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    • 64. 发明授权
    • Nonvolatile semiconductor memory device and method of manufacturing the same
    • 非易失性半导体存储器件及其制造方法
    • US08164131B2
    • 2012-04-24
    • US11633292
    • 2006-12-04
    • Toshio KobayashiSaori Hara
    • Toshio KobayashiSaori Hara
    • H01L27/108H01L29/94
    • H01L29/792H01L29/66833H01L29/7923
    • A nonvolatile semiconductor memory device includes: a first semiconductor region having first conductivity; a channel formation region in which a channel inversion layer having second conductivity is formed; a second semiconductor region having the second conductivity; a third semiconductor region having the second conductivity; a laminated insulating film formed on the channel formation region; and a control electrode formed on the laminated insulating film. The laminated insulating film includes a first insulating film, a charge storage film, and a second insulating film in order from the channel formation region side. The control electrode extends to above one of the second semiconductor region and the third semiconductor region. The charge storage film present between an extended portion of the control electrode and the second semiconductor region or the third semiconductor region is removed and a portion where the charge storage film is removed is filled with a third insulating film.
    • 非易失性半导体存储器件包括:具有第一导电性的第一半导体区域; 形成具有第二导电性的沟道反转层的沟道形成区域; 具有第二导电性的第二半导体区域; 具有第二导电性的第三半导体区域; 形成在沟道形成区上的叠层绝缘膜; 以及形成在层叠绝缘膜上的控制电极。 叠层绝缘膜从沟道形成区域侧开始依次包括第一绝缘膜,电荷存储膜和第二绝缘膜。 控制电极延伸到第二半导体区域和第三半导体区域中的一个之上。 除去存在于控制电极的延伸部分与第二半导体区域或第三半导体区域之间的电荷存储膜,并且用第三绝缘膜填充电荷存储膜被除去的部分。
    • 69. 发明授权
    • Semiconductor device and method of manufacturing semiconductor device
    • 半导体装置及其制造方法
    • US07605424B2
    • 2009-10-20
    • US11846802
    • 2007-08-29
    • Tsutomu ImotoToshio KobayashiTakayoshi Kato
    • Tsutomu ImotoToshio KobayashiTakayoshi Kato
    • H01L29/94
    • H01L29/6659H01L21/26586H01L29/1037H01L29/6653H01L29/66545H01L29/66628H01L29/66659H01L29/7835
    • A semiconductor device including: a semiconductor region having a first semiconductor face and a second semiconductor face connected to the first semiconductor face and having an inclination with respect to the first semiconductor face; a gate insulating film formed on the first and on the second semiconductor faces; a gate electrode formed on the gate insulating film including a part on a boundary between the first semiconductor face and the second semiconductor face; a source impurity region formed in the semiconductor region so as to overlap the gate electrode within the first semiconductor face with the gate insulating film interposed between the source impurity region and the gate electrode; and a drain impurity region formed in the semiconductor region directly under the second semiconductor face at least.
    • 一种半导体器件,包括:半导体区域,具有连接到第一半导体表面并且具有相对于第一半导体表面的倾斜的第一半导体面和第二半导体面; 形成在所述第一和第二半导体面上的栅极绝缘膜; 形成在所述栅极绝缘膜上的栅极,所述栅极绝缘膜包括在所述第一半导体面和所述第二半导体面之间的边界上的一部分; 源极杂质区,形成在所述半导体区域中,以与所述栅极绝缘膜插入在所述源极杂质区域和所述栅极电极之间,与所述第一半导体面内的所述栅电极重叠; 以及至少在第二半导体面的正下方的半导体区域中形成的漏极杂质区域。