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61. 发明授权

US09194044B2 Deposition apparatus and method 有权
标题翻译：沉积装置和方法
公开(公告)号：US09194044B2
公开(公告)日：2015-11-24
申请号：US13029402
申请日：2011-02-17
申请人： Kunihiko Suzuki , Shinichi Mitani
发明人： Kunihiko Suzuki , Shinichi Mitani
IPC分类号： C23C16/00 , C23C16/455
CPC分类号： C23C16/4557
摘要： A deposition apparatus 50 includes a chamber 1 having at its top section a gas inlet 4 for supplying deposition gas 25. Inside chamber 1 is a susceptor 7 on which to place a substrate 6; a heater 8 located below the substrate 6; and a liner 2 for covering the inner walls of the chamber 1. Apparatus 50 deposits a film on the substrate 6 by supplying deposition gas 25 from gas inlet 4 into chamber 1 while heating substrate 6. An upper electric resistance heater cluster 35 is located between the inner walls of the chamber 1 and liner 2 such that the upper heater 35 surrounds the liner 2. The upper heater 35 is divided vertically into electric resistance heaters 36, 37, and 38 which are independently temperature-controlled. The substrate 6 is heated with the use of both heater 8 and the upper heater cluster 35.
摘要翻译：沉积设备50包括在其顶部具有用于供应沉积气体25的气体入口4的腔室1.腔室1内是放置衬底6的基座7; 位于基板6下方的加热器8; 以及用于覆盖室1的内壁的衬垫2.装置50通过在加热衬底6的同时将气体入口4的沉积气体25供应到室1中而将衬底6沉积在衬底6上。上电阻加热器组35位于腔室1和衬套2的内壁，使得上部加热器35围绕衬垫2.上部加热器35被垂直分割成独立温度控制的电阻加热器36,37和38。使用加热器8和上加热器簇35来加热基板6。

62. 发明授权

US09128026B2 Particulate matter processing apparatus 有权
标题翻译：颗粒物处理装置
公开(公告)号：US09128026B2
公开(公告)日：2015-09-08
申请号：US13519021
申请日：2011-03-16
申请人： Shinichi Mitani , Hiroshi Nomura , Eiji Murase
发明人： Shinichi Mitani , Hiroshi Nomura , Eiji Murase
IPC分类号： G01N15/00 , G01N27/04 , B03C3/41 , B03C3/68 , F01N11/00 , B03C3/017 , G01N15/06
CPC分类号： G01N27/04 , B03C3/0175 , B03C3/41 , B03C3/68 , B03C2201/24 , B03C2201/30 , F01N11/00 , F01N11/007 , F01N2560/05 , F01N2560/12 , F01N2900/1606 , G01N15/0606 , Y02T10/47
摘要： An amount of aggregation of particulate matter is estimated with a high degree of accuracy. A particulate matter processing apparatus in which a processing part with an electrode installed therein is arranged in an exhaust passage of an internal combustion engine, wherein particulate matter is caused to aggregate by generating a potential difference between the electrode and the processing part, is provided with a power supply that is connected to the electrode and applies a voltage thereto, a current detection device that detects an electric current which passes through the electrode, an estimation device that estimates an amount of aggregation of the particulate matter based on the electric current detected at the time when the voltage is applied to the electrode, an air fuel ratio detection device that detects or estimates an air fuel ratio of an exhaust gas which flows through the exhaust passage, and a prohibition device which prohibits an estimation by the estimation device in the case of a rich air fuel ratio.
摘要翻译：以高精度估计颗粒物质的聚集量。在其中安装有电极的处理部件的颗粒物处理装置设置在内燃机的排气通道中，其中通过在电极和处理部件之间产生电位差而使颗粒物质聚集，与电极连接并对其施加电压的电源，检测通过电极的电流的电流检测装置，基于在电极上检测到的电流来估计颗粒物的聚集量的估计装置，对电极施加电压的时间，检测或估计通过排气通路的排气的空燃比的空燃比检测装置，以及禁止在估计装置中进行的估计的禁止装置超大空燃比的情况。

