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    • 71. 发明申请
    • METHOD AND APPARATUS FOR STABLY EVAPORATION DEPOSITING UNIFORM THIN FILMS
    • 用于稳定蒸发沉积均匀薄膜的方法和装置
    • US20160097117A1
    • 2016-04-07
    • US14716882
    • 2015-05-20
    • NATIONAL CHUNG-SHAN INSTITUTE OF SCIENCE AND TECHNOLOGY
    • SHIH-CHANG LIANGWEI-CHIEH HUANGCHAO-NAN WEICUO-YO NIHUI-YUN BOR
    • C23C14/24
    • C23C14/24C23C14/243
    • In a method and apparatus for evaporation depositing uniform thin films, a film is deposited on a substrate of a vacuum environment while maintaining a constant deposition rate. A cover is installed on a wall of the evaporation vessel. When the evaporation material is heated to an evaporation state and the interior of the evaporation vessel reaches a first vapor saturation pressure, the vapor of the evaporation material flows towards a pressure stabilizing chamber. When the pressure stabilizing chamber reaches a second vapor saturation pressure which is smaller than the first vapor saturation pressure, the vacuum environment has a vacuum background pressure which is smaller than the second vapor saturation pressure, so that the evaporation material vapor flows from the pressure stabilizing chamber towards the vacuum environment at constant rate due to the pressure difference, so as to evaporate the substrate.
    • 在用于蒸发沉积均匀薄膜的方法和装置中,在保持恒定沉积速率的同时,将膜沉积在真空环境的基板上。 一个盖子安装在蒸发容器的墙壁上。 当蒸发材料被加热到蒸发状态并且蒸发容器的内部达到第一蒸气饱和压力时,蒸发材料的蒸气朝向压力稳定室流动。 当压力稳定室达到小于第一蒸汽饱和压力的第二蒸气饱和压力时,真空环境的真空背景压力小于第二蒸汽饱和压力,使得蒸发材料蒸汽从压力稳定 由于压力差,以恒定速率朝向真空环境室,以便使基板蒸发。
    • 76. 发明申请
    • HYDRAULIC ENERGY CONVERSION DEVICE
    • 液压能源转换装置
    • US20150136550A1
    • 2015-05-21
    • US14542718
    • 2014-11-17
    • National Chung Shan Institute Of Science and Technology
    • CHUEN-AN CHENCHE-PIN CHENCHIEH TUNGTE-MING YEHMIN-HUA SHIH
    • B60G13/14H02K7/00
    • H02K7/003F03B13/00F05B2220/60F16F9/10F16F9/32Y02B10/50
    • A hydraulic energy conversion device includes a main body being an annular member having a central hole, an output shaft mounted in the central hole of the main body with a centerline extended perpendicular to the central hole; a fixing plate located at an end of the main body and provided with a plurality of passage holes; an outer cover located at another end of the main body opposite to the fixing plate and having a central opening for the output shaft to outwardly extended through the outer cover; and a plurality of vanes circumferentially spaced on the output shaft to locate in a space defined between the main body, the fixing plate and the outer cover. The hydraulic energy conversion device is mounted in a hydraulic shock absorber to convert hydraulic energy into mechanical energy and output the same without hindering the hydraulic shock absorber from normal operation.
    • 一种液压能量转换装置,包括主体,该主体是具有中心孔的环形构件,输出轴安装在主体的中心孔中,中心线垂直于中心孔延伸; 固定板,位于主体的端部并设有多个通孔; 位于所述主体的与所述固定板相对的另一端的外盖,并且具有用于所述输出轴向外延伸穿过所述外盖的中心开口; 以及在输出轴上周向间隔开的多个叶片,以定位在主体,固定板和外盖之间限定的空间中。 液压能量转换装置安装在液压缓冲器中以将液压能转换为机械能并将其输出,而不会妨碍液压减震器正常工作。
    • 78. 发明申请
    • Vapor Deposition Equipment for Fabricating CIGS Film
    • 用于制造CIGS膜的气相沉积设备
    • US20150101534A1
    • 2015-04-16
    • US14054905
    • 2013-10-16
    • Chung-Shan Institute of Science and Technology
    • Wen-Chueh PanTsang-Ming HsuJen-Chieh LiTsan-Tung ChenChui-Yu ChiuShih-Shan Wei
    • H01L31/18
    • H01L31/18C23C14/0623C23C14/562C23C14/568H01L31/0322H01L31/206Y02E10/541Y02P70/521
    • The present invention relates to a vapor deposition equipment for fabricating CIGS film, in which a Se vapor deposition module, a In/Ga/In linear vapor deposition module and a Cu linear vapor deposition module are integrated in an identical vacuum chamber, used for fabricating the CIGS absorber layers on a flexible solar cell substrate by an automatic manufacturing process in accordance with an unwinding module, a heating device, a heat reducing device, a speed-controlling roller module, a cooling module, and a winding module. Moreover, in the present invention, a film thickness measuring module is used for measures the thickness of the CIGS chalcopyrite crystalline film on the flexible solar cell substrate, and the thickness data of the CIGS chalcopyrite crystalline film would be transmitted to the electromechanical control module for being references of the parameter modulation of following fabricating process, and such way is so-called APC (Advanced Process Control) system.
    • 本发明涉及一种用于制造CIGS膜的气相沉积设备,其中Se蒸汽沉积模块,In / Ga / In线性气相沉积模块和Cu线性气相沉积模块集成在相同的真空室中,用于制造 通过根据退绕模块的自动制造工艺,加热装置,减热装置,速度控制辊模块,冷却模块和卷绕模块,在柔性太阳能电池基板上的CIGS吸收层。 此外,在本发明中,使用膜厚测量模块来测量柔性太阳能电池基板上的CIGS黄铜矿结晶膜的厚度,并且将CIGS黄铜矿结晶膜的厚度数据传输到机电控制模块 作为以下制造工艺的参数调制的参考,所谓的APC(Advanced Process Control)系统。