日：2006-01-31
申请人： Susumu Noda , Takashi Asano , Seiichi Takayama , Ranko Hatsuda
发明人： Susumu Noda , Takashi Asano , Seiichi Takayama , Ranko Hatsuda
IPC分类号： G02B6/10
CPC分类号： B82Y20/00 , G02B6/1225
摘要： An objective of the present invention is to provide a two-dimensional photonic crystal in which a complete photonic band gap (PBG), i.e. a photonic band gap that is effective for both a TE-polarized light and a TM-polarized light within a predetermined wavelength range, is created and an adequate width of the complete PBG can be ensured. A slab-shaped body 21 consisting of a birefringent material is provided with holes 22 periodically arranged in a triangular lattice pattern, where a plane shape of the hole is an equilateral triangle. The PBG for the TE-polarized light and the PBG for the TM-polarized light can be independently set by adjusting anisotropy in the refractive index of the body 21, i.e. a refractive index in a direction vertical to the body 21 and a refractive index in a direction parallel to the body 21. This construction makes it possible to ensure an adequate width of the complete PBG.
摘要翻译：本发明的目的是提供一种二维光子晶体，其中完整的光子带隙（PBG），即对预定的TE偏振光和TM偏振光两者都有效的光子带隙波长范围，并且可以确保完整PBG的足够宽度。由双折射材料构成的板状体21设置有以三角形格子图案周期性排列的孔22，孔的平面形状为等边三角形。用于TE偏振光的PBG和用于TM偏振光的PBG可以通过调节主体21的折射率的各向异性，即垂直于主体21的方向上的折射率和折射率，独立地设定平行于主体21的方向。这种结构使得可以确保完整的PBG的宽度。

76. 发明申请

US20080124037A1 Two-Dimensional Photonic Crystal And Optical Device Using The Same 有权
标题翻译：二维光子晶体和使用它的光学器件
公开(公告)号：US20080124037A1
公开(公告)日：2008-05-29
申请号：US11794192
申请日：2005-12-28
申请人： Susumu Noda , Takashi Asano , Seiichi Takayama
发明人： Susumu Noda , Takashi Asano , Seiichi Takayama
IPC分类号： G02B6/10
CPC分类号： B82Y20/00 , G02B6/12007 , G02B6/1225
摘要： An object of the present invention is to provide a two-dimensional photonic crystal in which conditions for both the TE-polarized light and the TM-polarized light can be easily satisfied. A body includes a first area having a triangular lattice pattern arrangement of a circular hole and a second area having a triangular lattice pattern arrangement of an equilateral triangular holes. Therefore, the TE-PBG which is a photonic band gap (PBG) for the TE-polarized light is created in the first area, and the TM-PBG which is a PBG for the TM-polarized light is created in the second area. Parameters such as the period and size of the holes can be independently set for the first area and the second area, so that an energy region common to the TE-PBG and the TM-PBG (i.e. absolute PBG) can be made larger and easily created. Forming a waveguide and resonators and or the like corresponding to an energy within the absolute PBG allows formation of a polarized light multiplexer/demultiplexer and a frequency (wavelength) multiplexer/demultiplexer without depending on polarized light or the like.
摘要翻译：本发明的目的是提供二维光子晶体，其中可以容易地满足TE偏振光和TM偏振光两者的条件。主体包括具有圆形孔的三角形格子图案布置的第一区域和具有等边三角形孔的三角形格子图案布置的第二区域。因此，在第一区域中产生作为TE偏振光的光子带隙（PBG）的TE-PBG，在第二区域中产生作为TM偏振光的PBG的TM-PBG。诸如孔的周期和尺寸的参数可以独立地设置为第一区域和第二区域，使得TE-PBG和TM-PBG（即绝对PBG）共有的能量区域可以更大和容易地创建。对应于绝对PBG内的能量的波导和谐振器等形成偏振光多路复用器/解复用器和频率（波长）复用器/解复用器，而不依赖于偏振光等。

77. 发明申请

US20080057728A1 Process For Fabricating Semiconductor Device 有权
标题翻译：制造半导体器件的工艺
公开(公告)号：US20080057728A1
公开(公告)日：2008-03-06
申请号：US11631387
申请日：2005-06-29
申请人： Satoru Shimura , Kazuhiro Kubota , Ryuichi Asako , Seiichi Takayama
发明人： Satoru Shimura , Kazuhiro Kubota , Ryuichi Asako , Seiichi Takayama
IPC分类号： H01L21/461
CPC分类号： H01L21/76831 , H01L21/02063 , H01L21/31058 , H01L21/31116 , H01L21/31138 , H01L21/67167 , H01L21/67178 , H01L21/67207 , H01L21/76808 , H01L21/76811 , H01L21/76814 , H01L21/76826
摘要： In a semiconductor device manufacturing method, an etching mask (75b) having a predetermined opening pattern is formed on an etching target film (74) disposed on a target object. Then, an etching process is performed on the etching target film (74) through the opening pattern of the etching mask (75b) within a first process chamber, thereby forming a groove or hole (78a) in the etching target film. Then, the target object treated by the etching process is transferred from the first process chamber to a second process chamber, within a vacuum atmosphere. Then, a silylation process is performed on a side surface of the groove or hole (78a), which is an exposed portion of the etching target film (74), within the second process chamber.
摘要翻译：在半导体器件制造方法中，在设置在目标物体上的蚀刻靶膜（74）上形成具有规定的开口图案的蚀刻掩模（75b）。然后，通过第一处理室内的蚀刻掩模（75b）的开口图案对蚀刻目标膜（74）进行蚀刻处理，从而在蚀刻目标膜中形成凹槽或孔（78a）。然后，通过蚀刻处理处理的目标物体在真空气氛中从第一处理室转移到第二处理室。然后，在作为第二处理室内的蚀刻对象膜（74）的露出部分的槽或孔（78a）的侧面上进行甲硅烷化处理。

