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71. 发明申请

US20100149512A1 SPECTRAL PURITY FILTER FOR MULTI-LAYER MIRROR, LITHOGRAPHIC APPARATUS INCLUDING SUCH MULTI-LAYER MIRROR, METHOD FOR ENLARGING THE RATIO OF DESIRED RADIATION AND UNDESIRED RADIATION, AND DEVICE MANUFACTURING METHOD 审中-公开
标题翻译：用于多层镜的光谱滤光器，包括这种多层镜的平面设备，用于放大所需辐射和未辐射的比例的方法以及器件制造方法
公开(公告)号：US20100149512A1
公开(公告)日：2010-06-17
申请号：US12718682
申请日：2010-03-05
申请人： Maarten Marinus Johannes Wilhelmus VAN HERPEN , Levinus Pieter Bakker , Vadim Yevgenyevich Banine , Derk Jan Wilfred Klunder
发明人： Maarten Marinus Johannes Wilhelmus VAN HERPEN , Levinus Pieter Bakker , Vadim Yevgenyevich Banine , Derk Jan Wilfred Klunder
IPC分类号： G03B27/72 , G02B5/22
CPC分类号： G02B1/10 , B82Y10/00 , B82Y40/00 , G02B5/0816 , G02B5/0891 , G02B5/283 , G03F1/24 , G03F7/70575 , G03F7/70958 , G21K1/062 , G21K2201/067
摘要： A multi-layer mirror includes a multi-layer stack. The multi-layer stack includes a plurality of alternating layers with a multi-layer stack top layer and a spectral filter top layer arranged on the multi-layer stack. The spectral filter top layer includes a first spectral purity enhancement layer that includes a first material m1 and has a first layer thickness d1, an intermediate layer that includes a second material m2 and has a second layer thickness d2. The intermediate layer is arranged on the multi-layer stack top layer. The first material is selected from SiN, Si3N4, SiO2, ZnS, Te, diamond, CsI, Se, SiC, amorphous carbon, MgF2, CaF2, TiO2, Ge, PbF2, ZrO2, BaTiO3, LiF or NaF. The second material includes a material different from the first material, and d1+d2 has a thickness between 1.5 and 40 nm.
摘要翻译：多层反射镜包括多层堆叠。多层堆叠包括多层交叠层，多层叠层顶层和布置在多层堆叠上的光谱过滤器顶层。光谱过滤器顶层包括第一光谱纯度增强层，其包括第一材料m1并且具有第一层厚度d1，包括第二材料m2并具有第二层厚度d2的中间层。中间层布置在多层堆叠顶层上。第一种材料选自SiN，Si3N4，SiO2，ZnS，Te，金刚石，CsI，Se，SiC，无定形碳，MgF2，CaF2，TiO2，Ge，PbF2，ZrO2，BaTiO3，LiF或NaF。第二材料包括与第一材料不同的材料，并且d1 + d2具有在1.5和40nm之间的厚度。

72. 发明授权

US07715100B2 Method and apparatus for generating radically and/or azimuthally polarized light beams 失效
标题翻译：用于产生根尖和/或方位偏振光束的方法和装置
公开(公告)号：US07715100B2
公开(公告)日：2010-05-11
申请号：US11572008
申请日：2005-07-11
申请人： Sjoerd Stallinga , Levinus Pieter Bakker
发明人： Sjoerd Stallinga , Levinus Pieter Bakker
IPC分类号： G02B5/30 , G02B27/28
CPC分类号： G03F7/70566 , Y10S359/90
摘要： A method and an apparatus for generating a polarized light beam to be projected onto an object plane are provided. A converging or diverging light beam (18) is generated. The converging or diverging light beam is projected through a member (22, 52) comprising an uniaxial birefringent material, the uniaxial birefringent material having a symmetry axis essentially parallel to the optical axis (12) of the light beam, and the member being placed at a distance from the object plane. Thereby, it is possible to create, for example a radially polarized beam that can be used for various optical purposes, e.g. for optical data reading/writing or for microscopy.
摘要翻译：提供一种用于产生投影到物平面上的偏振光束的方法和装置。产生会聚或发散的光束（18）。会聚或发散的光束通过包括单轴双折射材料的构件（22,52）投影，单轴双折射材料具有基本上平行于光束的光轴（12）的对称轴，并且该构件被放置在距物体平面的距离。因此，可以产生例如可以用于各种光学目的的径向偏振光束，例如，用于光学数据读取/写入或用于显微镜。

