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    • 62. 发明申请
    • OPTICAL TRANSMISSION MODULE, ELECTRONIC DEVICE AND METHOD FOR MANUFACTURING OPTICAL TRANSMISSION MODULE
    • 光传输模块,电子设备及制造光传输模块的方法
    • US20110186717A1
    • 2011-08-04
    • US12674256
    • 2008-12-24
    • Junichi TanakaHiroshi SameshimaNaru Yasuda
    • Junichi TanakaHiroshi SameshimaNaru Yasuda
    • G02B6/42H05K13/00
    • G02B6/4214G02B6/4212G02B6/43Y10T29/49002
    • A light transmission module includes a light transmission path for transmitting light, an optical element including a light emitting and receiving surface for optically coupling with the light transmitted by the light transmission path, and being formed with a light emitting and receiving point having a function of photoelectric conversion and an electrode pad on the light emitting and receiving surface. The light transmission module further includes a substrate mounted with the optical element and an electrical wiring and an electrical connecting member for electrically connecting the electrode pad and the electrical wiring. The substrate includes a wiring exposed surface where the electrical wiring is exposed. The electrical connecting member is made of solidified object of a liquid conductive material arranged to contact the electrical wiring, which is exposed at the wiring exposed surface, and the electrode pad.
    • 光传输模块包括用于透射光的光传输路径,包括光发射和接收表面的光学元件,用于与由光传输路径透射的光光学耦合,并且形成有具有以下功能的发光和接收点: 光电转换和发光和接收表面上的电极焊盘。 光传输模块还包括安装有光学元件的基板和用于电连接电极焊盘和电线的电线和电连接构件。 基板包括布线暴露表面,其中电线被暴露。 电连接构件由布置成接触暴露在布线露出表面处的电布线和电极焊盘的液体导电材料的固化物体制成。
    • 67. 发明授权
    • Method and device for examination of nonuniformity defects of patterns
    • 检查图案不均匀性缺陷的方法和装置
    • US07583376B2
    • 2009-09-01
    • US10575378
    • 2004-11-17
    • Junichi TanakaNoboru Yamaguchi
    • Junichi TanakaNoboru Yamaguchi
    • G01N21/00
    • G03F1/84G01N21/956G01N2021/95676
    • It is possible to detect with high precision a plurality of types of nonuniformity defects that occur in patterns formed on the surface of an examination object. A device (10) for examination of nonuniformity defects that has a light source (12) for emitting light to a photomask 50 whose surface is provided with a repeating pattern (51) in which unit patterns (53) are arrayed in a regular fashion, and a photodetector (13) for photodetecting and converting into photodetection data scattered light from the photomask, so that the photodetection data is observed to detect nonuniformity defects that have occurred in the repeating pattern, in the device further having a wavelength filter (14) for selecting and extracting one or a plurality of desired wavelength bands from the light of a plurality of wavelength bands, wherein nonuniformity defects of the repeating pattern are detected using the selected and extracted light of the wavelength band.
    • 可以高精度地检测在检查对象的表面上形成的图案中出现的多种不均匀性缺陷。 一种用于检查不均匀性缺陷的装置(10),其具有用于向表面设置有以规则方式排列单位图案(53)的重复图案(51)的光掩模50发光的光源(12) 以及光检测器(13),用于光检测并转换成来自光掩模的光检测数据散射光,使得观察到光检测数据以检测在重复图案中发生的不均匀性缺陷,在还具有波长滤波器(14)的器件中, 从多个波长带的光中选择和提取一个或多个期望的波长带,其中使用所选择和提取的波长带的光来检测重复图案的不均匀性缺陷。