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    • 66. 发明授权
    • Manufacturing method of semiconductor device
    • 半导体器件的制造方法
    • US08518740B2
    • 2013-08-27
    • US12828468
    • 2010-07-01
    • Shunpei YamazakiToshinari SasakiJunichiro SakataHiroki Ohara
    • Shunpei YamazakiToshinari SasakiJunichiro SakataHiroki Ohara
    • H01L21/00H01L21/16
    • H01L29/7869H01L21/67109H01L21/67115H01L27/1225
    • An object is to provide a highly reliable semiconductor device including a thin film transistor with stable electric characteristics. In a method for manufacturing a semiconductor device including a thin film transistor in which an oxide semiconductor film is used for a semiconductor layer including a channel formation region, impurities such as moisture existing in the gate insulating layer are reduced before formation of the oxide semiconductor film, and then heat treatment (heat treatment for dehydration or dehydrogenation) is performed so as to improve the purity of the oxide semiconductor film and reduce impurities such as moisture. After that, slow cooling is performed in an oxygen atmosphere. Besides impurities such as moisture existing in the gate insulating layer and the oxide semiconductor film, impurities such as moisture existing at interfaces between the oxide semiconductor film and upper and lower films provided in contact therewith are reduced.
    • 本发明的目的是提供一种具有稳定电特性的薄膜晶体管的高度可靠的半导体器件。 在制造包括薄膜晶体管的半导体器件的方法中,其中氧化物半导体膜用于包括沟道形成区域的半导体层,在形成氧化物半导体膜之前,存在于栅极绝缘层中的诸如水分的杂质减少 ,然后进行热处理(脱水或脱氢的热处理),以提高氧化物半导体膜的纯度并减少诸如水分的杂质。 之后,在氧气氛中进行缓慢冷却。 除了存在于栅极绝缘层和氧化物半导体膜中的杂质等杂质以外,氧化物半导体膜与与其接触的上下膜之间的界面处存在的诸如水分的杂质减少。