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    • 72. 发明申请
    • SEMICONDUCTOR STRUCTURE WITH FIELD SHIELD AND METHOD OF FORMING THE STRUCTURE
    • 具有现场屏蔽的半导体结构和形成结构的方法
    • US20100047972A1
    • 2010-02-25
    • US12610563
    • 2009-11-02
    • William F. Clark, JR.Edward J. Nowak
    • William F. Clark, JR.Edward J. Nowak
    • H01L21/336H01L21/762
    • H01L29/861H01L29/402H01L29/417H01L29/6609H01L29/772H01L29/78648
    • Disclosed is semiconductor structure that incorporates a field shield below a semiconductor device (e.g., a field effect transistor (FET) or a diode). The field shield is sandwiched between upper and lower isolation layers on a wafer. A local interconnect extends through the upper isolation layer and connects the field shield to a selected doped semiconductor region of the device (e.g., a source/drain region of a FET or a cathode or anode of a diode). Current that passes into the device, for example, during back-end of the line charging, is shunted by the local interconnect away from the upper isolation layer and down into the field shield. Consequently, an electric charge is not allowed to build up in the upper isolation layer but rather bleeds from the field shield into the lower isolation layer and into the substrate below. This field shield further provides a protective barrier against any electric charge that becomes trapped within the lower isolation layer or substrate.
    • 公开了在半导体器件(例如场效应晶体管(FET)或二极管)之下并入场屏蔽的半导体结构。 场屏蔽被夹在晶片上的上隔离层和下隔离层之间。 局部互连延伸穿过上隔离层并将场屏蔽连接到器件的选定掺杂半导体区域(例如,FET的二极管的源极/漏极区域或二极管的阴极或阳极)。 进入设备的电流,例如,在线路充电的后端,被远离上隔离层的局部互连分流,并进入场屏蔽。 因此,不允许在上部隔离层中积聚电荷,而是从场屏蔽件渗入下部隔离层并进入下面的基板。 该场屏蔽进一步提供抵抗掉在下隔离层或衬底内的任何电荷的保护屏障。
    • 76. 发明授权
    • Semiconductor structures incorporating multiple crystallographic planes and methods for fabrication thereof
    • 结合多个晶面的半导体结构及其制造方法
    • US07649243B2
    • 2010-01-19
    • US11556833
    • 2006-11-06
    • Brent A. AndersonEdward J. NowakJed H. Rankin
    • Brent A. AndersonEdward J. NowakJed H. Rankin
    • H01L29/04
    • H01L29/045H01L21/845H01L27/1211H01L29/66795H01L29/785
    • A semiconductor structure includes a semiconductor mesa located upon an isolating substrate. The semiconductor mesa includes a first end that includes a first doped region separated from a second end that includes a second doped region by an isolating region interposed therebetween. The first doped region and the second doped region are of different polarity. The semiconductor structure also includes a channel stop dielectric layer located upon a horizontal surface of the semiconductor mesa over the second doped region. The semiconductor structure also includes a first device located using a sidewall and a top surface of the first end as a channel region, and a second device located using the sidewall and not the top surface of the second end as a channel. A related method derives from the foregoing semiconductor structure. Also included is a semiconductor circuit that includes the semiconductor structure.
    • 半导体结构包括位于隔离衬底上的半导体台面。 半导体台面包括第一端,该第一端包括通过插入其间的隔离区域与第二掺杂区域分离的第一掺杂区域。 第一掺杂区域和第二掺杂区域具有不同的极性。 半导体结构还包括位于第二掺杂区域上的半导体台面的水平表面上的沟道阻挡介电层。 半导体结构还包括使用第一端的侧壁和顶表面作为沟道区的第一器件,以及使用侧壁而不是第二端的顶表面作为沟道定位的第二器件。 相关方法源于上述半导体结构。 还包括包括半导体结构的半导体电路。