专利快速检索-快速检索全球专利，免费商用专利数据库-IPRDB

61. 发明授权

US5189906A Compact atomic force microscope 失效
标题翻译：紧凑原子力显微镜
公开(公告)号：US5189906A
公开(公告)日：1993-03-02
申请号：US687684
申请日：1991-04-19
申请人： Virgil B. Elings , John A. Gurley , Dror Sarid
发明人： Virgil B. Elings , John A. Gurley , Dror Sarid
IPC分类号： G01B21/30 , G01Q20/02 , G01Q60/24 , G01Q70/02
CPC分类号： G01Q60/38 , B82Y35/00 , G01Q20/02 , G01Q70/02 , Y10S977/87
摘要： This is an atomic force microscope in which the sensor can be built as a very small integrated structure. The sensor utilizes optical interference and can be operated in either the contact mode for high resolution or in the non-contact mode to measure electric and magnetic fields. One configuration of this microscope is a stand-alone configuration in which the microscope can be placed on or be suspended above large samples for scanning of small local areas thereof. The sensor is built into a scanner so that the sensor can be scanned over a stationary sample.
摘要翻译：这是一种原子力显微镜，其中传感器可以构建为非常小的集成结构。传感器利用光学干涉，可以以高分辨率的接触模式或非接触模式来操作，以测量电场和磁场。该显微镜的一个结构是独立的构造，其中显微镜可以放置在大样本上或悬挂在大样本上以扫描其小局部区域。传感器内置在扫描仪中，以便传感器可以扫描在静止的样品上。

62. 发明申请

US20040250608A1 Removable probe sensor assembly and scanning probe microscope 失效
标题翻译：可拆卸探针传感器组件和扫描探针显微镜
公开(公告)号：US20040250608A1
公开(公告)日：2004-12-16
申请号：US10850932
申请日：2004-08-10
发明人： David J. Ray
IPC分类号： G01B005/28
CPC分类号： G01Q20/02 , G01Q70/02 , Y10S977/868 , Y10S977/87
摘要： A scanning force microscope system that employs a laser (76) and a probe assembly (24) mounted in a removable probe illuminator assembly (22), that is mounted to the moving portion of a scanning mechanism. The probe illuminator assembly may be removed from the microscope to permit alignment of said laser beam onto a cantilever (30) after removal. This prevents damage to, and shortens alignment time of, the microscope during replacement and alignment of the probe assembly. The scanning probe microscope assembly (240) supports a scanning probe microscope (244). Scanning probe microscope (244) holds a removable probe sensor assembly (242). Removable probe sensor assembly (242) may be transported and conveniently attached to the adjustment station (250) where the probe sensor assembly parameters may be observed and adjusted if necessary. The probe sensor assembly (242) may then be attached to the scanning probe microscope (244).
摘要翻译：一种扫描力显微镜系统，其使用安装在扫描机构的移动部分上的安装在可移除的探针照射器组件（22）中的激光器（76）和探针组件（24）。探针照明器组件可以从显微镜移除，以允许在去除之后将所述激光束对准到悬臂（30）上。这可以防止在更换和对准探头组件期间显微镜的损坏和缩短对准时间。扫描探针显微镜组件（240）支撑扫描探针显微镜（244）。扫描探针显微镜（244）保持可移除的探针传感器组件（242）。可移动的探针传感器组件（242）可以被传送并方便地附接到调节站（250），其中如果需要可以观察和调整探针传感器组件的参数。探头传感器组件（242）然后可以附接到扫描探针显微镜（244）。