63. 发明申请

US20140007650A1 PARTICULATE MATTER PROCESSING APPARATUS 有权
标题翻译：颗粒物加工设备
公开(公告)号：US20140007650A1
公开(公告)日：2014-01-09
申请号：US13519021
申请日：2011-03-16
申请人： Shinichi Mitani , Hiroshi Nomura , Eiji Murase
发明人： Shinichi Mitani , Hiroshi Nomura , Eiji Murase
IPC分类号： G01N27/04
CPC分类号： G01N27/04 , B03C3/0175 , B03C3/41 , B03C3/68 , B03C2201/24 , B03C2201/30 , F01N11/00 , F01N11/007 , F01N2560/05 , F01N2560/12 , F01N2900/1606 , G01N15/0606 , Y02T10/47
摘要： An amount of aggregation of particulate matter is estimated with a high degree of accuracy. A particulate matter processing apparatus in which a processing part with an electrode installed therein is arranged in an exhaust passage of an internal combustion engine, wherein particulate matter is caused to aggregate by generating a potential difference between the electrode and the processing part, is provided with a power supply that is connected to the electrode and applies a voltage thereto, a current detection device that detects an electric current which passes through the electrode, an estimation device that estimates an amount of aggregation of the particulate matter based on the electric current detected at the time when the voltage is applied to the electrode, an air fuel ratio detection device that detects or estimates an air fuel ratio of an exhaust gas which flows through the exhaust passage, and a prohibition device which prohibits an estimation by the estimation device in the case of a rich air fuel ratio.
摘要翻译：以高精度估计颗粒物质的聚集量。在其中安装有电极的处理部件的颗粒物处理装置设置在内燃机的排气通道中，其中通过在电极和处理部件之间产生电位差而使颗粒物质聚集，与电极连接并对其施加电压的电源，检测通过电极的电流的电流检测装置，基于在电极上检测到的电流来估计颗粒物的聚集量的估计装置，对电极施加电压的时间，检测或估计通过排气通路的排气的空燃比的空燃比检测装置，以及禁止在估计装置中进行的估计的禁止装置超大空燃比的情况。

64. 发明授权

US08610034B2 Heater, manufacturing apparatus for semiconductor device, and manufacturing method for semiconductor device 有权
标题翻译：加热器，半导体装置的制造装置以及半导体装置的制造方法
公开(公告)号：US08610034B2
公开(公告)日：2013-12-17
申请号：US12547360
申请日：2009-08-25
申请人： Kunihiko Suzuki , Shinichi Mitani
发明人： Kunihiko Suzuki , Shinichi Mitani
IPC分类号： H01L21/465 , H05B3/03
CPC分类号： H05B3/143 , C23C16/46 , C30B25/10 , H01L21/67109
摘要： A heater for heating a wafer includes elements that are arranged at a distance from one another in a rotationally symmetrical fashion with respect to a shaft extending through a center of the wafer, an electrode being provided to each of the elements to heat the wafer uniformly.
摘要翻译：用于加热晶片的加热器包括相对于延伸穿过晶片中心的轴以旋转对称的方式彼此间隔设置的元件，提供给每个元件的电极以均匀地加热晶片。

