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61. 发明授权

US06405584B1 Probe for scanning probe microscopy and related methods 有权
标题翻译：扫描探针显微镜和相关方法的探针
公开(公告)号：US06405584B1
公开(公告)日：2002-06-18
申请号：US09412130
申请日：1999-10-05
申请人： Jeffrey Bruce Bindell , Erik Cho Houge , Larry E. Plew , Terri Lynn Shofner , Fred Anthony Stevie
发明人： Jeffrey Bruce Bindell , Erik Cho Houge , Larry E. Plew , Terri Lynn Shofner , Fred Anthony Stevie
IPC分类号： G01B528
CPC分类号： G01Q60/38 , Y10S977/862 , Y10S977/878
摘要： A scanning probe microscope includes a sensor head adjacent a stage for holding a sample, a scanning actuator for positioning the sensor head relative to the sample, and a probe carried by the sensor head. The probe preferably includes a base connected to the sensor head, a shank extending from the base at an angle offset from perpendicular to the base, and a tip connected to a distal end of the shank for contacting the sample. The angle is preferably in a range of 5 to 20°. The tip is preferably laterally offset from the base to permit viewing of the tip without interference from the shank and the base. Thus, the location of the probe tip relative to the sample may be more easily determined.
摘要翻译：扫描探针显微镜包括与用于保持样品的台相邻的传感器头，用于相对于样品定位传感器头的扫描致动器和由传感器头承载的探针。探针优选地包括连接到传感器头的基座，从基部延伸的角度与垂直于基部的角度偏离的杆，以及连接到柄的远端以用于接触样本的尖端。该角度优选在5〜20°的范围内。顶端优选地从基部侧向偏移以允许观察尖端而不受到柄和基部的干扰。因此，可以更容易地确定探针尖端相对于样品的位置。

62. 发明授权

US06218264B1 Method of producing a calibration standard for 2-D and 3-D profilometry in the sub-nanometer range 失效
标题翻译：在亚纳米范围内制作2-D和3-D轮廓测量法的校准标准的方法
公开(公告)号：US06218264B1
公开(公告)日：2001-04-17
申请号：US09314410
申请日：1999-05-19
申请人： Johann W. Bartha , Thomas Bayer , Johann Greschner , Martin Nonnenmacher , Helga Weiss
发明人： Johann W. Bartha , Thomas Bayer , Johann Greschner , Martin Nonnenmacher , Helga Weiss
IPC分类号： H01L21311
CPC分类号： G01Q40/02 , Y10S438/975 , Y10S977/852 , Y10S977/878 , Y10T428/24926
摘要： A calibration standard comprises a supporting structure (1) of single crystal material with at least one pair of different kinds of structures consisting of a raised line (2) and a trench (3). These structures have the identical width in the range of about 500 nm. The single crystal material preferably is silicon with (110)-orientation. A method of producing the calibration standard comprises the steps: providing two polished wafers of the same single crystal material and with the same crystal orientation, forming an oxide layer on the polished surface of the first wafer, bonding the second wafer to the first oxidized wafer with the polished surfaces of the wafers facing each other, cutting the bonded structure transverse to the polished surfaces, selectively etching both the wafers to a defined depth to expose a portion of the oxide layer, masking the portions of the oxide layer now representing the raised line (2) and selectively etching the oxide layer in the unmasked areas to a defined depth to form the trench (3). The calibration standard overcomes the problem of measuring the diameter of an ultrafine tip for AFM/STM profilometry in the sub-nanometer range.
摘要翻译：校准标准包括具有由凸起线（2）和沟槽（3）组成的至少一对不同种类的结构的单晶材料的支撑结构（1）。这些结构具有在约500nm范围内相同的宽度。单晶材料优选为具有（110）取向的硅。一种生产校准标准的方法包括以下步骤：提供相同单晶材料的两个抛光晶片并具有相同的晶体取向，在第一晶片的抛光表面上形成氧化物层，将第二晶片接合到第一氧化晶片其中晶片的抛光表面彼此面对，切割与抛光表面横向的结合结构，选择性地将两个晶片刻蚀到限定的深度以暴露氧化物层的一部分，掩盖现在代表凸起的氧化物层的部分线（2），并且将未掩模区域中的氧化物层选择性蚀刻到限定的深度以形成沟槽（3）。校准标准克服了在亚纳米范围内测量AFM / STM轮廓测量法的超细尖端直径的问题。

