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    • 61. 再颁专利
    • Plasma processing apparatus and method
    • 等离子体处理装置及方法
    • USRE36810E
    • 2000-08-08
    • US165545
    • 1998-10-02
    • Masashi ArasawaKatsuhiko OnoHiroshi NishikawaKazuo Tsuchiya
    • Masashi ArasawaKatsuhiko OnoHiroshi NishikawaKazuo Tsuchiya
    • H01L21/302C23C16/458H01J37/32H01L21/205H01L21/3065H01L21/00
    • C23C16/466C23C16/4586H01J37/32431H01J2237/2001
    • A plasma processing apparatus comprises a first passage opened in a top of suscepter at a peripheral area thereof, a first gas supply source for supplying heat exchange gas into a small clearance between the suscepter and a wafer through the first passage, a first vacuum pump for exhausting the clearance through the first passage, a second passage opened in the top of the suscepter at a center area thereof, a second gas supply source for supplying heat exchange gas into the clearance through the second passage, a second vacuum pump for exhausting the clearance through the second passage, and a controller for controlling the first and second gas supply sources and the first and second vacuum pumps independently of the others in such a way that backpressure caused in the second passage by the second gas supply source and vacuum pump can become lower than backpressure caused in the first passage by the first gas supply source and vacuum pump.
    • 一种等离子体处理装置,包括:在其周边区域的开口的顶部开口的第一通路;第一气体供给源,其通过第一通路将热交换气体供给到所述容器和晶片之间的小间隙;第一真空泵, 通过第一通道排出间隙,第二通道在其中心区域处在容器的顶部开口,第二气体供应源,用于通过第二通道将热交换气体供应到间隙中;第二真空泵,用于排出间隙 通过第二通道,以及用于独立于其他方式控制第一和第二气体供给源以及第一和第二真空泵的控制器,使得由第二气体供应源和真空泵在第二通道中产生的背压可以变成 低于由第一气体供应源和真空泵在第一通道中引起的背压。
    • 63. 发明授权
    • Picture transmission system
    • 图片传输系统
    • US5953044A
    • 1999-09-14
    • US782147
    • 1997-01-10
    • Hitoshi KatoAkino InoueShinji NojimaShugo HorikamiMasaki SohmaSatoshi KageyuHiroshi Nishikawa
    • Hitoshi KatoAkino InoueShinji NojimaShugo HorikamiMasaki SohmaSatoshi KageyuHiroshi Nishikawa
    • H04L12/40H04N7/08H04N7/081H04N7/173H04N7/18H04N21/2365H04N21/2385H04N21/24
    • H04N7/181
    • A picture transmission system capable of establishing arbitrary picture connections with picture inputting units exceeding in number channel resources of a transmission medium for multiplexing and transmitting video information taken through the picture inputting units. A picture sending state storage unit provided corresponding to each of the picture inputting units virtually retains channel resources whose number equals the number of picture outputting units to which the picture inputting units are in connection. For picture connection switching from one picture outputting unit to a different picture inputting unit, the picture sending state storage unit gives its channel resource to the different picture inputting unit. The system is provided with a picture connection managing unit for controlling the picture connections between the picture inputting units and the picture outputting units. The picture connection managing unit accepts a picture connection request to perform the centralized management of channel resources of the transmission medium to allow dynamic channel resource allocation. Under control of the picture connection managing unit, the picture connection between the picture inputting unit and the picture outputting unit takes place through an allocated channel resource.
    • 一种图像传输系统,其能够与图像输入单元建立任意图像连接,所述图像输入单元超过用于复用和传输通过图像输入单元拍摄的视频信息的传输介质的信道资源。 与每个图像输入单元相对应地设置的图像发送状态存储单元实际上保留了数量等于图像输入单元连接的图像输出单元的数量的信道资源。 对于从一个图像输出单元到另一图像输入单元的图像连接切换,图像发送状态存储单元将其信道资源给予不同的图像输入单元。 该系统设置有用于控制图像输入单元和图像输出单元之间的图像连接的图像连接管理单元。 图像连接管理单元接受图像连接请求,对传输介质的信道资源进行集中管理,以允许动态信道资源分配。 在图像连接管理单元的控制下,图像输入单元和图像输出单元之间的图像连接通过分配的频道资源进行。