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    • 71. 发明授权
    • Apparatuses and methods for planarizing a semiconductor contactor
    • 用于平坦化半导体接触器的装置和方法
    • US07262611B2
    • 2007-08-28
    • US10852370
    • 2004-05-24
    • Gaetan L. MathieuBenjamin N. EldridgeGary W. Grube
    • Gaetan L. MathieuBenjamin N. EldridgeGary W. Grube
    • G01R31/02
    • G01R1/07307G01R3/00
    • A wiring substrate can include a substrate material, which can have a first surface and a second surface. A plurality of first electrically conductive elements can be disposed on the first surface, and a plurality of second electrically conductive elements can be disposed on the second surface. Ones of the first conductive elements can be electrically connected through the substrate material to ones of the second conductive elements. A mechanism can be located in a first region, which can be a center region, of the second surface of the substrate material. The mechanism can be configured to engage a control member. First activation of the control member can apply an adjustable pulling force to the first region, and second activation of the control member can apply an adjustable pushing force to the first region. The mechanism can be or can include a threaded stud, and the control member can be or can include a threaded nut configured to engage the threaded stud.
    • 布线基板可以包括可以具有第一表面和第二表面的基板材料。 多个第一导电元件可以设置在第一表面上,并且多个第二导电元件可以设置在第二表面上。 第一导电元件的一部分可以通过衬底材料电连接到第二导电元件中的一个。 机构可以位于基板材料的第二表面的可以是中心区域的第一区域中。 该机构可以被配置为接合控制构件。 控制构件的第一启动可以对第一区域施加可调节的拉力,并且控制构件的第二启动可以向第一区域施加可调节的推力。 机构可以是或可以包括螺柱,并且控制构件可以是或可以包括构造成接合螺柱的螺纹螺母。
    • 77. 发明授权
    • Method of making microelectronic spring contact array
    • 制造微电子弹簧接触阵列的方法
    • US07047638B2
    • 2006-05-23
    • US10202712
    • 2002-07-24
    • Benjamin N. EldridgeGaetan L. MathieuCarl V. Reynolds
    • Benjamin N. EldridgeGaetan L. MathieuCarl V. Reynolds
    • H01R43/00
    • G01R1/06744G01R1/06733G01R3/00Y10T29/49139Y10T29/49155Y10T29/49204Y10T29/49208Y10T29/49222Y10T29/49224
    • A method of making a microelectronic spring contact array comprises forming a plurality of spring contacts on a sacrificial substrate and then releasing the spring contacts from the sacrificial substrate. Each of the spring contacts has an elongated beam having a base end. The method of making the array includes attaching the spring contacts at their base ends to a base substrate after they have been released entirely from the sacrificial substrate, so that each contact extends from the base substrate to a distal end of its beams. The distal ends are aligned with a predetermined array of tip positions. In an embodiment of the invention, the spring contacts are formed by patterning contours of the spring contacts in a sacrificial layer on the sacrificial substrate. The walls of patterned recesses in the sacrificial layer define side profiles of the spring contacts, and a conductive material is deposited in the recesses to form the elongated beams of the spring contacts.
    • 制造微电子弹簧接触阵列的方法包括在牺牲衬底上形成多个弹簧触点,然后从牺牲衬底释放弹簧触头。 每个弹簧触点具有带有基端的细长梁。 制造阵列的方法包括在它们已经从牺牲基板完全释放之后将其基端处的弹簧触点附接到基底基板,使得每个触点从基底延伸到其波束的远端。 远端与预定阵列的尖端位置对准。 在本发明的一个实施例中,通过在牺牲衬底上的牺牲层中图形地形成弹簧触点的轮廓来形成弹簧触点。 牺牲层中的图案化凹槽的壁限定弹簧触点的侧面轮廓,并且导电材料沉积在凹部中以形成弹簧触点的细长梁。