63. 发明授权

US5928525A Method for optical fiber with tapered end core protruding from clad 失效
标题翻译：具有从包层突出的锥形端芯的光纤的方法
公开(公告)号：US5928525A
公开(公告)日：1999-07-27
申请号：US95352
申请日：1998-06-09
申请人： Motoichi Ohtsu , Shuji Mononobe , Uma Maheswari Rajagopalan
发明人： Motoichi Ohtsu , Shuji Mononobe , Uma Maheswari Rajagopalan
IPC分类号： G01Q60/18 , G02B6/24 , G02B6/245 , G02B6/42 , C03C25/06
CPC分类号： G02B6/4203 , B82Y20/00 , B82Y35/00 , G01Q60/22 , G02B6/245 , G02B6/241 , Y10S977/862 , Y10S977/878
摘要： An optical fiber made up of a core for propagating the light and a clad covering the core for confining the light propagated in the core. The optical fiber has a tapering protrusion at the apex for entrance and exiting of light. The optical fiber is used in a photon scanning tunneling microscope detecting the evanescent light localized in an area smaller in size than the wavelength of light on the surface of an sample as an optical probe disposed in proximity to the surface of the sample for scattering the evanescent light for detecting the scattered light. The optical fiber is optically coupled to an optical waveguide for constituting an optically coupled element. With this optically coupled element, a protrusion of the optical fiber operates as a collection unit for collecting the light propagated in the core. The light collected by the protrusion enters the optical waveguide.
摘要翻译：由用于传播光的芯构成的光纤和覆盖芯的包层以限制在芯中传播的光。光纤在顶点处具有锥形突起，用于入射和离开光。该光纤用于光子扫描隧道显微镜，其检测位于比样品表面上的光的波长小的区域中的ev逝光，作为设置在样品表面附近的光学探针，用于散射ev逝用于检测散射光的光。光纤光学耦合到光波导，用于构成光耦合元件。利用该光耦合元件，光纤的突起作为用于收集在芯中传播的光的收集单元。由突起收集的光进入光波导。

64. 发明授权

US5844251A High aspect ratio probes with self-aligned control electrodes 失效
标题翻译：具有自对准控制电极的高纵横比探针
公开(公告)号：US5844251A
公开(公告)日：1998-12-01
申请号：US573308
申请日：1995-12-15
申请人： Noel C. MacDonald , Z. Lisa Zhang
发明人： Noel C. MacDonald , Z. Lisa Zhang
IPC分类号： B81B1/00 , H01L21/00 , H01L29/06
CPC分类号： G01Q60/04 , B82Y35/00 , G01Q60/16 , G01Q60/38 , G01Q70/10 , Y10S977/878
摘要： A high aspect ratio field emission or tunnelling probe is fabricated utilizing a single crystal reactive etching and metallization process. The resulting field emission probes have self-aligned single crystal silicon sharp tips, high aspect ratio supporting posts for the tips, and integrated, self-aligned gate electrodes surrounding an electrically isolated from the tips. The gate electrodes are spaced from the tips by between 200 and 800 nm and metal silicide or metal can be applied on the tips to achieve emitter turn on at low operational gate voltages. The resulting tips have a high aspect ratio for use in probing various surface phenomena, and for this purpose, the probes can be mounted on or integrated in a three-dimensional translator for mechanical scanning across the surface and for focusing by adjusting the height of the emitter above the surface.
摘要翻译：使用单晶反应蚀刻和金属化工艺制造高纵横比场致发射或隧道探针。所产生的场致发射探针具有自对准单晶硅尖尖，用于尖端的高纵横比支撑柱，以及围绕与尖端电隔离的集成的自对准栅电极。栅电极与尖端间隔200至800nm，并且金属硅化物或金属可以施加在尖端上，以在低操作栅极电压下实现发射极导通。所得到的尖端具有高的纵横比用于探测各种表面现象，并且为此目的，探针可以安装在三维平移机上或集成在三维平移机中，用于穿过表面进行机械扫描，并通过调整高度来进行聚焦发射体在表面以上。