65. 发明申请

US20130013173A1 FUEL SUPPLY SYSTEM FOR INTERNAL COMBUSTION ENGINE 有权
标题翻译：内燃机燃油供应系统
公开(公告)号：US20130013173A1
公开(公告)日：2013-01-10
申请号：US13636045
申请日：2010-03-19
申请人： Takashi Tsunooka , Yasuyuki Irisawa , Shinichi Mitani , Satoshi Yoshizaki , Akira Satou , Shigeyuki Urano
发明人： Takashi Tsunooka , Yasuyuki Irisawa , Shinichi Mitani , Satoshi Yoshizaki , Akira Satou , Shigeyuki Urano
IPC分类号： F02D41/30
CPC分类号： F02M31/18 , F02D19/0605 , F02D19/0628 , F02D19/0655 , F02D19/0665 , F02D19/0668 , F02D19/0678 , F02D19/0692 , F02D19/081 , F02D33/006 , F02D41/0025 , F02D41/064 , Y02T10/126 , Y02T10/36
摘要： An engine includes a normal fuel tank, fuel gas tank, an in-tank injection valve and a fuel gas supply valve. During operation of the engine, in a state where the fuel gas supply valve is closed, a fuel is injected into the fuel gas tank through the in-tank injection valve to generate a fuel gas by vaporizing the fuel. The fuel gas is stored in the fuel gas tank and is maintained in the gas phase due to the natural decompression even after the engine is stopped. To start the engine, the fuel gas supply valve is opened to supply the fuel gas in the fuel gas tank to a surge tank. Thus, compared with the case where the fuel gas is generated at the start of the engine, the fuel gas can be quickly supplied into the cylinder, so that the ability to start the engine is improved.
摘要翻译：发动机包括正常燃料箱，燃料气罐，罐内喷射阀和燃料气体供给阀。在发动机的运转中，在燃料气体供给阀关闭的状态下，燃料通过箱内喷射阀向燃料气体罐内喷出，通过使燃料蒸发而产生燃料气体。燃料气体储存在燃料气罐中，并且即使在发动机停止之后也由于自然减压而保持在气相中。为了启动发动机，燃料气体供给阀被打开以将燃料气体箱中的燃料气体供应到缓冲罐。因此，与在发动机起动时产生燃料气体的情况相比，可以将燃料气体快速供给到气缸中，从而提高起动发动机的能力。

66. 发明申请

US20120035830A1 CONTROL DEVICE FOR INTERNAL COMBUSTION ENGINE 有权
标题翻译：内燃机控制装置
公开(公告)号：US20120035830A1
公开(公告)日：2012-02-09
申请号：US13264215
申请日：2009-04-16
申请人： Shinichi Mitani , Shigemasa Hirooka , Takashi Tsunooka , Akira Satou , Shigeyuki Urano
发明人： Shinichi Mitani , Shigemasa Hirooka , Takashi Tsunooka , Akira Satou , Shigeyuki Urano
IPC分类号： F01N3/02
CPC分类号： F01N3/043 , F01N3/046 , F01N9/00 , F01P2003/028 , F01P2060/16 , F02D41/1446 , F02N11/0829 , F02N11/084 , F02N2200/026 , Y02T10/20 , Y02T10/47 , Y02T10/48
摘要： A control device for an internal combustion engine according to the present embodiment, includes: cooling units 40L and 40R arranged on a path where a coolant is circulated, and cooling an exhaust gas of the internal combustion engine with the coolant flowing through the cooling units 40L and 40R; and ECUs 7L and 7R estimating a heat quantity of the exhaust gas, and deciding whether or not to prohibit an idle reduction control in response to the estimated heat quantity of the exhaust gas.
摘要翻译：本实施方式的内燃机的控制装置包括：冷却单元40L，40R，其配置在冷却剂循环的路径上，并且冷却流过冷却单元40L的冷却剂的内燃机的排气和40R; 以及ECU7L，7R，对排气的热量进行推定，并根据排气的估计热量决定是否禁止怠速减少控制。

