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    • 62. 发明申请
    • BOUNDARY ACOUSTIC WAVE DEVICE
    • 边界声波装置
    • US20140117810A1
    • 2014-05-01
    • US13845205
    • 2013-03-18
    • Murata Manufacturing Co., Ltd.
    • Takashi YAMANETakeshi Nakao
    • H01L41/18
    • H01L41/18H03H9/0222H03H9/02559H03H9/02574
    • A boundary acoustic wave device includes an LiTaO3 piezoelectric substrate3, a first dielectric medium layer disposed on the piezoelectric substrate, a second dielectric medium layer disposed on the first medium layer and having a sound velocity different from the first medium layer, and an interdigital electrode disposed at the boundary between the piezoelectric substrate and the first medium layer. The sound velocity of the first medium layer is less than the sound velocity of LiTaO3. The sound velocity of the second medium layer is greater than the sound velocity of LiTaO3. The inequality (h/λ)×a≦0.05 is satisfied, where H is the thickness of the first medium layer, h is the thickness of the interdigital electrode, λ is the period of electrode fingers of the interdigital electrode, and a is the ratio of the density of a metal of the interdigital electrode to the density of Au.
    • 弹性边界波装置包括LiTaO3压电基片3,设置在压电基片上的第一介电层,设置在第一介质层上并具有与第一介质层不同的声速的第二介质介质层, 在压电基板和第一介质层之间的边界处。 第一介质层的声速小于LiTaO3的声速。 第二介质层的声速大于LiTaO3的声速。 满足不等式(h /λ)×a≦̸ 0.05,其中H是第一介质层的厚度,h是叉指电极的厚度,λ是叉指电极的电极指的周期,a是 指数电极的金属密度与Au的密度之比。