73. 发明申请

US20100067011A1 AMBIENT LIGHT REDUCTION FOR OPTICAL TOMOGRAPHY 审中-公开
标题翻译：环境光降低光学测量
公开(公告)号：US20100067011A1
公开(公告)日：2010-03-18
申请号：US12447675
申请日：2007-10-25
申请人： Levinus Pieter Bakker
发明人： Levinus Pieter Bakker
IPC分类号： G01N21/00
CPC分类号： A61B5/4312 , A61B5/0091 , A61B2562/146 , G01N21/4795
摘要： The invention relates to an adaptation medium (100) for use in a device (45) for imaging an interior of a turbid medium (90), the device (45) for imaging an interior of a turbid medium (90) comprising: a. a receiving volume (60) for accommodating the turbid medium (90); b. an irradiation light source (50) for irradiating the turbid medium (90); c. a photodetector unit (55) for detecting light emanating from the receiving volume (60) as a result of irradiating the turbid medium (90). The invention also relates to a device (45) for imaging an interior of a turbid medium (90) and to a medical image acquisition device, the device (45) for imaging an interior of a turbid medium (90) and the medical image acquisition device comprising: a. a receiving volume (60) for accommodating a turbid medium (90); b. an irradiation light source (50) for irradiating the turbid medium (90); c. a photodetector unit (55) for detecting light emanating from the receiving volume (60) as a result of irradiating the turbid medium (90). It is an object of the invention to reduce the effect on a measurement of light from a light source other than the irradiation light source (50). According to the invention this object is achieved in that the adaptation medium (100) comprises filtering means, such as a dye, for filtering out light from a light source other than the irradiation light source (50).
摘要翻译：本发明涉及用于对浑浊介质（90）的内部成像的装置（45）中的适配介质（100），所述装置（45）用于对浑浊介质（90）的内部进行成像，该装置包括：a。用于容纳所述浑浊介质的接收容积（60）; b。用于照射混浊介质的照射光源（50）; C。用于通过照射混浊介质（90）来检测从接收体积（60）发出的光的光电检测器单元（55）。本发明还涉及一种用于对浑浊介质（90）和医学图像采集装置的内部进行成像的装置（45），用于对浑浊介质（90）的内部进行成像的装置（45）和医学图像采集装置包括：a。用于容纳混浊介质的接收容积（60）; b。用于照射混浊介质的照射光源（50）; C。用于通过照射混浊介质（90）来检测从接收体积（60）发出的光的光电检测器单元（55）。本发明的目的是降低对来自除了照射光源（50）之外的光源的光的测量的影响。根据本发明，该目的的实现是，适应介质（100）包括诸如染料的过滤装置，用于滤出除了照射光源（50）以外的光源的光。

74. 发明申请

US20100030084A1 DIFFUSE OPTICAL TOMOGRAPHY WITH MARKERS CONTAINING FLUORESCENT MATERIAL 审中-公开
公开(公告)号：US20100030084A1
公开(公告)日：2010-02-04
申请号：US12514589
申请日：2007-11-12
申请人： Andy Ziegler , Thomas Koehler , Tim Nielsen , Martinus Bernardus Van Der Mark , Michael Cornelis Van Beek , Levinus Pieter Bakker
发明人： Andy Ziegler , Thomas Koehler , Tim Nielsen , Martinus Bernardus Van Der Mark , Michael Cornelis Van Beek , Levinus Pieter Bakker
IPC分类号： A61B6/00 , G06K9/00
CPC分类号： A61B5/4312 , A61B5/0091 , G01N21/4795 , G01N21/6456
摘要： The invention relates to a system, a medical image acquisition system, and a method for imaging an interior of a turbid medium (25). The invention also relates to a marker (60) for use in the method for imaging an interior of a turbid medium (25). The system, the medical image acquisition system, and the method may be used for obtaining an image of an interior of a turbid medium (25) by: accommodation of a turbid medium (25) inside a receiving volume (20); irradiation of the receiving volume (20) with light from a light source; detection of light emanating from the receiving volume (20) as a result of irradiating the receiving volume (20) with light from the light source through the use of a photodetector unit. The detected light is then used to reconstruct an image of an interior of the turbid medium (25). According to the invention, the system, the medical acquisition system, and the method are adapted such that during a measurement the receiving volume (20) comprises at least one marker (60) comprising a predetermined concentration of a chosen fluorescent agent. The light source is arranged for generating excitation light that causes fluorescent emission in the marker (60) and the photodetector is arranged to detect light emanating from the receiving volume (20) as a result of irradiating the receiving volume (20) with excitation light. The use of a marker (60) according to the invention enables obtaining information relating to the geometry of the turbid medium (25). If the turbid medium (25) comprises an unknown concentration of a second fluorescent agent, and the light source and the photodetector unit are arranged for causing fluorescence in the second fluorescent agent and detecting the resulting fluorescence light, respectively, the use of a marker (60) according to the invention enables calibration of the signal resulting from this fluorescence light.