67. 发明申请

US20110308500A1 CONTROL APPARATUS AND CONTROL METHOD FOR INTERNAL COMBUSTION ENGINE 有权
标题翻译：内燃机控制装置及控制方法
公开(公告)号：US20110308500A1
公开(公告)日：2011-12-22
申请号：US13162221
申请日：2011-06-16
申请人： Akira Sato , Yasuyuki Irisawa , Shinichi Mitani , Takashi Tsunooka , Shigeyuki Urano , Satoshi Yoshizaki
发明人： Akira Sato , Yasuyuki Irisawa , Shinichi Mitani , Takashi Tsunooka , Shigeyuki Urano , Satoshi Yoshizaki
IPC分类号： F02D19/02 , F02M37/04
CPC分类号： F02M31/18 , F02D19/0605 , F02D19/0628 , F02D19/0655 , F02D19/0665 , F02D19/081 , F02D19/084 , Y02T10/126 , Y02T10/36
摘要： A control apparatus and control method is provided for an internal combustion engine that includes a vaporized fuel tank in which vaporized fuel is stored, and a normally-closed vaporized fuel supply valve that opens and closes a connecting portion between the vaporized fuel tank and a surge tank. This apparatus and method produce vaporized fuel by injecting fuel into the tank while the vaporized fuel supply valve is closed while the engine is operating, then open the vaporized fuel supply valve at engine startup and supply the vaporized fuel stored in the tank to the surge tank. If there is no vaporized fuel remaining in the vaporized fuel tank when the engine stops, vacuum is generated in the vaporized fuel tank by temporarily opening the vaporized fuel supply valve before the engine stops. Vaporized fuel is then produced by injecting fuel into the vaporized fuel tank in this vacuum state.
摘要翻译：提供一种用于内燃机的控制装置和控制方法，所述内燃机包括蒸发燃料的汽化燃料箱，其中储存蒸发燃料;以及常闭汽化燃料供给阀，其将所述汽化燃料箱与喘振之间的连接部分打开和关闭坦克。该装置和方法通过在发动机运转时关闭燃料燃料供给阀的同时将燃料喷射到罐中而产生汽化燃料，然后在发动机起动时打开汽化燃料供给阀并将储存在罐中的蒸发燃料供应到缓冲罐。如果在发动机停止时在蒸发的燃料箱中没有蒸发的燃料残留，则在发动机停止之前暂时打开蒸发的燃料供给阀，在蒸发的燃料箱中产生真空。然后通过在该真空状态下将燃料喷射到蒸发的燃料箱中来产生汽化燃料。

68. 发明申请

US20110247593A1 CONTROL APPARATUS FOR INTERNAL COMBUSTION ENGINE 审中-公开
标题翻译：内燃机控制装置
公开(公告)号：US20110247593A1
公开(公告)日：2011-10-13
申请号：US13082703
申请日：2011-04-08
申请人： Satoshi Yoshizaki , Yasuyuki Irisawa , Shinichi Mitani , Takashi Tsunooka , Akira Satou , Shigeyuki Urano
发明人： Satoshi Yoshizaki , Yasuyuki Irisawa , Shinichi Mitani , Takashi Tsunooka , Akira Satou , Shigeyuki Urano
IPC分类号： F02M33/02
CPC分类号： F02M31/18 , Y02T10/126
摘要： A control apparatus for an internal combustion engine includes a fuel tank; a vaporized fuel tank that is connected to an intake passage; an in-tank fuel supplying portion that supplies fuel in the fuel tank to the vaporized fuel tank; a vaporized fuel supply valve that opens and closes a connecting portion between the vaporized fuel tank and the intake passage; an air introduction valve provided in the vaporized fuel tank; a throttle valve; a vaporized fuel producing portion that produces vaporized fuel in the vaporized fuel tank; a vaporized fuel supplying portion that supplies vaporized fuel stored in the vaporized fuel tank; and a supply amount controlling portion that controls a supply amount of vaporized fuel according to an opening amount of the throttle valve by driving the throttle valve when supplying vaporized fuel.
摘要翻译：一种用于内燃机的控制装置包括燃料箱; 连接到进气通道的汽化燃料箱; 将燃料箱内的燃料供给汽化后的燃料箱的箱内燃料供给部; 气化燃料供给阀，其使所述汽化燃料箱与所述进气通路之间的连接部分开闭; 设置在蒸发的燃料箱中的空气引入阀; 节流阀; 汽化燃料生产部分，其在汽化燃料箱中产生汽化燃料; 蒸发燃料供应部分，其供应储存在汽化燃料箱中的蒸发燃料; 以及供给量控制部，其通过在供给汽化燃料时驱动所述节流阀，根据所述节流阀的开度来控制蒸发燃料的供给量。

