会员体验
专利管家(专利管理)
工作空间(专利管理)
风险监控(情报监控)
数据分析(专利分析)
侵权分析(诉讼无效)
联系我们
交流群
官方交流:
QQ群: 891211   
微信请扫码    >>>
现在联系顾问~
热词
    • 73. 发明授权
    • Pyroelectric infrared radiation detector and method of producing the same
    • 热电红外辐射探测器及其制作方法
    • US5471060A
    • 1995-11-28
    • US220450
    • 1994-03-30
    • Koji NomuraTutomu NakanishiTokumi KotaniKeizaburo Kuramasu
    • Koji NomuraTutomu NakanishiTokumi KotaniKeizaburo Kuramasu
    • G01J5/34H01L37/02G01J5/02
    • H01L37/02G01J5/34
    • A pyroelectric infrared radiation detector for detecting the intensity of infrared radiation with a pyroelectric element. The pyroelectric infrared radiation detector comprises a substrate made of a single crystal material and an infrared radiation detecting structure which comprises a first electrode disposed on the substrate, a pyroelectric thin film disposed on the first electrode, and a second electrode disposed on the pyroelectric thin film for absorption of infrared radiation. The substrate has a recess provided in the upper surface thereof where the infrared radiation detecting structure is seated. A method of producing the pyroelectric infrared radiation detector comprises a first step of forming a first electrode on one surface of a substrate, a second step of forming a pyroelectric thin film on the first electrode, a third step of forming a second electrode on the pyroelectric thin film, a fourth step of providing etching apertures in the first electrode which is open to the substrate, and a fifth step of providing by wet etching process a recess(es) in the surface of the substrate where the first electrode is seated.
    • 一种用热电元件检测红外辐射强度的热电红外辐射检测器。 热电红外线辐射检测器包括由单晶材料制成的基板和红外线检测结构,其包括设置在基板上的第一电极,设置在第一电极上的热电薄膜和设置在热电薄膜上的第二电极 用于吸收红外辐射。 衬底在其上表面设置有红外辐射检测结构就座的凹部。 制造热释电红外线检测器的方法包括:在基板的一个表面上形成第一电极的第一工序;在所述第一电极上形成热电薄膜的第二工序;在所述第一电极上形成第二电极的第三工序; 在第一电极中提供蚀刻孔的第四步骤,该第一电极对衬底开放;以及第五步骤,通过湿法蚀刻工艺提供第一电极所在的衬底表面中的凹部。