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    • 72. 发明授权
    • Double self-aligned metal oxide TFT
    • 双自对准金属氧化物TFT
    • US09401431B2
    • 2016-07-26
    • US13366503
    • 2012-02-06
    • Chan-Long ShiehGang Yu
    • Chan-Long ShiehGang Yu
    • H01L21/04H01L21/02H01L27/12H01L29/786H01L29/66H01L29/45
    • H01L29/7869H01L21/02554H01L21/02565H01L27/1225H01L27/1259H01L29/45H01L29/66969H01L29/78606
    • A method of fabricating metal oxide TFTs on transparent substrates includes the steps of positioning an opaque gate metal area on the front surface of the substrate, depositing transparent gate dielectric and transparent metal oxide semiconductor layers overlying the gate metal and a surrounding area, depositing transparent passivation material on the semiconductor material, depositing photoresist on the passivation material, exposing and developing the photoresist to remove exposed portions, etching the passivation material to leave a passivation area defining a channel area, depositing transparent conductive material over the passivation area, depositing photoresist over the conductive material, exposing and developing the photoresist to remove unexposed portions, and etching the conductive material to leave source and drain areas on opposed sides of the channel area.
    • 在透明基板上制造金属氧化物TFT的方法包括以下步骤:在衬底的前表面上定位不透明栅极金属区域,沉积覆盖栅极金属和周围区域的透明栅极电介质和透明金属氧化物半导体层,沉积透明钝化 在所述半导体材料上沉积光致抗蚀剂,在所述钝化材料上沉积光致抗蚀剂,曝光和显影所述光致抗蚀剂以去除暴露部分,蚀刻所述钝化材料以留下限定沟道区的钝化区,在所述钝化区上沉积透明导电材料, 导电材料,曝光和显影光致抗蚀剂以去除未曝光部分,并且蚀刻导电材料以在沟道区域的相对侧上留下源极和漏极区域。
    • 77. 发明申请
    • MOTFT WITH UN-PATTERNED ETCH-STOP
    • 具有不间断蚀刻的MOTFT
    • US20150137113A1
    • 2015-05-21
    • US14081130
    • 2013-11-15
    • Gang YuChan-Long ShiehJuergen MusolfFatt FoongTian Xiao
    • Gang YuChan-Long ShiehJuergen MusolfFatt FoongTian Xiao
    • H01L29/786H01L29/24H01L21/02H01L29/66
    • H01L27/1203H01L21/02565H01L21/02664H01L29/24H01L29/66969H01L29/7869
    • A method of fabricating a high mobility semiconductor metal oxide thin film transistor including the steps of depositing a layer of semiconductor metal oxide material, depositing a blanket layer of etch-stop material on the layer of MO material, and patterning a layer of source/drain metal on the blanket layer of etch-stop material including etching the layer of source/drain metal into source/drain terminals positioned to define a channel area in the semiconductor metal oxide layer. The etch-stop material being electrically conductive in a direction perpendicular to the plane of the blanket layer at least under the source/drain terminals to provide electrical contact between each of the source/drain terminals and the layer of semiconductor metal oxide material. The etch-stop material is also chemical robust to protect the layer of semiconductor metal oxide channel material during the etching process.
    • 一种制造高迁移率半导体金属氧化物薄膜晶体管的方法,包括以下步骤:沉积半导体金属氧化物材料层,在MO材料层上沉积蚀刻停止材料的覆盖层,以及图案化源/漏层 包括将源极/漏极金属层蚀刻成定位成限定半导体金属氧化物层中的沟道区域的源极/漏极端子的蚀刻停止材料的覆盖层上的金属。 蚀刻停止材料至少在源极/漏极端子之下在垂直于覆盖层的平面的方向上导电,以在源极/漏极端子和半导体金属氧化物材料层之间提供电接触。 蚀刻停止材料也是化学稳固的,以在蚀刻工艺期间保护半导体金属氧化物沟道材料层。
    • 78. 发明授权
    • Pixelated imager with motfet and process
    • Pixelated成像器与motfet和过程
    • US08962377B2
    • 2015-02-24
    • US13713744
    • 2012-12-13
    • Chan-Long ShiehGang Yu
    • Chan-Long ShiehGang Yu
    • H01L21/00H01L31/20H01L31/0368H01L31/0376
    • H01L31/20H01L27/1225H01L27/1463H01L27/14632H01L27/14663H01L27/14687H01L27/14692H01L31/0368H01L31/0376Y02E10/50
    • A method of fabricating a pixelated imager includes providing a substrate with bottom contact layer and sensing element blanket layers on the contact layer. The blanket layers are separated into an array of sensing elements by trenches isolating adjacent sensing elements. A sensing element electrode is formed adjacent each sensing element overlying a trench and defining a TFT. A layer of metal oxide semiconductor (MOS) material is formed on a dielectric layer overlying the electrodes and on an exposed upper surface of the blanket layers defining the sensing element adjacent each TFT. A layer of metal is deposited on each TFT and separated into source/drain electrodes on opposite sides of the sensing element electrode. The metal forming one of the S/D electrodes contacts the MOS material overlying the exposed surface of the semiconductor layer, whereby each sensing element in the array is electrically connected to the adjacent TFT by the MOS material.