78. 发明申请

US20080002931A1 Two-Dimensional Photonic Crystal and Optical Function Element Using the Same 有权
标题翻译：二维光子晶体和使用它的光学功能元件
公开(公告)号：US20080002931A1
公开(公告)日：2008-01-03
申请号：US11794121
申请日：2005-12-28
申请人： Susumu Noda , Takashi Asano , Bong-Shik Song , Seiichi Takayama
发明人： Susumu Noda , Takashi Asano , Bong-Shik Song , Seiichi Takayama
IPC分类号： G02B6/26
CPC分类号： G02F1/313 , B82Y20/00 , G02B6/1225 , G02F2202/32
摘要： An object of the present invention is to provide a two-dimensional photonic crystal which can be used for optical path changeover switches or the like to allow switching of a path. A first area 121 and a second area 122 provided with holes 131 and 132 having a different in the period and size are created on a body 11, and a main waveguide 15 is formed to obliquely cross a boundary 14 between these areas. A branch waveguide 17 branched from the main waveguide 15 into the first area 121 side is also formed by using a crossing point between the main waveguide 15 and the boundary 14 as a starting point. The second area 122 is heated to change a refractive index of the body within the area, so that a frequency band which can be passed through the main waveguide 15 of the second area 122 is changed. Light having a specific frequency and propagated through the main waveguide 15 from the first area 121 side is switched to be extracted from the main waveguide 15 on the second area 122 side or to be extracted from the branch waveguide 17 without propagating the main waveguide 15 on the second area 122, in response to whether or not the heating is performed.
摘要翻译：本发明的目的是提供一种二维光子晶体，其可以用于光路切换开关等，以允许路径的切换。在主体11上形成有具有周期和尺寸不同的孔131和132的第一区域121和第二区域122，并且主波导15形成为在这些区域之间倾斜地跨越边界14。从主波导15分支到第一区域121侧的分支波导管17也通过以主波导15和边界14之间的交叉点为起点形成。第二区域122被加热以改变该区域内的物体的折射率，使得能够通过第二区域122的主波导15的频带发生变化。具有特定频率并且从第一区域121侧通过主波导15传播的光被切换为从第二区域122侧的主波导15中提取或者从分支波导17提取而不将主波导15传播响应于是否执行加热，第二区域122。

79. 发明授权

US06747782B2 Faraday rotator and optical attenuator 失效
标题翻译：法拉第旋转器和光衰减器
公开(公告)号：US06747782B2
公开(公告)日：2004-06-08
申请号：US10130740
申请日：2002-05-21
申请人： Masanori Goto , Shinji Iwatsuka , Seiichi Takayama
发明人： Masanori Goto , Shinji Iwatsuka , Seiichi Takayama
IPC分类号： G02F109
CPC分类号： G02F1/093 , G02F2203/48
摘要： A Faraday rotator and an optical attenuator using the Faraday rotator in which both a fixed magnetic field parallel to and a valuable magnetic field perpendicular to the optical axis are applied to Faraday elements, said optical axis being in the direction of single crystal of garnet, characterized in that three single crystals of garnet of substantially the same thickness having the Faraday effect are used to form Faraday elements and the Faraday elements are arranged in such a manner that a variable magnetic field is applied to one of the Faraday elements, over a range extending 5 deg. each to the left and right of the line connecting the (111) plane in the center of the stereographic projection chart with the (−1−12) plane on the outermost circumference or a plane equivalent thereto in the chart, whereas a variable magnetic field is applied to the remaining two elements, over a range extending 5 deg. each to the left and right of the line connecting the (111) plane in the center of the stereographic projection chart with the (−101) plane on the outermost circumference or a plane equivalent thereto in the chart. Temperature dependence of optical decay thus is improved. Also, positioning means for Faraday rotator improves the polarization dependence loss.
摘要翻译：使用法拉第旋转器的法拉第旋转器和光衰减器，其中平行于和垂直于光轴的有价值磁场的固定磁场都被施加到法拉第元件，所述光轴处于单晶的<111>方向石榴石，其特征在于使用具有法拉第效应的基本上相同厚度的三个石榴石单晶，以形成法拉第元件，并且法拉第元件被布置成使得可变磁场施加到法拉第元件之一，一个范围延伸5度每一个到连接在立体投影图的中心的（111）面的行的左右两边的最外圆周上的（-1-12）面或与图中相当的平面，而可变磁场应用于剩余的两个元件，在一个延伸5度的范围内。连接在立体投影图的中心的（111）面的直线的左右两侧与在最外周的（-101）面或与图中相当的平面相连。因此，光衰减的温度依赖性得到改善。此外，法拉第旋转器的定位装置改善了偏振相关损耗。

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