63. 发明授权

US06745618B2 Scanning probe microscope 失效
标题翻译：扫描探针显微镜
公开(公告)号：US06745618B2
公开(公告)日：2004-06-08
申请号：US10193237
申请日：2002-07-12
申请人： Yukari Imai , Mari Tsugami , Hitoshi Maeda , Tohru Koyama
发明人： Yukari Imai , Mari Tsugami , Hitoshi Maeda , Tohru Koyama
IPC分类号： G01B528
CPC分类号： G01Q20/02 , G01Q60/30 , Y10S977/854 , Y10S977/87
摘要： A scanning probe microscope includes a laser diode (1a) as a light source for emitting light lower in energy level than band gap of semiconductor as a sample. Laser light (2) emitted therefrom should be of wavelength larger in value than a wavelength &lgr; calculated as follows: &lgr;=h·c/Eg where h is Planck's constant, c represents speed of light and Eg represents band gap. When the semiconductor as a sample is silicon, the band gap thereof is 1.12 eV, thus calculating the wavelength &lgr; at 1.107 &mgr;m. The laser diode (1a) should be such that the laser light (2) emitted therefrom is of wavelength larger in value than &lgr;. It is therefore allowed to avoid emission of light higher in energy level than the band gap of silicon as a sample and eventually, avoid generation of photoelectric current in the sample.
摘要翻译：扫描探针显微镜包括作为光源的激光二极管（1a），用于发射能量水平低于作为样品的半导体的带隙的光。从其发射的激光（2）的波长应大于波长λ，其计算如下：其中h为普朗克常数，c表示光速，Eg表示带隙。当作为样品的半导体是硅时，其带隙为1.12eV，从而计算1.107μm的波长λ。激光二极管（1a）应该使得从其发射的激光（2）的波长比λ值波长更大。因此，允许避免发射能量水平高于硅作为样品的带隙，并且最终避免在样品中产生光电流。

64. 发明授权

US06708556B1 Atomic force microscope and driving method therefor 失效
标题翻译：原子力显微镜及其驱动方法
公开(公告)号：US06708556B1
公开(公告)日：2004-03-23
申请号：US10009063
申请日：2001-12-05
申请人： You Kwang Kim , Sang Gook Kim , Kyu Ho Hwang
发明人： You Kwang Kim , Sang Gook Kim , Kyu Ho Hwang
IPC分类号： G01B528
CPC分类号： G01Q10/065 , G01Q20/02 , G01Q70/06 , Y10S977/87
摘要： An atomic force microscope (AFM) capable of observing the topography of a sample surface at high speed with a high resolution under the atmospheric pressure and a driving method therefor is provided. The AFM comprises a light beam source unit, a light beam scanner, a scanning probe unit (or matrix), a light beam detection unit, a driving control unit and a display unit. The driving method comprises the steps of vibrating, responsive to a reference signal, a first actuator provided on each of scanning probes; detecting a deflection amount of a cantilever provided with a tip at its free end; and transmitting a servo signal to a second actuator based on the deflection amount of the cantilever.
摘要翻译：提供能够在大气压下以高分辨率高速观察样品表面的形貌的原子力显微镜（AFM）及其驱动方法。 AFM包括光束源单元，光束扫描器，扫描探针单元（或矩阵），光束检测单元，驱动控制单元和显示单元。驱动方法包括以下步骤：响应于参考信号振动，设置在每个扫描探针上的第一致动器; 检测在其自由端设置有尖端的悬臂的偏转量; 并且基于所述悬臂的偏转量将伺服信号发送到第二致动器。

65. 发明申请

US20030226955A1 Fabry-perot resonator and system for measuring and calibrating displacement of a cantilever tip using the same in atomic force microscope 失效
标题翻译：法布里 - 珀罗共振器和用于在原子力显微镜中测量和校准悬臂尖端位移的系统
公开(公告)号：US20030226955A1
公开(公告)日：2003-12-11
申请号：US10457311
申请日：2003-06-09
发明人： Jae Wan Kim , Tae Bong Eom
IPC分类号： H01J040/14
CPC分类号： G01Q20/02 , Y10S977/87
摘要： Disclosed is an atomic force microscope. A Fabry-Perot interferometer where the intensity of light reflected at a cantilever through an optical fiber varies sensitively to a displacement of the cantilever is constructed to accurately measure a distance between the optical fiber and the cantilever. A Fabry-Perot resonator is formed by the optical fiber having an end of a concave mirror shape and a reflective surface of the cantilever. A displacement of a cantilever tip is measured by detecting a signal reflected at the resonator and a feedback signal corresponding to a variation in the displacement of the cantilever tip is generated. The displacement of the cantilever tip is kept constant by actuating a piezoelectric element in a Z-axis direction.
摘要翻译：公开了一种原子力显微镜。 Fabry-Perot干涉仪，其中通过光纤在悬臂处反射的光的强度敏感地变化到悬臂的位移，以准确地测量光纤和悬臂之间的距离。法布里 - 珀罗谐振器由具有凹面镜形状的端部和悬臂的反射表面的光纤形成。通过检测在谐振器处反射的信号来测量悬臂尖端的位移，产生对应于悬臂尖端位移变化的反馈信号。通过在Z轴方向上驱动压电元件，悬臂尖端的位移保持恒定。