69. 发明申请

US20110092075A1 MANUFACTURING APPARATUS AND METHOD FOR SEMICONDUCTOR DEVICE 有权
标题翻译：制造设备和半导体器件的方法
公开(公告)号：US20110092075A1
公开(公告)日：2011-04-21
申请号：US12903384
申请日：2010-10-13
申请人： Kunihiko Suzuki , Shinichi Mitani
发明人： Kunihiko Suzuki , Shinichi Mitani
IPC分类号： H01L21/46
CPC分类号： H01L21/02639 , C23C16/4584 , C23C16/4586 , C30B25/10 , H01L21/67109 , H01L21/68792
摘要： A semiconductor device manufacturing apparatus includes a chamber in which a wafer is loaded; a first gas supply unit for supplying a process gas into the chamber; a gas exhaust unit for exhausting a gas from the chamber; a wafer support member on which the wafer is placed; a ring on which the wafer support member is placed; a rotation drive control unit connected to the ring to rotate the wafer; a heater disposed in the ring and comprising a heater element for heating the wafer to a predetermined temperature and including an SiC layer on at least a surface, and a heater electrode portion molded integrally with a heater element and including an SiC layer on at least a surface; and a second gas supply unit for supplying an SiC source gas into the ring.
摘要翻译：半导体器件制造装置包括其中装载晶片的腔室; 用于将处理气体供应到所述室中的第一气体供应单元; 用于从所述室排出气体的排气单元; 其上放置晶片的晶片支撑构件; 其上放置有晶片支撑构件的环; 旋转驱动控制单元，连接到所述环以旋转晶片; 设置在所述环中并且包括用于将晶片加热到预定温度并且在至少一个表面上包括SiC层的加热器元件的加热器和与加热器元件整体模制并且包括至少一个SiC层的SiC层的加热器电极部分表面; 以及用于将SiC源气体供给到所述环中的第二气体供给单元。

70. 发明申请

US20110067383A1 WORKING GAS CIRCULATION ENGINE 审中-公开
标题翻译：工作气体循环发动机
公开(公告)号：US20110067383A1
公开(公告)日：2011-03-24
申请号：US12993768
申请日：2009-05-19
申请人： Rentaro Kuroki , Daisaku Sawada , Shinichi Mitani
发明人： Rentaro Kuroki , Daisaku Sawada , Shinichi Mitani
IPC分类号： F02B47/08
CPC分类号： F02M25/12 , F02B29/0412 , F02B43/10 , F02D19/0644 , F02D19/0689 , F02D19/081 , F02M26/35 , F02M26/46 , Y02T10/121 , Y02T10/146 , Y02T10/32 , Y02T10/36
摘要： A working gas circulation engine includes a combustion chamber that is supplied with fuel, the combustion product of which is condensed, and working gas that generates power with the use of combustion of the fuel and that has a specific heat ratio higher than that of air, a circulation path that connects an inlet and an outlet of the combustion chamber to each other in such a manner that the working gas is circulated back to the combustion chamber without being released into the atmosphere, and two condensers that are provided in the circulation path, that are supplied with exhaust gas which contains the combustion product and the working gas, and that condense and remove the combustion product.
摘要翻译：工作气体循环发动机包括燃烧室，其燃烧产物被冷凝，以及工作气体，其通过使用燃料的燃烧产生动力，并且具有高于空气的比热比，将燃烧室的入口和出口彼此连接的循环路径，使得工作气体循环回到燃烧室而不被释放到大气中，并且设置在循环路径中的两个冷凝器，供给含有燃烧产物和工作气体的废气，并且冷凝和除去燃烧产物。

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