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    • 66. 发明授权
    • Monolithic nozzle assembly formed with mono-crystalline silicon wafer and method for manufacturing the same
    • 用单晶硅晶片形成的单片喷嘴组件及其制造方法
    • US06663231B2
    • 2003-12-16
    • US09790714
    • 2001-02-23
    • Eun-sung LeeHyun-cheol KimYong-soo OhCimoo Song
    • Eun-sung LeeHyun-cheol KimYong-soo OhCimoo Song
    • B41J2045
    • B41J2/1433B41J2/162B41J2/1628B41J2/1629B41J2/1631B41J2/1632B41J2/1634B41J2/1642
    • A monolithic nozzle assembly formed with a mono-crystalline silicon substrate includes a damper for temporarily storing an incoming fluid, and a nozzle having a pyramidal portion and an outlet portion, the pyramidal portion for guiding the flow of the fluid from the damper toward the outlet portion and for increasing the pressure of the fluid, and the outlet portion through which the fluid is discharged, wherein the damper, and the pyramidal and outlet portions of the nozzle are aligned with each other and formed in the single mono-crystalline silicon substrate by continuous processes. The monolithic nozzle assembly can be formed with a single (100) mono-crystalline silicon wafer. Compared with a complicated nozzle assembly formed using a great number of silicon wafers and plates, the configuration of the monolithic nozzle assembly is simple, and can be manufactured on a mass production scale by semiconductor manufacturing processes.
    • 形成有单晶硅基板的单片喷嘴组件包括用于临时存储进入流体的阻尼器和具有锥体部分和出口部分的喷嘴,用于将流体从阻尼器流向出口的锥形部分 并且用于增加流体的压力和流体被排出的出口部分,其中阻尼器和喷嘴的金字塔形和出口部分彼此对齐并且通过在单个单晶硅衬底中形成在单个单晶硅衬底中 连续过程。 单片喷嘴组件可以由单个(100)单晶硅晶片形成。 与使用大量硅晶片和板形成的复杂喷嘴组件相比,单片喷嘴组件的构造简单,并且可以通过半导体制造工艺在大规模生产规模上制造。