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    • 71. 发明授权
    • Corrosion-resistant high temperature pressure transducer employing a metal diaphragm
    • 采用金属隔膜的耐腐蚀高温压力传感器
    • US08237537B2
    • 2012-08-07
    • US13069222
    • 2011-03-22
    • Anthony D. KurtzNora Kurtz, legal representative
    • Anthony D. Kurtz
    • G01L1/22
    • G01L9/04G01L9/0055G01L9/06
    • A pressure transducer comprising a corrosion resistant metal diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a piezoresistive silicon-on-insulator sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate.
    • 一种压力传感器,包括具有有源区域的耐腐蚀金属隔膜,并且当向隔膜施加力时能够偏转; 以及设置在单个衬底上的压电硅绝缘体上传感器阵列,所述衬底固定到所述隔膜上,所述传感器阵列在第一位置处和所述有源区域上具有靠近所述隔膜的边缘的第一外部传感器,所述第二外部传感器阵列 在第二位置和有源区域附近的隔膜的边缘附近的传感器以及基本上覆盖隔膜的中心的至少一个中心传感器,所述传感器以桥式阵列连接以提供与施加到所述隔膜的力成比例的输出电压 隔膜 传感器与基板介电隔离。
    • 73. 发明申请
    • PRESSURE TRANSDUCER EMPLOYING A MICRO-FILTER AND EMULATING AN INFINITE TUBE PRESSURE TRANSDUCER
    • 使用微滤器的压力传感器和无级管压力传感器
    • US20110296924A1
    • 2011-12-08
    • US13161594
    • 2011-06-16
    • Anthony D. KurtzTonghuo ShangAdam HurstNora Kurtz
    • Anthony D. KurtzTonghuo ShangAdam HurstNora Kurtz
    • G01L11/04G01R3/00
    • G01L19/0609G01L19/0681Y10T29/49005Y10T29/49007
    • A pressure transducer assembly for measuring pressures in high temperature environments employing an elongated tube which is terminated at one end by an acoustic micro-filter. The micro-filter is operative to absorb acoustic waves impinging on it with limited or no reflection. To improve the absorption of acoustic waves, the elongated tube may be tapered and/or mounted to a support block and further convoluted to reduce the overall size and mass of the device. A pressure transducer with a diaphragm flush may be mounted to the elongated tube and extend through to the inner wall of the tube. Hot gases propagate through the elongated tube and their corresponding pressures are measured by the transducer. The acoustic filter operates to absorb acoustic waves resultant from the hot gases, therefore enabling the pressure transducer to be mainly responsive to high frequency waves associated with the gas turbine operation.
    • 一种用于在高温环境中测量压力的压力传感器组件,其采用细长管,其在一端由声学微滤器终止。 微滤器可以有效或无反射地吸收入射到其上的声波。 为了改善声波的吸收,细长管可以是锥形的和/或安装到支撑块上并进一步卷曲以减小装置的整体尺寸和质量。 具有隔膜齐平的压力传感器可以安装到细长管并延伸到管的内壁。 热气体通过细长管传播,其相应的压力由传感器测量。 声学滤波器用于吸收由热气体产生的声波,因此能够使压力传感器主要响应于与燃气轮机操作相关联的高频波。
    • 74. 发明授权
    • Dual layer color-center patterned light source
    • 双层彩色中心图案光源
    • US08040931B2
    • 2011-10-18
    • US13045276
    • 2011-03-10
    • Anthony D. KurtzJoseph R. VanDeWeert
    • Anthony D. KurtzJoseph R. VanDeWeert
    • H01S3/16
    • C30B29/12C30B23/00C30B33/04H01S3/0612H01S3/0809H01S3/163H01S3/1681H01S3/2375H01S3/2383
    • A method of fabricating a color laser, comprising growing a first thin layer of ionic crystal on a substrate. The crystal can comprise many types of ionic crystals, such as sodium chloride or potassium chloride. A second thin layer of a different type of ionic crystal can be deposited above the first ionic crystal layer, such as lithium fluoride or sodium fluoride. An inert metal layer can be deposited between the first and second layers of ionic crystal and above the second layer of ionic crystal. When the first and second ionic crystal layers are radiated with gamma rays, they form color centers at the spots radiated. Because of the difference in crystalline properties of the two different ionic crystal centers, their color centers have different wavelengths. Each of the ionic crystal layers emit light at different characteristic wavelengths when illuminated at their unique absorption frequencies, and can be made to lase separately.