66. 发明授权

US06530268B2 Apparatus and method for isolating and measuring movement in a metrology apparatus 失效
公开(公告)号：US06530268B2
公开(公告)日：2003-03-11
申请号：US09855960
申请日：2001-05-15
申请人： James R. Massie
发明人： James R. Massie
IPC分类号： G01B528
CPC分类号： G01Q70/02 , G01B5/28 , G01D5/26 , G01Q10/04 , Y10S977/87 , Y10S977/872
摘要： An metrology apparatus includes an actuator with a first actuator stage to controllably move in first and second orthogonal directions, and a second actuator stage adjacent to the first actuator stage to controllably move in a third direction orthogonal to the first and second orthogonal directions. A coupling is coupled to the second actuator stage and to a multi-bar linkage assembly fixed to a second end of a reference structure. The second actuator stage and the coupling move the linkage in the third orthogonal direction in a manner that substantially isolates the linkage from any second actuator stage motion in the first and second directions. An objective is fixed to the second end of the reference structure and located between a light source and a position sensor. The position sensor measures first actuator stage motion in the first and second directions.

67. 发明申请

US20020125415A1 Apparatus and method for isolating and measuring movement in a metrology apparatus 失效
标题翻译：用于在计量装置中隔离和测量运动的装置和方法
公开(公告)号：US20020125415A1
公开(公告)日：2002-09-12
申请号：US09855960
申请日：2001-05-15
发明人： James R. Massie
IPC分类号： H01J003/14 , H01J005/16
CPC分类号： G01Q70/02 , G01B5/28 , G01D5/26 , G01Q10/04 , Y10S977/87 , Y10S977/872
摘要： An metrology apparatus includes an actuator with a first actuator stage to controllably move in first and second orthogonal directions, and a second actuator stage adjacent to the first actuator stage to controllably move in a third direction orthogonal to the first and second orthogonal directions. A coupling is coupled to the second actuator stage and to a multi-bar linkage assembly fixed to a second end of a reference structure. The second actuator stage and the coupling move the linkage in the third orthogonal direction in a manner that substantially isolates the linkage from any second actuator stage motion in the first and second directions. An objective is fixed to the second end of the reference structure and located between a light source and a position sensor. The position sensor measures first actuator stage motion in the first and second directions.
摘要翻译：计量装置包括具有可在第一和第二正交方向可控地移动的第一致动器级的致动器，以及与第一致动器台相邻的第二致动器级，以在与第一和第二正交方向正交的第三方向上可控地移动。联接器联接到第二致动器台和固定到参考结构的第二端的多杆连杆组件。第二致动器级和联接器以使得连杆与第一和第二方向上的任何第二致动器级运动基本上隔离的方式在第三正交方向上移动连杆。目标被固定在参考结构的第二端并位于光源和位置传感器之间。位置传感器测量第一和第二方向上的第一致动器台运动。