65. 发明授权

US5812723A Optical fiber with tapered end of core protruding from clad 失效
标题翻译：带有锥形末端的光纤从包层突出
公开(公告)号：US5812723A
公开(公告)日：1998-09-22
申请号：US704615
申请日：1997-01-17
申请人： Motoichi Ohtsu , Shuji Mononobe , Uma Maheswari Rajagopalan
发明人： Motoichi Ohtsu , Shuji Mononobe , Uma Maheswari Rajagopalan
IPC分类号： G01Q60/18 , G02B6/24 , G02B6/245 , G02B6/42 , G02B6/02
CPC分类号： G02B6/4203 , B82Y20/00 , B82Y35/00 , G01Q60/22 , G02B6/245 , G02B6/241 , Y10S977/862 , Y10S977/878
摘要： An optical fiber made up of a core for propagating the light and a clad covering the core for confining the light propagated in the core. The optical fiber has a tapering protrusion at the apex for entrance and exiting of light. The optical fiber is used in a photon scanning tunneling microscope detecting the evanescent light localized in an area smaller in size than the wavelength of light on the surface of an sample as an optical probe disposed in proximity to the surface of the sample for scattering the evanescent light for detecting the scattered light. The optical fiber is optically coupled to an optical waveguide for constituting an optically coupled element. With this optically coupled element, a protrusion of the optical fiber operates as a collection unit for collecting the light propagated in the core. The light collected by the protrusion enters the optical waveguide.
摘要翻译： PCT No.PCT / JP94 / 00906 Sec。 371日期1997年1月17日 102（e）日期1997年1月17日PCT Filed 1994年6月3日PCT公布。第WO95 / 25972号公报日期1995年9月28日由用于传播光的芯构成的光纤和覆盖芯的包层以限制在芯中传播的光。光纤在顶点处具有锥形突起，用于入射和离开光。该光纤用于光子扫描隧道显微镜，其检测位于比样品表面上的光的波长小的区域中的ev逝光，作为设置在样品表面附近的光学探针，用于散射ev逝用于检测散射光的光。光纤光学耦合到光波导，用于构成光耦合元件。利用该光耦合元件，光纤的突起作为用于收集在芯中传播的光的收集单元。由突起收集的光进入光波导。

66. 发明授权

US5548117A Probe for a scanning tunneling microscope and method of manufacturing a probe 失效
标题翻译：用于扫描隧道显微镜的探头和制造探头的方法
公开(公告)号：US5548117A
公开(公告)日：1996-08-20
申请号：US308914
申请日：1994-09-20
申请人： Tohru Nakagawa
发明人： Tohru Nakagawa
IPC分类号： B01J20/28 , C25D5/02 , G01B7/34 , G01B21/30 , G01N27/00 , G01N27/416 , G01Q60/04 , G01Q60/16 , H01J9/14 , H01J37/28 , H01J37/26
CPC分类号： G01Q70/18 , B82Y35/00 , G01Q60/16 , B82Y30/00 , Y10S977/877 , Y10S977/878 , Y10S977/879
摘要： Disclosed is a probe for use in a scanning tunneling microscope which can measure a macromolecule, i.e., a protein molecule. The probe is manufactured by covering a metal wire having a sharp end with a thin organic film, removing an end of the metal wire by an electric field evaporation process, electrodepositing metal ions on the metal wire and removing a portion of the organic film. A monomolecular film is formed on the surface of a metal wire by chemically adsorbing a chlorosilane based chemical adsorbent. Only a tip of the chemically adsorbed film is removed by the electric field evaporation procedure, and the metal ions are electrodeposited on the tip of the metal wire. As a result, a sharp metal tip is formed. After that, the chemically adsorbed film is removed by alkyl treatment.
摘要翻译：公开了一种用于扫描隧道显微镜的探针，其可以测量大分子，即蛋白质分子。探针通过用有机薄膜覆盖具有尖端的金属线，通过电场蒸发处理去除金属线的端部，在金属线上电沉积金属离子并除去一部分有机膜来制造探针。通过化学吸附氯硅烷系化学吸附剂，在金属丝的表面形成单分子膜。仅通过电场蒸发方法去除化学吸附膜的尖端，金属离子电沉积在金属丝的顶端。结果，形成尖锐的金属尖端。之后，通过烷基处理除去化学吸附的膜。

67. 发明授权

US5544617A Method for producing single crystal, and needle-like single crystal 失效
标题翻译：单晶方法，针状单晶
公开(公告)号：US5544617A
公开(公告)日：1996-08-13
申请号：US422167
申请日：1995-04-14
申请人： Yoshinori Terui , Ryuichi Terasaki
发明人： Yoshinori Terui , Ryuichi Terasaki
IPC分类号： C30B25/18 , C30B11/00 , C30B11/12 , C30B29/06 , C30B29/62 , G01R1/067 , C30B25/04
CPC分类号： C30B11/00 , C30B11/12 , C30B29/60 , Y10S977/878 , Y10S977/879
摘要： A method for producing a single crystal, which comprises (1) placing a metal layer as a pattern at a desired position on the surface of a single crystal substrate, (2) etching the surface of the single crystal substrate around the pattern, and (3) in a raw material gas atmosphere containing an element or elements constituting the single crystal, taking the element or elements in the metal layer at the pattern and permitting a needle-like single crystal to grow perpendicularly.
摘要翻译：一种单晶的制造方法，其特征在于，包括：（1）将金属层作为图案放置在单晶基板的表面的期望位置，（2）在图案周围蚀刻单晶基板的表面，以及（ 3）在含有构成单晶的元素的原料气体气氛中，以图案取出金属层中的元素，并允许针状单晶垂直生长。