75. 发明申请

US20100030067A1 SYSTEM, METHOD, COMPUTER-READABLE MEDIUM AND USE FOR IMAGING OF TISSUE IN AN ANATOMICAL STRUCTURE 审中-公开
标题翻译：系统，方法，计算机可读介质和用于在解剖结构中形成组织的用途
公开(公告)号：US20100030067A1
公开(公告)日：2010-02-04
申请号：US12515297
申请日：2007-11-14
申请人： Michael Cornelis Van Beek , Martinus Bernardus Van Der Mark , Levinus Pieter Bakker , Rene Van Den Ham , Bernardus Hendrikus Wilhelmus Hendriks , Ralf Hoffmann , Nijs Cornelis Van Der Vaart , Marjolein Van Der Voort
发明人： Michael Cornelis Van Beek , Martinus Bernardus Van Der Mark , Levinus Pieter Bakker , Rene Van Den Ham , Bernardus Hendrikus Wilhelmus Hendriks , Ralf Hoffmann , Nijs Cornelis Van Der Vaart , Marjolein Van Der Voort
IPC分类号： A61B5/05 , A61B8/14
CPC分类号： A61B5/4381 , A61B5/0073 , A61B5/0084 , A61B5/0086 , A61B8/12
摘要： A system for imaging of prostate cancer in a prostate in vivo is provided. The system utilizes Diffuse Optical Tomography (DOT) for creating a 3D image for the detection of suspicious prostate tissue. The DOT image may be used to guide the biopsy, thereby reducing the number of false negatives. A method, computer-readable medium and use are also provided.
摘要翻译：提供了一种用于前列腺体内前列腺癌成像的系统。该系统利用漫射光学层析成像（DOT）创建用于检测可疑前列腺组织的3D图像。 DOT图像可用于指导活组织检查，从而减少假阴性的数量。还提供了一种方法，计算机可读介质和使用。

76. 发明申请

US20100027018A1 DEVICE AND METHOD FOR ACQUIRING IMAGE DATA FROM A TURBID MEDIUM 有权
标题翻译：用于从涡轮介质获取图像数据的装置和方法
公开(公告)号：US20100027018A1
公开(公告)日：2010-02-04
申请号：US12525748
申请日：2008-01-29
申请人： Levinus Pieter Bakker , Martinus Bernardus Van Der Mark
发明人： Levinus Pieter Bakker , Martinus Bernardus Van Der Mark
IPC分类号： G01N21/47
CPC分类号： G01N21/4795 , A61B5/0091 , A61B5/4312
摘要： The invention relates to a method of acquiring image data from a turbid medium (102) using a diffuse optical tomography device, comprising: —irradiating the turbid medium (102) at a plurality of first spatial positions (106), —collecting light emanating from the turbid medium (102) at a plurality of 5 second spatial positions (136), —splitting the light collected from each second spatial position (136) into at least two optical channels (140), —measuring the intensity of the split light in each optical channel of the at least two optical channels (140) using photo detectors (142),10 —reconstructing (152) an image of the turbid medium (102) from the measured intensities.
摘要翻译：本发明涉及一种使用漫射光学断层摄影装置从混浊介质（102）获取图像数据的方法，包括：在多个第一空间位置（106）处照射浑浊介质（102）， - 收集来自在多个5秒空间位置（136）处的混浊介质（102），将从每个第二空间位置（136）收集的光分成至少两个光学通道（140）， - 测量分离光的强度使用光电检测器（142）至少两个光学通道（140）的每个光学通道，根据测量的强度重新构造（152）浑浊介质（102）的图像。

