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    • 71. 发明授权
    • Particle beam device having a detector arrangement
    • 具有检测器装置的粒子束装置
    • US08901510B2
    • 2014-12-02
    • US13430913
    • 2012-03-27
    • Dietmar DönitzChristian Wagner
    • Dietmar DönitzChristian Wagner
    • G21K1/08H01J37/28
    • H01J37/28
    • A particle beam device has a first column with a first beam axis, the first column having a first particle beam generator and a first objective lens for focusing the first particle beam on an object. A second column with a second beam axis is provided, the second column having a second particle beam generator and a second objective lens for focusing the second particle beam on the object. A detector, having a detection axis, detects interacting particles and/or radiation. The first beam axis and the second beam axis define a first angle, different from 0° and from 180°. The first and second beam axes are situated in a first plane. The detection axis of the detector and the first beam axis are situated in a second plane. The first plane and the second plane define a second angle having an absolute value in the range of 65° to 80°.
    • 粒子束装置具有具有第一光束轴的第一列,第一列具有第一粒子束发生器和用于将第一粒子束聚焦在物体上的第一物镜。 提供具有第二光束轴的第二列,第二列具有第二粒子束发生器和用于将第二粒子束聚焦在物体上的第二物镜。 具有检测轴的检测器检测相互作用的颗粒和/或辐射。 第一光束轴线和第二光束轴线限定不同于0°和180°的第一角度。 第一和第二光束轴位于第一平面中。 检测器和第一光束轴的检测轴位于第二平面中。 第一平面和第二平面限定了绝对值在65°至80°范围内的第二角度。
    • 72. 发明申请
    • USE OF A SOLID FOR THE PRODUCTION OF A PROPELLANT POWDER
    • 用于生产丙烯酸粉末的固体的使用
    • US20140326370A1
    • 2014-11-06
    • US14128443
    • 2012-03-28
    • Beat VogelsangerBruno OssolaAlexander HuberChristian WagnerOliver Hampel
    • Beat VogelsangerBruno OssolaAlexander HuberChristian WagnerOliver Hampel
    • C06B45/04B29B13/02
    • C06B45/04B29B13/021C06B21/0083C06B45/00C06B45/22
    • For production of a propellant charge powder, especially for medium and large calibers, in a process in which the solid is incorporated together with a liquid in a mixing and drying process into the channels of a granular green material and compacted therein to form a plug, the solid, under otherwise identical process conditions, is set within a setting range of >0-0.5% by weight based on the weight of the granular green material. For more significant lowering of the maximum pressure within an upper temperature range and for more significant raising of the maximum pressure within a lower temperature range of the application temperature range, an increased amount of solid is used. The solid is a substance whose melting point is at least 10° C., especially 20° C., above a maximum use temperature of the propellant charge powder and which is inert toward the granular green material. Since the plug consists virtually exclusively of inert material, a high ballistic stability is achieved.
    • 为了生产特别是用于中等和大口径的推进剂装料粉末,其中将固体与混合和干燥过程中的液体一起加入到颗粒状绿色材料的通道中并压实在其中以形成塞子的过程中, 在其他相同的工艺条件下,基于颗粒状绿色材料的重量将固体设定在> 0-0.5重量%的设定范围内。 为了在更高的温度范围内更大程度地降低最大压力,并且在施加温度范围的较低温度范围内更大程度地提高最大压力,则使用增加量的固体。 固体是一种物质,其熔点至少为10℃,特别是20℃,高于推进剂装料粉末的最大使用温度,并且对颗粒状绿色材料是惰性的。 由于插头几乎完全由惰性材料组成,所以实现了高的弹道稳定性。
    • 73. 发明授权
    • Positioning device
    • 定位装置
    • US08500435B2
    • 2013-08-06
    • US12308437
    • 2007-06-01
    • Witold NeterHelmut ThoemmesChristian Wagner
    • Witold NeterHelmut ThoemmesChristian Wagner
    • B29C49/64
    • B29C45/7207B29C49/6427B29C2045/7214B29K2105/258
    • A system for the after-treatment of parisons (7) produced in an injection molding mold, comprising at least two after-treatment tools. To provide a system for the after-treatment of parisons produced in an injection molding mold, by means of which a plurality of after-treatment tools can be easily positioned, it is proposed in accordance with the invention that there is provided a positioning device for positioning the first after-treatment tool in at least one positioning direction, and the at least two after-treatment tools are connected together so that with the positioning device for positioning the first after-treatment tool at least one further after-treatment tool can be positioned by suitable positioning of the first after-treatment tool.
    • 一种用于在注塑模具中生产的用于后处理型坯(7)的系统,其包括至少两种后处理工具。 为了提供一种用于在注模模具中生产的型坯的后处理系统,通过该系统可以容易地定位多个后处理工具,根据本发明提出了一种用于 将所述第一后处理工具定位在至少一个定位方向上,并且所述至少两个后处理工具连接在一起,使得通过所述定位装置来定位所述第一后处理工具,所述至少一个后处理工具可以是 通过第一后处理工具的适当定位来定位。
    • 80. 再颁专利
    • Projection exposure system having a reflective reticle
    • 具有反射型掩模版的投影曝光系统
    • USRE40743E1
    • 2009-06-16
    • US10916650
    • 2004-08-11
    • Gerhard FuerterChristian WagnerUwe GoedeckeHenriette Mueller
    • Gerhard FuerterChristian WagnerUwe GoedeckeHenriette Mueller
    • G02B17/00
    • G03F7/70066G03F7/70225G03F7/70283
    • A projection exposure system for microlithography includes an illuminating system (2), a reflective reticle (5) and reduction objectives (71, 72). In the reduction objective (71, 72), a first beam splitter cube (3) is provided which superposes the illuminating beam path (100) and the imaging beam path (200). In order to obtain an almost telecentric entry at the reticle, optical elements (71) are provided between beam splitter cube (3) and the reflective reticle (5). Advantageously, the reduction objective is a catadioptric objective having a beam splitter cube (3) whose fourth unused side can be used for coupling in light. The illuminating beam path (100) can also be coupled in with a non-parallel beam splitter plate. The illuminating beam path is refractively corrected in passthrough to compensate for aberrations via the special configuration of the rear side of the beam splitter plate. Advantageously, a beam splitter plate of this kind is used within a reduction objective in lieu of a deflecting mirror and only refractive components are introduced between the beam splitter plate and the reflective reticle.
    • 用于微光刻的投影曝光系统包括照明系统(2),反射掩模版(5)和还原物镜(71,72)。 在还原物镜(71,72)中,设有使照明光束路径(100)和成像光束路径(200)叠置的第一分束器立方体(3)。 为了在掩模版处获得几乎远心的入射,在分束器立方体(3)和反射标线片(5)之间提供光学元件(71)。 有利地,还原目标是具有分束器立方体(3)的反射折射物镜,其中第四未使用侧可以用于光耦合。 照明光束路径(100)也可以与非平行光束分离板耦合。 通过透射度折射校正照明光束路径,以通过分束板后侧的特殊配置补偿像差。 有利地,这种分束板在减速目标下用于偏转反射镜,并且只有折射分量被引入分束板和反射光罩之间。