68. 发明申请

US20020124636A1 Apparatus and method for isolating and measuring movement in metrology apparatus 失效
标题翻译：用于隔离和测量计量装置运动的装置和方法
公开(公告)号：US20020124636A1
公开(公告)日：2002-09-12
申请号：US09803268
申请日：2001-03-09
申请人： Veeco Instruments Inc.
发明人： James R. Massie , Roger B. Proksch
IPC分类号： G01B005/28
CPC分类号： G01Q70/02 , G01B5/28 , G01D5/26 , G01Q10/04 , Y10S977/87 , Y10S977/872
摘要： An improved metrology apparatus, such as a scanning probe microscope (SPM), has an actuator that controls motion in three orthogonal directions when it is selectively and electrically stimulated. The X-Y section of the actuator, preferably a piezoelectric actuator, controls motion in the X and Y directions and the Z section of the actuator controls motion in the Z direction. A flexure is attached to the actuator and is mounted on a reference structure to prevent unwanted X and Y motion by the Z section of the actuator from moving a probe attached to the flexure. Preferably, two mirrors are mounted on the flexure. In operation of the SPM, a light beam is directed towards these mirrors. When the flexure moves in the Z direction, one of the mirrors is deflected and causes the reflected light to move across a detector, generating a signal representative of a change in the Z position of the flexure and the probe.
摘要翻译：诸如扫描探针显微镜（SPM）的改进的计量装置具有一个执行器，当它被选择性地和电刺激时，其可以在三个正交方向上控制运动。致动器的X-Y部分，优选地是压电致动器，控制X和Y方向上的运动，并且致动器的Z部分控制Z方向的运动。一个挠曲件连接在执行机构上，并安装在参考结构上，以防止致动器的Z部分的不必要的X和Y运动移动附着在挠曲件上的探头。优选地，两个反射镜安装在挠曲件上。在SPM的操作中，光束被引向这些反射镜。当弯曲部沿Z方向移动时，其中一个反射镜被偏转并使反射光在检测器上移动，产生表示弯曲部和探头的Z位置变化的信号。

69. 发明申请

US20010054691A1 Optical system for scanning microscope 失效
标题翻译：用于扫描显微镜的光学系统
公开(公告)号：US20010054691A1
公开(公告)日：2001-12-27
申请号：US09906985
申请日：2001-07-16
发明人： Sang-Il Park , Frederick I. Linker , Ian R. Smith
IPC分类号： G21K007/00 , G01N023/00
CPC分类号： G01Q20/02 , G01Q30/025 , G01Q70/02 , G02B21/002 , G02B21/26 , Y10S977/851 , Y10S977/869 , Y10S977/87 , Y10S977/874
摘要： An optical system for a scanning probe microscope provides both an optical on-axis view and an optical oblique view of the sample by means of two optical paths each providing an image to a CCD camera via an auto-zoom lens. A shutter alternately blocks the image of either view from reaching the auto-zoom lens. The CCD camera provides the optical image to a video display which also displays the scanning probe image, thus eliminating the need for eyepieces and allowing easy viewing of both the optical and scanning probe images simultaneously.
摘要翻译：用于扫描探针显微镜的光学系统通过两个光学路径提供样品的光学轴向视图和光学斜视图，每个光学路径通过自动变焦镜头向CCD照相机提供图像。快门交替阻止任一视图的图像到达自动变焦镜头。 CCD摄像机将光学图像提供给还显示扫描探针图像的视频显示器，从而不需要目镜，并且可以同时轻松查看光学和扫描探针图像。

70. 发明授权

US06330824B1 Photothermal modulation for oscillating mode atomic force microscopy in solution 有权
标题翻译：用于振荡模式的光热调制原子力显微镜在溶液中
公开(公告)号：US06330824B1
公开(公告)日：2001-12-18
申请号：US09506617
申请日：2000-02-18
申请人： Dorothy A. Erie , Glenn Ratcliff , Richard Superfine
发明人： Dorothy A. Erie , Glenn Ratcliff , Richard Superfine
IPC分类号： G01B528
CPC分类号： G01Q20/02 , G01B5/28 , G01Q10/045 , G01Q60/32 , Y10S977/87 , Y10S977/873
摘要： A method of imaging a sample present in a solution by employing an atomic force microscope comprises providing an atomic force microscope having a cantilever that is under the solution, contacting the cantilever with energy to cause the cantilever to bend and vibrate, and detecting the amplitude of vibration of the cantilever from the energy. The cantilever has at least one coating present thereon to absorb energy such that the cantilever bends and vibrates.
摘要翻译：通过使用原子力显微镜对存在于溶液中的样品进行成像的方法包括提供具有在溶液下方的悬臂的原子力显微镜，使悬臂与能量接触以使悬臂弯曲和振动，并且检测振幅悬臂从能量的振动。悬臂具有至少一个存在于其上的涂层以吸收能量，使得悬臂弯曲并振动。

你已经成功收藏专利！

检索式保存成功!

IPRDB

热门服务

关于我们

友情链接

联系方式