77. 发明授权

US07463413B2 Spectral purity filter for a multi-layer mirror, lithographic apparatus including such multi-layer mirror, method for enlarging the ratio of desired radiation and undesired radiation, and device manufacturing method 有权
标题翻译：用于多层反射镜的光谱纯度滤光器，包括这种多层反射镜的光刻设备，用于扩大所需辐射和不期望辐射的比率的方法，以及器件制造方法
公开(公告)号：US07463413B2
公开(公告)日：2008-12-09
申请号：US11337807
申请日：2006-01-24
申请人： Maarten Marinus Johannes Wilhelmus Van Herpen , Levinus Pieter Bakker , Vadim Yevgenyevich Banine , Derk Jan Wilfred Klunder
发明人： Maarten Marinus Johannes Wilhelmus Van Herpen , Levinus Pieter Bakker , Vadim Yevgenyevich Banine , Derk Jan Wilfred Klunder
IPC分类号： F21V9/04 , F21V9/06 , G02B5/08 , G02B5/20
CPC分类号： G02B1/10 , B82Y10/00 , B82Y40/00 , G02B5/0816 , G02B5/0891 , G02B5/283 , G03F1/24 , G03F7/70575 , G03F7/70958 , G21K1/062 , G21K2201/067
摘要： A multi-layer mirror includes on top of the multi-layer mirror a spectral purity enhancement layer, for example for application in an EUV lithographic apparatus. This spectral purity enhancement layer includes a first spectral purity enhancement layer, but between the multi-layer mirror and first spectral purity enhancement layer there may optionally be an intermediate layer or a second spectral purity enhancement layer and intermediate layer. Hence, multi-layer mirrors with the following configurations are possible: multi-layer mirror/first spectral purity enhancement layer; multi-layer mirror/intermediate layer/first spectral purity enhancement layer; and multi-layer mirror/second spectral purity enhancement layer/intermediate layer/first spectral purity enhancement layer. The spectral purity of normal incidence radiation may be enhanced, such that DUV radiation is diminished relatively stronger than EUV radiation.
摘要翻译：多层反射镜在多层镜的顶部包括光谱纯度增强层，例如用于EUV光刻设备中。该光谱纯度增强层包括第一光谱纯度增强层，但是在多层反射镜和第一光谱纯度增强层之间，可选地可以有中间层或第二光谱纯度增强层和中间层。因此，具有以下配置的多层反射镜是可能的：多层镜/第一光谱纯度增强层; 多层镜/中间层/第一光谱纯度增强层; 和多层镜/第二光谱纯度增强层/中间层/第一光谱纯度增强层。可以增强正常入射辐射的光谱纯度，使得DUV辐射比EUV辐射相对更强。

78. 发明申请

US20080267022A1 Method and System With Focus Control for Scanning an Information Carrier 审中-公开
标题翻译：用于扫描信息载体的聚焦控制方法和系统
公开(公告)号：US20080267022A1
公开(公告)日：2008-10-30
申请号：US12092829
申请日：2006-11-07
申请人： Levinus Pieter Bakker
发明人： Levinus Pieter Bakker
IPC分类号： G11B7/00
CPC分类号： G11B7/0908 , G11B7/0033 , G11B7/0938 , G11B7/12
摘要： The invention relates to a method and system for reading data on a data layer (105) of an information carrier (101) comprising one or more servo marks (108, 109) positioned relative to said data layer (105), the system comprising: probe array generation means (104, 102) for generating a probe array comprising an array of light spots (103) intended to be applied to said information carrier (101) so as to generate output beams representative of said one or more servo marks (108, 109) and said data, wherein the distance between the focal point of one or more light spots of a portion of said probe array and a respective portion of said information carrier corresponding to at least one servo mark is different to the distance between the focal points of the light spots of the rest of the probe array and the rest of said information carrier; an image sensor (106) for receiving said output beams and generating a corresponding image; means (116) for deriving a contrast value in respect of at least of a portion of said image corresponding to said at least one servo mark (108, 109) and generating a control signal (125) derived from said contrast value, said control signal (125) being for application to actuation means (AC6) for adjusting the distance between said information carrier (101) and said array of light spots (103).
摘要翻译：本发明涉及一种用于在包括相对于所述数据层（105）定位的一个或多个伺服标记（108,109）的信息载体（101）的数据层（105）上读取数据的方法和系统，所述系统包括：用于产生探针阵列的探针阵列产生装置（104,102），所述探针阵列包括旨在施加到所述信息载体（101）的光点阵列（103），以产生代表所述一个或多个伺服标记（108）的输出光束，109）和所述数据，其中所述探针阵列的一部分的一个或多个光点的焦点与对应于至少一个伺服标记的所述信息载体的相应部分之间的距离不同于焦点探针阵列的其余部分和所述信息载体的其余部分的光点的点; 用于接收所述输出光束并产生相应图像的图像传感器（106）; 用于根据与所述至少一个伺服标记（108,109）对应的所述图像的至少一部分导出对比度值并生成从所述对比度值导出的控制信号（125）的装置（116），所述控制信号（125）用于施加到用于调节所述信息载体（101）和所述光点阵列（103）之间的距离的致动装置（AC 6）。