    • 一种制造彩色激光器的方法,包括在衬底上生长离子晶体的第一薄层。 晶体可以包含许多类型的离子晶体,例如氯化钠或氯化钾。 可以在第一离子晶体层之上沉积不同类型的离子晶体的第二薄层,例如氟化锂或氟化钠。 惰性金属层可沉积在离子晶体的第一和第二层之间以及第二层离子晶体之上。 当第一和第二离子晶体层用γ射线照射时,它们在辐射的点处形成色心。 由于两个不同的离子晶体中心的结晶特性不同,它们的色心具有不同的波长。 当以其独特的吸收频率照射时,每个离子晶体层发射不同特征波长的光,并且可以分别进行发光。
    • 75. 发明申请
    • LEADLESS MEDIA PROTECTED FAST RESPONSE RTD SENSOR AND METHOD FOR MAKING THE SAME
    • 无铅介质保护快速反应式RTD传感器及其制造方法
    • US20110235678A1
    • 2011-09-29
    • US12731427
    • 2010-03-25
    • Anthony D. KurtzNora KurtzAlex NedVikram PatilJoseph VanDeWeert
    • Anthony D. KurtzNora KurtzAlex NedVikram PatilJoseph VanDeWeert
    • G01K7/18H01L21/441
    • G01K7/183
    • The RTD device of the present invention is comprised of a semiconductor substrate and a substantially thin conductive metal layer disposed upon the semiconductor substrate, wherein the conductive metal has a substantially linear temperature-resistance relationship. The conductive layer is etched into a convoluted RTD pattern, which consequently increases the overall resistance and minimizes the overall mass of the RTD assembly. A contact glass cover and a conductive metal-glass frit are placed over the RTD assembly to hermetically seal the RTD. The resultant structure can be “upside-down” mounted onto a header or a flat shim so that the bottom surface of the semiconductor substrate is exposed to the external environment, thus shielding the RTD from external forces. The resultant structure is a low mass, highly conductive, leadless, and hermetically sealed RTD that accurately measures the temperature of liquids and gases and maintains fast response time in high temperatures and harsh environments.
    • 本发明的RTD器件包括半导体衬底和设置在半导体衬底上的基本上薄的导电金属层,其中导电金属具有基本上线性的耐温性关系。 导电层被蚀刻成卷积的RTD图案,因此增加了整体电阻并使RTD组件的整体质量最小化。 将接触玻璃盖和导电金属玻璃料放置在RTD组件上以气密地密封RTD。 所得到的结构可以“倒置”安装在集管或平面垫片上,使得半导体衬底的底表面暴露于外部环境,从而屏蔽RTD免受外力的影响。 所得结构是低质量,高导电性,无引线和密封的RTD,可精确测量液体和气体的温度,并在高温和恶劣环境中保持快速响应时间。
    • 76. 发明申请
    • CORROSION-RESISTANT HIGH TEMPERATURE PRESSURE TRANSDUCER EMPLOYING A METAL DIAPHRAGM
    • 使用金属膜的耐腐蚀高温压力传感器
    • US20110203381A1
    • 2011-08-25
    • US13069222
    • 2011-03-22
    • Anthony D. KurtzNora Kurtz
    • Anthony D. KurtzNora Kurtz
    • G01L9/06
    • G01L9/04G01L9/0055G01L9/06
    • A pressure transducer comprising a corrosion resistant metal diaphragm, having an active region, and capable of deflecting when a force is applied to the diaphragm; and a piezoresistive silicon-on-insulator sensor array disposed on a single substrate, the substrate secured to the diaphragm, the sensor array having a first outer sensor near an edge of the diaphragm at a first location and on the active region, a second outer sensor near an edge of the diaphragm at a second location and on the active region, and at least one center sensor substantially overlying a center of the diaphragm, the sensors connected in a bridge array to provide an output voltage proportional to the force applied to the diaphragm. The sensors are dielectrically isolated from the substrate.
