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    • 75. 发明授权
    • Method for making carbon nanotube array
    • 制造碳纳米管阵列的方法
    • US07682658B2
    • 2010-03-23
    • US11371989
    • 2006-03-08
    • Kai-Li JiangKai LiuShou-Shan Fan
    • Kai-Li JiangKai LiuShou-Shan Fan
    • C23C16/00
    • C23C16/0281C23C16/26C23C16/448C30B25/02C30B29/02C30B29/605
    • A method for making an array of carbon nanotubes includes the steps of: (a) providing a substrate with a film of a first catalyst thereon; (b) disposing the substrate in a quartz boat; (c) disposing a second catalyst adjacent to the substrate in the quartz boat; (d) disposing the quartz boat in a reaction chamber having a gas inlet configured for introducing a carbon source gas and a carrier gas into the reaction chamber and a gas outlet; (e) heating the reaction chamber to a predetermined temperature and introducing the carbon source gas into the reaction chamber along a direction from the second catalyst to the substrate, whereby the second catalyst reacts with the carbon source gas thereby producing a resultant for promoting catalytic activity of the first catalyst; and (f) growing an array of carbon nanotubes on the substrate.
    • 制备碳纳米管阵列的方法包括以下步骤:(a)在其上提供具有第一催化剂的膜的基材; (b)将基板设置在石英舟中; (c)在所述石英舟中设置与所述基板相邻的第二催化剂; (d)将石英舟放置在具有气体入口的反应室中,所述气体入口构造成用于将碳源气体和载气引入反应室和气体出口; (e)将反应室加热至预定温度,并将碳源气体沿着从第二催化剂到基板的方向引入反应室,由此第二催化剂与碳源气体反应,从而产生催化活性的产物 的第一催化剂; 和(f)在衬底上生长碳纳米管阵列。