79. 发明申请

US20080180800A1 Device For Generating an Array of Light Spots 失效
标题翻译：用于生成一组光点的设备
公开(公告)号：US20080180800A1
公开(公告)日：2008-07-31
申请号：US11576706
申请日：2005-09-28
申请人： Levinus Pieter Bakker
发明人： Levinus Pieter Bakker
IPC分类号： G02B27/44
CPC分类号： G02B27/0087 , G02B5/1866
摘要： The invention relates to a device for generating a periodical array of light spots from an input light beam, said device comprising—a periodical array of apertures (202) forming a plurality of interlaced sub-arrays of apertures,—phase shifter elements (PSi) placed in front of said apertures for imposing a phase shift to said input light beam so that each light spot is constructed as the superposition of a plurality of light spots generated by said plurality of interlaced sub-arrays of apertures. Use: Light spot generation.
摘要翻译：本发明涉及一种用于从输入光束产生周期性阵列阵列的装置，所述装置包括 - 形成多个相互间隔开的子阵列的孔（202）的周期阵列， - 相移元件（PS < 放置在所述孔的前面，用于对所述输入光束施加相移，使得每个光点被构造为由所述多个交错子阵列产生的多个光斑的叠加孔。用途：光斑生成。

80. 发明授权

US07352434B2 Lithographic apparatus and device manufacturing method 有权
标题翻译：平版印刷设备和器件制造方法
公开(公告)号：US07352434B2
公开(公告)日：2008-04-01
申请号：US10844575
申请日：2004-05-13
申请人： Bob Streefkerk , Levinus Pieter Bakker , Johannes Jacobus Matheus Baselmans , Henrikus Herman Marie Cox , Antonius Theodorus Anna Maria Derksen , Sjoerd Nicolaas Lambertus Donders , Christiaan Alexander Hoogendam , Joeri Lof , Erik Roelof Loopstra , Jeroen Johannes Sophia Maria Mertens , Frits Van Der Meulen , Johannes Catharinus Hubertus Mulkens , Gerardus Petrus Matthijs Van Nunen , Klaus Simon , Bernardus Antonius Slaghekke , Alexander Straaijer , Jan-Gerard Cornelis Van Der Toorn , Martijn Houkes
发明人： Bob Streefkerk , Levinus Pieter Bakker , Johannes Jacobus Matheus Baselmans , Henrikus Herman Marie Cox , Antonius Theodorus Anna Maria Derksen , Sjoerd Nicolaas Lambertus Donders , Christiaan Alexander Hoogendam , Joeri Lof , Erik Roelof Loopstra , Jeroen Johannes Sophia Maria Mertens , Frits Van Der Meulen , Johannes Catharinus Hubertus Mulkens , Gerardus Petrus Matthijs Van Nunen , Klaus Simon , Bernardus Antonius Slaghekke , Alexander Straaijer , Jan-Gerard Cornelis Van Der Toorn , Martijn Houkes
IPC分类号： G03B27/42 , G03B27/52
CPC分类号： G03F7/70341 , G03F7/70425 , G03F7/70525 , G03F7/709
摘要： In a lithographic apparatus, a localized area of the substrate surface under a projection system is immersed in liquid. The height of a liquid supply system above the surface of the substrate can be varied using actuators. A control system uses feedforward or feedback control with input of the surface height of the substrate to maintain the liquid supply system at a predetermined height above the surface of the substrate.
摘要翻译：在光刻设备中，将投影系统下的基板表面的局部区域浸入液体中。可以使用致动器来改变衬底表面上方的液体供应系统的高度。控制系统使用前馈或反馈控制输入基板的表面高度，以将液体供应系统保持在基板表面上方的预定高度。

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