    • 一种压力传感器,包括具有有源区域的耐腐蚀金属隔膜,并且当向隔膜施加力时能够偏转; 以及设置在单个衬底上的压电硅绝缘体上传感器阵列,所述衬底固定到所述隔膜上,所述传感器阵列在第一位置处和所述有源区域上具有靠近所述隔膜的边缘的第一外部传感器,所述第二外部传感器阵列 在第二位置和有源区域附近的隔膜的边缘附近的传感器以及基本上覆盖隔膜的中心的至少一个中心传感器,所述传感器以桥式阵列连接以提供与施加到所述隔膜的力成比例的输出电压 隔膜 传感器与基板介电隔离。
    • 77. 发明授权
    • Pressure transducer employing a micro-filter and emulating an infinite tube pressure transducer
    • 压力传感器采用微过滤器并模拟无限管压力传感器
    • US07975552B2
    • 2011-07-12
    • US12719789
    • 2010-03-08
    • Anthony D. KurtzNora Kurtz, legal representativeTonghuo ShangAdam Hurst
    • Anthony D. KurtzTonghuo ShangAdam Hurst
    • G01L9/00
    • G01L19/0609G01L19/0681Y10T29/49005Y10T29/49007
    • It is an objective of the present invention to provide a pressure transducer assembly for measuring pressures in high temperature environments that employs an elongated tube which is terminated at one end by an acoustic micro-filter. The micro-filter has a plurality of apertures extending from one end to the other end, each aperture is of a small diameter as compared to the diameter of the transducer and the damper operates to absorb acoustic waves impinging on it with limited or no reflection. To improve the absorption of acoustic waves, the elongated tube may be tapered and/or mounted to a support block and further convoluted to reduce the overall size and mass of the device. A pressure transducer with a diaphragm flush may be mounted to the elongated tube and extend through to the inner wall of the tube. Hot gases propagate through the elongated tube and their corresponding pressures are measured by the transducer. The acoustic filter operates to absorb acoustic waves resultant from the hot gases, therefore enabling the pressure transducer to be mainly responsive to high frequency waves associated with the gas turbine operation.
    • 本发明的目的是提供一种用于测量在高温环境中的压力的​​压力传感器组件,该压力传感器组件采用在一端由声学微滤器端接的细长管。 微滤器具有从一端延伸到另一端的多个孔,与换能器的直径相比,每个孔具有小直径,并且阻尼器用于吸收以有限或无反射的方式撞击在其上的声波。 为了改善声波的吸收,细长管可以是锥形的和/或安装到支撑块上并进一步卷曲以减小装置的整体尺寸和质量。 具有隔膜齐平的压力传感器可以安装到细长管并延伸到管的内壁。 热气体通过细长管传播,其相应的压力由传感器测量。 声学滤波器用于吸收由热气体产生的声波,因此能够使压力传感器主要响应于与燃气轮机操作相关联的高频波。
    • 78. 发明授权
    • Apparatus and method for eliminating varying pressure fluctuations in a pressure transducer
    • 用于消除压力传感器中变化的压力波动的装置和方法
    • US07921724B2
    • 2011-04-12
    • US12574587
    • 2009-10-06
    • Anthony D. KurtzRichard MartinRobert GardnerAdam Kane
    • Anthony D. KurtzRichard MartinRobert GardnerAdam Kane
    • G01L9/06
    • G01L19/0609G01L13/025
    • A single pressure sensing capsule has a reference pressure ported to the rear side of a silicon sensing die. The front side of the silicon sensing die receives a main pressure at another port. The silicon sensing die contains a full Wheatstone bridge on one of the surfaces and within the active area designated as the diaphragm area. Thus, the difference of the main and reference pressure results in the sensor providing an output equivalent to the differential pressure, namely the main pressure minus the reference pressure which is the stress induced in a sensing diaphragm. In any event, the reference pressure or main pressure may be derived from a pump pressure which is being monitored. The pump pressure output is subjected to a pump ripple or a sinusoidally varying pressure. In order to compensate for pump ripple, one employs a coiled tube. The tube length is selected to suppress the pump ripple as applied to the sensor die. In this manner, the pump ripple cannot cause resonance which would result in pressure amplification and which pressure amplification would destroy the sensor.