    • 制造像素化成像器的方法包括在接触层上提供底层接触层和感测元件覆盖层。 橡皮布层通过隔离相邻感测元件的沟槽分离成感测元件的阵列。 感测元件电极邻近覆盖沟槽的每个感测元件形成并且限定TFT。 一层金属氧化物半导体(MOS)材料形成在覆盖电极的电介质层上,并且在覆盖层的暴露的上表面上形成与每个TFT相邻的感测元件。 一层金属沉积在每个TFT上,并分离成在感测元件电极的相对侧上的源极/漏极。 形成S / D电极之一的金属接触覆盖半导体层的暴露表面的MOS材料,由此阵列中的每个感测元件通过MOS材料电连接到相邻的TFT。
    • 79. 发明申请
    • METAL OXIDE TFT WITH IMPROVED SOURCE/DRAIN CONTACTS
    • 具有改进源/漏联系的金属氧化物薄膜
    • US20120313092A1
    • 2012-12-13
    • US13155749
    • 2011-06-08
    • Chan-Long ShiehGang YuFatt Foong
    • Chan-Long ShiehGang YuFatt Foong
    • H01L29/786H01L21/383
    • H01L29/7869H01L21/428H01L29/45H01L29/66969H01L29/78606
    • A method of forming ohmic source/drain contacts in a metal oxide semiconductor thin film transistor includes providing a gate, a gate dielectric, a high carrier concentration metal oxide semiconductor active layer with a band gap and spaced apart source/drain metal contacts in a thin film transistor configuration. The spaced apart source/drain metal contacts define a channel region in the active layer. An oxidizing ambient is provided adjacent the channel region and the gate and the channel region are heated in the oxidizing ambient to reduce the carrier concentration in the channel area. Alternatively or in addition each of the source/drain contacts includes a very thin layer of low work function metal positioned on the metal oxide semiconductor active layer and a barrier layer of high work function metal is positioned on the low work function metal.
    • 在金属氧化物半导体薄膜晶体管中形成欧姆源极/漏极接触的方法包括:提供栅极,栅极电介质,具有带隙的高载流子浓度金属氧化物半导体有源层和间隔开的源/漏极金属接触体 薄膜晶体管配置。 间隔开的源极/漏极金属触点限定有源层中的沟道区。 在沟道区域附近提供氧化环境,并且栅极和沟道区域在氧化环境中被加热以降低沟道区域中的载流子浓度。 或者或另外每个源极/漏极触点包括位于金属氧化物半导体有源层上的非常薄的低功函数金属层,并且高功函数金属的势垒层位于低功函数金属上。
    • 80. 发明申请
    • SELF-ALIGNED METAL OXIDE TFT WITH REDUCED NUMBER OF MASKS
    • 自对准金属氧化物膜,具有减少数量的掩模
    • US20120168744A1
    • 2012-07-05
    • US13195882
    • 2011-08-02
    • Chan-Long ShiehGang YuFatt Foong
    • Chan-Long ShiehGang YuFatt Foong
    • H01L29/786H01L21/8254
    • H01L29/7869H01L21/02554H01L21/02565
    • A method of fabricating MO TFTs on transparent substrates by positioning opaque gate metal on the front surface of the substrate defining a gate area, depositing gate dielectric material on the front surface of the substrate, overlying the gate metal and a surrounding area, and depositing metal oxide semiconductor material on the gate dielectric material. Depositing etch stop material on the semiconductor material. Positioning photoresist on the etch stop material, the etch stop material and the photoresist being selectively removable, and the photoresist defining an isolation area in the semiconductor material. Removing uncovered portions of the etch stop. Exposing the photoresist from the rear surface of the substrate using the gate metal as a mask and removing exposed portions so as to leave the etch stop material uncovered except for a portion overlying and aligned with the gate metal. Etching uncovered portions of the semiconductor material to isolate the TFT. Using the photoresist, selectively etching the etch stop layer to leave a portion overlying and aligned with the gate metal and defining a channel area in the semiconductor material. Depositing and patterning conductive material on the etch stop layer and on the semiconductor material to form source and drain areas on opposed sides of the channel area.
    • 一种在透明基板上制造MO TFT的方法,该方法是通过在形成栅极区域的衬底的前表面上定位不透明栅极金属,在衬底的前表面上沉积栅介电材料,覆盖栅极金属和周围区域,并沉积金属 氧化物半导体材料。 在半导体材料上沉积蚀刻停止材料。 将光致抗蚀剂定位在蚀刻停止材料上,蚀刻停止材料和光致抗蚀剂可选择性地移除,并且光刻胶在半导体材料中限定隔离区域。 去除蚀刻停止件的未覆盖部分。 使用栅极金属作为掩模从基板的后表面露出光致抗蚀剂,并除去暴露部分,以使除蚀刻停止材料未被覆盖,除了覆盖并与栅极金属对准的部分之外。 蚀刻半导体材料的未覆盖部分以隔离TFT。 使用光致抗蚀剂,选择性地蚀刻蚀刻停止层以留下覆盖并与栅极金属对准的部分并限定半导体材料中的沟道区域。 在蚀刻停止层和半导体材料上沉积和图案化导电材料,以在沟道区域的相对侧上形成源极和漏极区域。