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    • 72. 发明申请
    • Immersion Exposure System, and Recycle Method and Supply Method of Liquid for Immersion Exposure
    • 浸没曝光系统,以及用于浸没曝光的液体的回收方法和供应方法
    • US20080129970A1
    • 2008-06-05
    • US11795809
    • 2006-01-20
    • Taiichi FurukawaKatsuhiko HiedaYakashi MiyamatsuYong WangKinji Yamada
    • Taiichi FurukawaKatsuhiko HiedaYakashi MiyamatsuYong WangKinji Yamada
    • G03B27/42H01L21/027G03F7/038G03B27/52G03F7/20
    • G03F7/70341
    • An immersion exposure system 1 performs an exposure process through a liquid 301 provided between an optical element of a projection optical means 121 and a substrate 111. The immersion exposure system 1 includes a liquid supply section 80 which supplies the liquid 301, an exposure section to which the liquid 301 (301b) supplied from the liquid supply section 80 is continuously introduced along a specific direction and which performs an exposure process in a state in which a space between the optical element of the projection optical means 121 and the substrate 111 is filled with the liquid 301, a liquid recovery section 90 which recovers the liquid 301 (301a) passed through the exposure section 110 at a symmetrical position against the substrate 111, and a liquid recycling section 20 which recycles the liquid 301 (301c) recovered by the liquid recovery section 90. The properties of the immersion exposure liquid can be stabilized when applying an immersion method, whereby exposure can be advantageously and continuously performed, and running cost can be reduced.
    • 浸没曝光系统1通过设置在投影光学装置121的光学元件和基板111之间的液体301进行曝光处理。 浸没曝光系统1包括供给液体301的液体供给部80,从液体供给部80供给的液体301(301b)沿特定方向连续导入的曝光部,并进行曝光处理 投影光学装置121的光学元件和基板111之间的空间被液体301填充的状态,使液体301(301a)以对称的方式通过曝光部110的液体回收部90 与液体回收部90回收的液体301(301c)的液体再循环部20。 浸渍曝光液体的性质可以通过浸渍法稳定化,可以有利且连续地进行曝光,能够降低运转成本。
    • 76. 发明申请
    • Method for producing saturated hydrocarbon compound
    • 饱和烃化合物的制备方法
    • US20070156003A1
    • 2007-07-05
    • US11635660
    • 2006-12-08
    • Taiichi FurukawaYong WangKinji Yamada
    • Taiichi FurukawaYong WangKinji Yamada
    • C07C7/17
    • C07C7/171C07C2602/28C07C13/50
    • A method for treating a saturated hydrocarbon compound suitable as a liquid for the immersion exposure method excelling in transmission in the deep ultraviolet region using sulfuric acid in an amount smaller than in a conventional method is provided. The above sulfuric acid washing treatment is the method for producing saturated hydrocarbon compound intended to reduce the absorbance, wherein the second sulfuric acid washing treatment step is conducted after the first sulfuric acid washing treatment step at a temperature 10° C. or more lower than the temperature of the first sulfuric acid washing treatment step. The absorbance of light with a wavelength of 193 nm of the saturated hydrocarbon compound to be treated in the above second sulfuric acid washing treatment step is 0.10 or less per 1 cm of a liquid optical path length, and the above saturated hydrocarbon compound is an alicyclic saturated hydrocarbon compound.
    • 提供一种处理适合作为浸渍曝光方法的饱和烃化合物的方法,其中使用比常规方法更小的硫酸,在深紫外区域中透射性优异。 上述硫酸洗涤处理是制造用于降低吸光度的饱和烃化合物的方法,其中第二硫酸洗涤处理步骤在第一硫酸洗涤处理步骤之后在10℃以上的温度下进行 第一硫酸洗涤处理步骤的温度。 在上述第二硫酸洗涤处理步骤中,待处理的饱和烃化合物的波长为193nm的光的吸光度为每1cm液体光程长度为0.10以下,上述饱和烃化合物为脂环式 饱和烃化合物。
    • 80. 发明申请
    • Compact and high performance opto-mechanical switch
    • 紧凑型高性能光机械开关
    • US20060133725A1
    • 2006-06-22
    • US11249886
    • 2005-10-12
    • Yong WangFeng Ye
    • Yong WangFeng Ye
    • G02B6/26G02B6/34G02B6/32G02B6/42
    • G02B6/3524G02B6/3528G02B6/3558
    • A system and method for a 1xN fiber optical switch is disclosed. The switch comprises (1) a pair of vertically oriented wedge prisms and (2) a collimator. The collimator comprises a four fiber ferrule and a lens. When no wedge prisms are inserted into the optical path, the signal is switched to port 1. When the first prism is inserted, the signal is switched to port 2. When the second prism is inserted (first prism not in), the signal is switched to port 3 which is in a vertical line. While both prisms are inserted into the optical path, the signal is switched to the diagonal port 4. Accordingly, a 1xN switch is provided that is more compact than a conventional 1xN switch. The 1xN fiber optical switch in accordance with the present invention have advantages over conventional opto-mechanical switches. The inventive 1xN switch is much smaller in size because all ports are held in one ferrule and only one lens is utilized.
    • 公开了一种1xN光纤开关的系统和方法。 开关包括(1)一对垂直取向的楔形棱镜和(2)准直器。 准直器包括四个光纤套圈和透镜。 当没有楔形棱镜插入光路时,信号切换到端口1.当插入第一棱镜时,信号切换到端口2.当第二个棱镜插入(第一个棱镜不在)时,信号为 切换到垂直线上的端口3。 当两个棱镜都插入到光路中时,信号被切换到对角端口4.因此,提供比常规1xN开关更紧凑的1xN开关。 根据本发明的1xN光纤光开关具有优于常规光机械开关的优点。 本发明的1xN开关的尺寸要小得多,因为所有的端口被保持在一个套圈中,并且仅使用一个透镜。