    • 单个压力感测胶囊具有移动到硅感测裸片的后侧的参考压力。 硅感测模具的前侧在另一端口处接收主压力。 硅感测裸片在其中一个表面上以及指定为隔膜区域的有源区域内包含一个完整的惠斯通电桥。 因此,主要和参考压力的差异导致传感器提供与差压相当的输出,即主压力减去在感测膜片中感应的应力的参考压力。 无论如何,参考压力或主要压力可以从正被监测的泵压力导出。 泵压力输出受到泵波动或正弦变化的压力。 为了补偿泵波动,采用一个盘管。 选择管长度以抑制应用于传感器管芯的泵波动。 以这种方式,泵波动不会引起共振,这将导致压力放大,哪个压力放大会破坏传感器。
    • 79. 发明授权
    • Leadless oil filled pressure transducer
    • 无铅充油压力传感器
    • US07921721B2
    • 2011-04-12
    • US12384828
    • 2009-04-09
    • Anthony D. Kurtz
    • Anthony D. Kurtz
    • G01L7/00
    • G01L19/0084G01L7/082G01L19/0645Y10T29/49007Y10T29/4998
    • An oil-filled pressure transducer including a glass pre-form having contact pins and a oil-filled tube, each running top to bottom through holes in the pre-form. The oil-filled tube extends beyond the top of the pre-form. A glass alignment plate has an alignment aperture designed to fit over the extended oil-filled tube and-another aperture placed at a predetermined position from the alignment aperture which is shaped to accommodate a sensor. When the plate is aligned over the oil-filled tube, a sensor module can be positioned accurately in the alignment aperture so that contact is made with the pins. A header having a central diaphragm is placed over the pre-form and the aligned sensor creating a space between the diaphragm and the sensor which is filled with oil. The transducer utilizes less oil and exhibits a lower backpressure with increasing temperature than other oil-filled pressure transducers of similar size.
    • 一种充油压力传感器,包括具有接触销的玻璃预成型件和充油管,每个都从上到下穿过预成型件的孔。 充油管延伸超过预成型件的顶部。 玻璃对准板具有设计成装配在延伸的充满油的管上的对准孔和设置在适配传感器的形状的对准孔的预定位置的另一孔。 当板在油填充管上对准时,传感器模块可以准确地定位在对准孔中,以便与销接触。 具有中心膜片的头部放置在预成型件上并且对准的传感器在隔膜和传感器之间产生充满油的空间。 传感器使用较少的油,并且随着温度升高而呈现比其他类似尺寸的充油压力传感器更低的背压。
    • 80. 发明授权
    • Method for temperature compensation of a piezoresistive gaged metal diaphragm
    • 压阻式金属膜片的温度补偿方法
    • US07918137B2
    • 2011-04-05
    • US12322817
    • 2009-02-06
    • Anthony D. KurtzJoseph Van DeWeertBoaz Kochman
    • Anthony D. KurtzJoseph Van DeWeertBoaz Kochman
    • G01L9/06
    • G01L9/065
    • There is described a temperature compensation scheme for a pressure sensitive metal diaphragm transducer. The transducer employs a Wheatstone bridge fabricated from p-type piezoresistors. The Wheatstone bridge is glassed directly onto the metal diaphragm. As the temperature of operation increases, the diaphragm exhibits a temperature variation of the Modulus of Elasticity. The Modulus of the metal diaphragm decreases with increasing temperature. Because of this, the same pressure applied to the metal diaphragm causes it to deflect further, which in turns causes increased strain applied to the bridge. Because of this effect, the sensitivity of the transducer increases with increasing temperature. A resistor is now placed in series with the Wheatstone bridge. The resistor is in series with the biasing voltage and because the TCS of the diaphragm is of an opposite sign, the series resistor has an even higher TCR in series with the bridge. In this manner, the bridge voltage is made to decrease with increasing temperature. Due to the fact that the bridge voltage decreases with increasing temperature the change in voltage compensates for the change in the Modulus of the metal diaphragm and therefore provides an accurate output at all temperatures.
    • 描述了压敏金属隔膜换能器的温度补偿方案。 传感器采用由p型压阻电阻制造的惠斯通电桥。 惠斯通电桥直接在金属隔膜上玻璃化。 随着操作温度的升高,隔膜呈现弹性模量的温度变化。 金属隔膜的模量随着温度的升高而降低。 因此,施加到金属隔膜上的相同的压力导致其进一步偏转,这又导致施加到桥的应变增加。 由于这种影响,传感器的灵敏度随着温度的升高而增加。 电阻器现在与惠斯通电桥串联放置。 电阻与偏置电压串联,并且由于隔膜的TCS具有相反的符号,所以串联电阻具有与桥连接的更高的TCR。 以这种方式,使电桥电压随着温度的升高而降低。 由于桥接电压随着温度升高而降低,所以电压的变化补偿了金属隔膜的模量的变化,因此在所有的温度下提供了精确的输出。