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71. 发明申请

US20210234437A1 Robot Drive with Isolated Optical Encoder 有权
公开(公告)号：US20210234437A1
公开(公告)日：2021-07-29
申请号：US17232245
申请日：2021-04-16
申请人： Persimmon Technologies Corporation
发明人： Dennis POOLE , Martin Hosek
IPC分类号： H02K11/22 , H02K5/22 , H02K7/10 , B25J13/08 , H02K5/10 , H02K5/00 , H02K9/22 , H02K41/03 , H02K21/44 , H02K5/128 , B25J9/12
摘要： An apparatus including a frame, an optical sensor connected to the frame, and an environment separation barrier. The frame is configured to be attached to a housing of a motor assembly proximate an aperture which extends through the housing. The optical sensor comprises a camera. The environment separation barrier is configured to be connected to the housing at the aperture, where the environment separation barrier is at least partially transparent and located relative to the camera to allow the camera to view an image inside the housing through the environment separation barrier and the aperture.

72. 发明申请

US20210151344A1 Robot Having Arm with Unequal Link Lengths 有权
公开(公告)号：US20210151344A1
公开(公告)日：2021-05-20
申请号：US17155185
申请日：2021-01-22
申请人： Persimmon Technologies Corporation
发明人： Martin HOSEK
IPC分类号： H01L21/687 , B25J18/04 , H01L21/677 , B25J9/04
摘要： An apparatus including at least one drive; a first robot arm having a first upper arm, a first forearm and a first end effector. The first upper arm is connected to the at least one drive at a first axis of rotation. A second robot arm has a second upper arm, a second forearm and a second end effector. The second upper arm is connected to the at least one drive at a second axis of rotation which is spaced from the first axis of rotation. The first and second robot arms are configured to locate the end effectors in first retracted positions for stacking substrates located on the end effectors at least partially one above the another. The first and second robot arms are configured to extend the end effectors from the first retracted positions in a first direction along parallel first paths located at least partially directly one above the other. The first and second robot arms are configured to extend the end effectors in at least one second direction along second paths spaced from one another which are not located above one another. The first upper arm and the first forearm have different effective lengths. The second upper arm and the second forearm have different effective lengths.

73. 发明申请

US20210111052A1 Substrate Transport Vacuum Platform 有权
公开(公告)号：US20210111052A1
公开(公告)日：2021-04-15
申请号：US17130262
申请日：2020-12-22
申请人： Persimmon Technologies Corporation
发明人： Christopher Hofmeister , Martin Hosek
IPC分类号： H01L21/677 , B25J9/04
摘要： A transport apparatus including a robot drive; an arm having a first end connected to the robot drive; and at least one end effector connected to a second end of the arm. The arm includes at least three links connected in series to form the arm. The arm is configured to be moved by the robot drive to move the at least one end effector among load locks and two or more sets of opposing process modules.

74. 发明授权

US10476324B2 Hybrid field electric motor 有权
公开(公告)号：US10476324B2
公开(公告)日：2019-11-12
申请号：US13799449
申请日：2013-03-13
申请人： Persimmon Technologies Corporation
发明人： Martin Hosek , Sripati Sah
IPC分类号： H02K1/02 , H02K1/27 , H02K21/24 , H02K1/20 , H02K1/14 , H02K21/12 , H02K21/14 , H02K21/44 , H02K1/32 , H02K19/10
摘要： A hybrid field electric motor includes a rotor with a rotor core rotating about an axial axis and having a rotor surface with at least one sloping edge face and a radial edge face. The stator includes a stator core and radial pole faces spaced by a gap from the radial edge face of the rotor for radially directing flux into the rotor core. The stator has sloping pole faces spaced from the sloping edge face of the rotor core for flux directed into the rotor core at an angle between radial and axial. The rotor core and/or stator core are made of a soft magnetic composite material for flux in inure than one plane in the core(s).

75. 发明授权

US09202735B2 Wafer transport system 有权
公开(公告)号：US09202735B2
公开(公告)日：2015-12-01
申请号：US14708644
申请日：2015-05-11
申请人： Persimmon Technologies Corporation
发明人： Martin Hosek
IPC分类号： B65G35/00 , H01L21/677 , F16D3/00
CPC分类号： H01L21/67709 , F16D3/00 , H01L21/67706 , Y10T464/30
摘要： A substrate transport system includes a substrate cart inside a chamber and a linearly driven shuttle outside the chamber configured to levitate the substrate cart into a non contact, spaced relationship with respect to outwardly opposing sides of an interior wall of the chamber and to linearly drive the substrate cart within the chamber.

76. 发明申请

US20140017056A1 LINEAR ROBOT ARM WITH MULTIPLE END EFFECTORS 审中-公开
标题翻译：线性机器人臂与多个终端效应器
公开(公告)号：US20140017056A1
公开(公告)日：2014-01-16
申请号：US13796578
申请日：2013-03-12
申请人： PERSIMMON TECHNOLOGIES CORPORATION
发明人： Martin Hosek , Dennis Poole , Christopher Hofmeister
IPC分类号： B25J11/00
CPC分类号： B25J11/0095 , Y10S901/19
摘要： A substrate transport apparatus including a lower linearly driven effector structure with spaced paddles, and an upper linearly driven end effector structure with spaced paddles and no rotating joints above a paddle of the lower end effector structure. A drive subsystem is configured to linearly drive the lower end effector structure and to linearly drive the upper end effector structure independent of the lower end effector structure.
摘要翻译：一种衬底输送设备，包括具有间隔叶片的下线性驱动效应器结构，以及具有间隔开的叶片的上线性驱动末端执行器结构，并且在下端执行器结构的桨叶上方没有旋转接头。驱动子系统被配置为线性地驱动下端执行器结构并且独立于下端执行器结构直线地驱动上端执行器结构。

77. 发明申请

US20130071208A1 WAFER TRANSPORT SYSTEM 有权
公开(公告)号：US20130071208A1
公开(公告)日：2013-03-21
申请号：US13621353
申请日：2012-09-17
申请人： Persimmon Technologies Corporation
发明人： Martin Hosek
IPC分类号： H01L21/677
CPC分类号： H01L21/67709 , F16D3/00 , H01L21/67706 , Y10T464/30
摘要： A substrate transport system includes a substrate cart inside a chamber and a linearly driven shuttle outside the chamber configured to levitate the substrate cart into a non contact, spaced relationship with respect to outwardly opposing sides of an interior wall of the chamber and to linearly drive the substrate cart within the chamber.

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