68. 发明授权

US5410910A Cryogenic atomic force microscope 失效
标题翻译：低温原子力显微镜
公开(公告)号：US5410910A
公开(公告)日：1995-05-02
申请号：US171839
申请日：1993-12-22
申请人： Jie Yang , Andrew P. Somlyo , Zhiferg Siao , Jianxun Mou
发明人： Jie Yang , Andrew P. Somlyo , Zhiferg Siao , Jianxun Mou
IPC分类号： G01Q30/10 , B01L7/00 , G01B21/30 , G01Q60/00 , H01J37/20 , G01B5/28 , G01N23/00 , H01J37/252
CPC分类号： G01Q30/10 , B82Y35/00 , H01J37/20 , H01J2237/2001 , Y10S977/849 , Y10S977/851 , Y10S977/863 , Y10S977/871 , Y10S977/873 , Y10S977/878 , Y10S977/881
摘要： An atomic force microscope system is enclosed in a crogenic liquid dewar and operated at about ambient pressure or slightly above ambient pressure. Vaporization of the cryogenic liquid is used for cooling of the atomic force microscope system. Nitrogen, as well as other cryogenic liquids can be used, as for example helium, fluorinated hydrocarbons, isopentane, and liquid propane. Bubbling of the liquid nitrogen, which can produce excessive vibration and prevent atomic resolution for very low temperature experiments, is overcome through the pressurizing of the dewar to several psi.
摘要翻译：原子力显微镜系统封闭在致动液体杜瓦瓶中，并在大约环境压力或略高于环境压力下操作。低温液体的蒸发用于冷却原子力显微镜系统。可以使用氮气以及其它低温液体，例如氦，氟化烃，异戊烷和液体丙烷。通过将杜瓦瓶加压至几psi可克服液氮的鼓泡，这种液氮可以产生过大的振动并防止原子分辨率达到非常低的温度。

69. 发明授权

US5382795A Ultrafine silicon tips for AFM/STM profilometry 失效
标题翻译：用于AFM / STM轮廓测定的超细硅胶头
公开(公告)号：US5382795A
公开(公告)日：1995-01-17
申请号：US209682
申请日：1994-03-10
申请人： Thomas Bayer , Johann Greschner , Yves Martin , Helga Weiss , Hemantha K. Wickramasinghe , Olaf Wolter
发明人： Thomas Bayer , Johann Greschner , Yves Martin , Helga Weiss , Hemantha K. Wickramasinghe , Olaf Wolter
IPC分类号： G01B7/34 , G01B21/30 , G01N27/00 , G01Q10/04 , G01Q60/04 , G01Q60/16 , G01Q60/38 , G01Q70/10 , H01J37/28 , H01L21/00 , H01L21/66
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q60/04 , G01Q60/16 , G01Q70/10 , Y10S977/878
摘要： An ultrafine tip for AFM and STM profilometry of trenches having sidewalls. The tip includes a lateral circumferential edge protrusion to allow profilometry of the sidewalls of a trench located in a semiconductor or insulator substrate.
摘要翻译：具有侧壁的沟槽的AFM和STM轮廓测量法的超细尖端。尖端包括侧向周向边缘突起，以允许位于半导体或绝缘体衬底中的沟槽的侧壁的轮廓测量。

70. 发明授权

US5357109A Probe for scanning tunneling microscope and manufacturing method thereof 失效
标题翻译：扫描隧道显微镜探针及其制造方法
公开(公告)号：US5357109A
公开(公告)日：1994-10-18
申请号：US65899
申请日：1993-05-25
申请人： Osamu Kusumoto
发明人： Osamu Kusumoto
IPC分类号： C01G9/02 , G01B7/34 , G01B21/00 , G01N27/00 , G01N37/00 , G01Q30/10 , G01Q60/16 , G01Q70/08 , H01J9/14 , H01J37/26 , H01J37/28
CPC分类号： G01Q60/16 , B82Y15/00 , B82Y35/00 , G01Q70/12 , Y10S977/878 , Y10S977/879
摘要： A probe for a scanning tunneling microscope and manufacturing method therefor in which tetrapod-shaped whiskers of zinc oxide are placed on a conductive material which is adhered on a tip part of a fine wire of platinized iridium in a manner that three legs of the tetrapod contact the conductive material; the conductive material is heated for melting only the conductive material; and cooling the melted conductive material for being hardened, thereby the stem part of the whisker is inserted into the conductive material.
摘要翻译：用于扫描隧道显微镜的探针及其制造方法，其中将氧化锌的四足形晶须放置在导电材料上，该导电材料以四极接触的三条腿的方式粘附在镀铂铱细线的末端部分导电材料; 导电材料被加热仅熔化导电材料; 并将熔融的导电材料冷却以进行硬化，从而将晶须的茎部插入到导电材料中。

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